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Dieses Produkt wurde durch das folgende neue Produkt abgelöst: HPS-170 High Precision Stage

UPM-160 Ultra Precision Linear Stage

PI UPM-160
    • Travel range up to 205 mm (8")
    • Uni-directional repeatability down to 0.035 µm
    • Maximum speed 100 mm/sec
    • Load capacity up to 35 kg
    • Integrated limit switches
    • Integrated linear scale (center mounted)
    • Vacuum Datasheet

The Ultra Precision Linear Stage UPM-160 was specifically designed for wafer inspection, fiber alignment or for any other tasks where a maximum of positioning accuracy and reliability is absolutely mandatory.
All UPM-160 stages are equipped with an integrated linear scale that is center mounted between the guides. High-quality cross-roller bearings mounted on a stress-relieved, tempered aluminum-alloy body guarantee maximum load capacity and smooth motion. UPM-160 stages are offered with a 2-phase stepper motor or with a DC-motor and are equipped with two mechanical limit switches. All ultra precision linear stages are supplied with a certificate of performance (flatness, straightness & accuracy).

Spezifikationen

UPM-160

Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

DC-B-039

150

100

350

100

200

100

5

3

2Phase-051

150

100

350

100

200

100

5

3

Travel range (mm)

55

105

155

205

Straightness / Flatness (µm)

± 0.5

± 0.75

± 1

± 1.25

Pitch (µrad)

± 15

± 20

± 25

± 30

Yaw (µrad)

± 20

± 20

± 20

± 20

Weight (kg)

5

6

7

8

Motor (Pitch 2.5 mm)

DC-B-039

2Phase-051

Linear scale

LS-012

LS-020

Speed max. (mm/sec)

50

18

Resolution calculated (µm)

5 (FS)

0.05

0.001

Resolution typical (µm)

0.04

0.02

Bi-directional Repeatability (µm)

± 0.05

± 0.035

Uni-directional Repeatability (µm)

0.05

0.035

Nominal Current (A)

3.8

2.5

Voltage Range (V)

24

Accuracy

on request

on request

on request

on request

Velocity Range (mm/sec)

0.001 ... 100

0.001 ... 100

0.001 ... 100

0.001 ... 100

Material

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI UPM-160 Vacuum PI UPM-160 Drawing PI UPM-160 Motor Drawing PI Linear Stage Vectors Drawing

Bestellinformation

Versionen mit DC-Servomotor

627091111UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 52 mm (2"), Linearencoder, Stahlmaßstab-011, Spindelsteigung 2,5 mm

627091121UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 52 mm (2"), Linearencoder, Glasmaßstab-020, Spindelsteigung 2,5 mm

627091211UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 105 mm (4"), Linearencoder, Stahlmaßstab-011, Spindelsteigung 2,5 mm

627091221UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 105 mm (4"), Linearencoder, Glasmaßstab-020, Spindelsteigung 2,5 mm

627091311UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 155 mm (6"), Linearencoder, Stahlmaßstab-011, Spindelsteigung 2,5 mm

627091321UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 155 mm (6"), Linearencoder, Glasmaßstab-020, Spindelsteigung 2,5 mm

627091411UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 205 mm (8"), Linearencoder, Stahlmaßstab-011, Spindelsteigung 2,5 mm

627091421UPM-160 Ultrapräzisions-Linearversteller, DC-Motor-B-039, 205 mm (8"), Linearencoder, Glasmaßstab-020, Spindelsteigung 2,5 mm

 

Versionen mit 2-Phasen-Schrittmotor

627092111UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 52 mm (2"), Linearencoder, Stahlmaßstab-011, Spindelsteigung 2,5 mm

627092121UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 52 mm (2"), Linearencoder, Glasmaßstab-020, Spindelsteigung 2,5 mm

627092211UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 105 mm (4"), Linearencoder,
Stahlmaßstab-011, Spindelsteigung 2,5 mm

627092221UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 105 mm (4"), Linearencoder,
Glasmaßstab-020, Spindelsteigung 2,5 mm

627092311UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 155 mm (6"), Linearencoder,
Stahlmaßstab-011, Spindelsteigung 2,5 mm

627092321UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 155 mm (6"), Linearencoder,
Glasmaßstab-020, Spindelsteigung 2,5 mm

627092411UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 205 mm (8"), Linearencoder,
Stahlmaßstab-011, Spindelsteigung 2,5 mm

627092421UPM-160 Ultrapräzisions-Linearversteller, 2Phasen-Schrittmotor-051, 205 mm (8"), Linearencoder,
Glasmaßstab-020, Spindelsteigung 2,5 mm

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Downloads

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