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Dieses Produkt wurde durch das folgende neue Produkt abgelöst: UPL-120 Ultra Precision Elevation Stage

NPE-200 Nano Precision Elevation Stage

PI NPE-200
    • Travel range 13 mm (1/2")
    • Uni-directional repeatability down to 0.04 µm
    • Maximum speed 0.2 mm/sec
    • Load capacity up to 30 kg
    • Integrated limit switches
    • Integrated linear scale (center mounted)

The nano-precision elevation stage NPE-200 offers the highest precision in our elevation stage series. Maximum positioning accuracy and high stiffness makes this stage especially suitable for lithography, fiber alignment and wafer inspection. High-quality, double cross-roller bearings mounted on a stress-relieved, tempered aluminum-alloy body guarantee a non-warping stage structure, high stiffness and smooth motion. Position stability of less than 5 nm stable over a period of 1 minute can be achieved. The NPE-200 is equipped with a 2-phase stepper motor using a backlash-free gear-head (ratio=50:1), two mechanical limit switches and a linear scale which is center mounted for highest accuracy. All nano-precision elevation stages are supplied with a certificate of performance (flatness, pitch, yaw, straightness & accuracy).

Spezifikationen

NPE-200

Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

2Phase-034

100

80

300

100

50

100

3

1

Travel range (mm)

13

Straightness (µm)

± 0.7

Pitch (µrad)

± 20

Yaw (µrad)

± 20

Weight (kg)

9.2

Motor (Pitch 2 mm)

2Phase-034

Linear scale

LS-040

Speed max. (mm/sec)

0.2

Resolution calculated (µm)

0. 2 (FS)

0. 001

Resolution typical (µm)

0.005

Bi-directional Repeatability (µm)

± 0.04

Uni-directional Repeatability (µm)

0.04

Nominal Current (A)

1.2

Accuracy

on request

on request

Velocity Range (mm/sec)

0.00001 ... 0.2

0.00001 ... 0.2

Material

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI NPE-200 Drawing PI NPE-200 Motor Drawing PI NPE-200 Vectors Drawing

Bestellinformation

62839200NPE-200 Nanopräzisions-Hubtisch, 2Phasen-Schrittmotor mit spiellosem Getriebe-034, 13 mm (1/2"), Linearencoder, Zerodurmaßstab-040

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Downloads

fileadmin/images/filelist/pdf.png PI miCos Motors & Encoders: Stepper Motors
Technical Data of 2-Phase Stepper
PDF 58 K
fileadmin/images/filelist/pdf.png PI miCos Technical Data Linear and Rotary Encoders
Technical Data of Linear Encoders (LE) and Rotary Encoders (RE/AE)
PDF 83 K