UPL-120 Ultra Precision Elevation Stage

Travel range 13 mm (1/2")
Uni-directional repeatability down to 0.05 μm
Maximum speed 6 mm/sec
Load capacity up to 15 kg
Integrated optical limit switches
Option: linear scale (center mounted)
Vacuum Datasheet

The UPL-120 ultra-precision elevation stage replaces our older UPL-160 stage. It was specifically designed for wafer inspection, fiber alignment and any other task where maximum positioning accuracy and reliability are absolutely mandatory.

The UPL-120 stage can be equipped with an integrated linear scale. High-quality cross roller bearings mounted on a stress-relieved tempered aluminum alloy body guarantee a maximum load capacity and smooth motion. The UPL-120 stage is offered with a 2-phase SM motor or with a DC-motor and is equipped with two optical limit switches.


UPL-120


Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

DC-B-028

200

150

150

130

38

130

35

65

2Phase-025

200

150

200

130

38

150

35

65


Travel range (mm)


13

Straightness (µm)

± 3

Pitch (µrad)

± 100

Yaw (µrad)

± 100

Weight (kg)

2.1


Motor (Pitch 2 mm)

DC-B-028

2Phase-025


Linear scale


LS-025

Speed max. (mm/sec)

6

6

Resolution calculated (µm)

0.0134

1.34 (FS)

Resolution typical (µm)

0.5

0.5

0.1

Bi-directional Repeatability (µm)

± 1.5

± 1.5

± 0.05

Uni-directional Repeatability (µm)

0.5

0.5

0.05

Nominal Current (A)

0.98

2

Voltage Range (V)

24

Accuracy

on request

on request

on request

Velocity Range (mm/sec)

0.001 ... 6

0.001 ... 6

0.001 ... 6

Material

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI UPL-120 Vakuumversion
DC-B-028, 2Phase-025

Downloads

Datenblatt

pdf
pdf

PI Datenblatt UPL-120

Ultra Precision Elevation Stage
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pdf - 759 KB
pdf - 759 KB
pdf

PI Datenblatt UPL-120 Vakuum

Ultra Precision Elevation Stage
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Englisch
pdf - 257 KB

Dokumentation

pdf

PI miCos Technical Data Linear and Rotary Encoders

Technical Data of Linear Encoders (LE) and Rotary Encoders (RE/AE)
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Englisch
pdf - 83 KB
pdf

PI miCos Motors & Encoders: Stepper Motors

Technical Data of 2-Phase Stepper
---
Englisch
pdf - 58 KB
pdf

PI miCos Motors & Encoders: DC-Brush Motors

Technical Data of DC-Brush Motors
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Englisch
pdf - 78 KB
pdf
pdf

User Manual UPL-120

Hochpräziser Hubtisch UPL-120
pdf - 760 KB
pdf - 906 KB

3D Modelle

zip

UPL-120 STEP

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Englisch
zip - 7 MB