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UPS-150 Ultra Precision Stage

PI UPS-150
    • Linear Motor
    • Travel range up to 305 mm (12")
    • Uni-directional repeatability down to 0.015 µm
    • Maximum speed 600 mm/sec
    • Load capacity up to 15 kg
    • Integrated limit switches
    • Integrated linear scale (center mounted)
    • High long-term stability

The Ultra Precision Stage UPS-150 was specifically designed for sub-surface wafer inspection, fiber alignment, high precision robotics and for all tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.
All ultra precision stages UPS-150 are equipped with a linear scale which is centrally installed between the guides. Two limit switches protect against accidental over-travel. Due to high-quality cross-roller bearings a maximum of load capacity and smooth motion is guaranteed. Special, stress-relieved, tempered aluminum-alloy guarantees a homogeneous non-warping stage structure. The structural series 150 is driven by iron-less linear motors and provides high acceleration and high travel speed. System accuracy below 1µm/100mm travel and a bi-directional repeatability of less than 0.025 µm is guaranteed. The ultra precision stages are supplied with certificate of performance (flatness, straightness, pitch, yaw & position). The measurement is made with the stage mounted and unloaded on granite with a flatness <1µm.

Spezifikationen

UPS-150

Load Characteristics

Fx (N)

Fy (N)

Fy Peak (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

LM-015

75

22

88

150

50

100

50

25

20

Travel range (mm)

52

102

155

205

305

Straightness / Flatness (µm)

± 0.5

± 0.75

± 1

± 1.25

± 1.75

Pitch (µrad)

± 15

± 20

± 25

± 30

± 40

Yaw (µrad)

± 20

± 20

± 20

± 20

± 20

Weight (kg)

4.7

5.5

6.3

7.1

8.7

Motor

LM-015

Linear scale

LS-011

LS-020

Speed max. (mm/sec)

600

Resolution calculated (µm)

0.015

0.001

Resolution typical (µm)

0.02

0.015

Bi-directional Repeatability (µm)

± 0.035

± 0.025

Uni-directional Repeatability (µm)

0.025

0.015

Nominal Current (A)

1.4

Accuracy

on request

on request

on request

Velocity Range (mm/sec)

0.001 ... 100

0.001 ... 100

0.001 ... 100

Material

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI UPS-150 Drawing PI Linear Vectors Drawing

Bestellinformation

68409111UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 52 mm (2"), Linearencoder, Stahlmaßstab-011

68409112UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 52 mm (2"), Linearencoder, Glasmaßstab-020

68409121UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 102 mm (4"), Linearencoder, Stahlmaßstab-011

68409122UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 102 mm (4"), Linearencoder, Glasmaßstab-020

68409131UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 155 mm (6"), Linearencoder, Stahlmaßstab-011

68409132UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 155 mm (6"), Linearencoder, Glasmaßstab-020

68409141UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 205 mm (8"), Linearencoder, Stahlmaßstab-011

68409142UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 205 mm (8"), Linearencoder, Glasmaßstab-020

68409151UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 305 mm (12"), Linearencoder, Stahlmaßstab-011

68409152UPS-150 Ultrapräzisionsversteller, Eisenloser Linearmotor-015, 305 mm (12"), Linearencoder, Glasmaßstab-020

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Downloads

fileadmin/images/filelist/pdf.png PI Datenblatt UPS-150
Ultra Precision Stage
PDF 763 K
fileadmin/images/filelist/pdf.png PI miCos Motors & Encoders: Direct Motors
Technical Data of Direct Motors
PDF 78 K
fileadmin/images/filelist/pdf.png PI miCos Technical Data Linear and Rotary Encoders
Technical Data of Linear Encoders (LE) and Rotary Encoders (RE/AE)
PDF 83 K
fileadmin/images/filelist/zip.png UPS-150 STEP
ZIP 12.2 M