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UPL-120 Ultra Precision Elevation Stage

PI UPL-120
    • Travel range 13 mm (1/2")
    • Uni-directional repeatability down to 0.05 μm
    • Maximum speed 6 mm/sec
    • Load capacity up to 15 kg
    • Integrated optical limit switches
    • Option: linear scale (center mounted)

The UPL-120 ultra-precision elevation stage replaces our older UPL-160 stage. It was specifically designed for wafer inspection, fiber alignment and any other task where maximum positioning accuracy and reliability are absolutely mandatory.
The UPL-120 stage can be equipped with an integrated linear scale. High-quality cross roller bearings mounted on a stress-relieved tempered aluminum alloy body guarantee a maximum load capacity and smooth motion. The UPL-120 stage is offered with a 2-phase SM motor or with a DC-motor and is equipped with two optical limit switches.

Spezifikationen

UPL-120

Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

DC-B-028

200

150

150

130

38

130

35

65

2Phase-025

200

150

200

130

38

150

35

65

Travel range (mm)

13

Straightness (µm)

± 3

Pitch (µrad)

± 100

Yaw (µrad)

± 100

Weight (kg)

2.1

Motor (Pitch 2 mm)

DC-B-028

2Phase-025

Linear scale

LS-025

Speed max. (mm/sec)

6

6

Resolution calculated (µm)

0.0134

1.34 (FS)

Resolution typical (µm)

0.5

0.5

0.1

Bi-directional Repeatability (µm)

± 1.5

± 1.5

± 0.05

Uni-directional Repeatability (µm)

0.5

0.5

0.05

Nominal Current (A)

0.98

2

Voltage Range (V)

24

Accuracy

on request

on request

on request

Velocity Range (mm/sec)

0.001 ... 6

0.001 ... 6

0.001 ... 6

Material

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI UPL-120 Vakuum PI UPL-120 Drawing PI UPL-120 Motor Drawing PI ES-100 Vectors Drawing

Bestellinformation

6635911030UPL-120 Ultrapräzisions-Hubtisch, DC-Motor-B-039, 13 mm (1/2"), ungeregelt, Optischer Endschalter-010

6635911130UPL-120 Ultrapräzisions-Hubtisch, DC-Motor-B-039, 13 mm (1/2"), Linearencoder, Stahlmaßstab-025, Optischer Endschalter-010

6635921030UPL-120 Ultrapräzisions-Hubtisch, 2Phasen-Schrittmotor-070, 13 mm (1/2"), ungeregelt, Optischer Endschalter-010

6635921130UPL-120 Ultrapräzisions-Hubtisch, 2Phasen-Schrittmotor-070, 13 mm (1/2"), Linearencoder, Stahlmaßstab-025, Optischer Endschalter-010

6635921130-0001UPL-120 Ultrapräzisions-Hubtisch, 2Phasen-Schrittmotor-070, 13 mm (1/2"), Linearencoder, Stahlmaßstab-025, Optischer Endschalter-010, 1Vpp

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Downloads

fileadmin/images/filelist/pdf.png PI Datenblatt UPL-120
Ultra Precision Elevation Stage
PDF 759 K
fileadmin/images/filelist/pdf.png PI Datasheet UPL-120 Vacuum
Ultra Precision Elevation Stage
PDF 257 K
fileadmin/images/filelist/pdf.png PI miCos Motors & Encoders: Stepper Motors
Technical Data of 2-Phase Stepper
PDF 58 K
fileadmin/images/filelist/pdf.png PI miCos Motors & Encoders: DC-Brush Motors
Technical Data of DC-Brush Motors
PDF 78 K
fileadmin/images/filelist/pdf.png PI miCos Technical Data Linear and Rotary Encoders
Technical Data of Linear Encoders (LE) and Rotary Encoders (RE/AE)
PDF 83 K
fileadmin/images/filelist/zip.png UPL-120 STEP
ZIP 7.2 M