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MTS-65 Micro Stage

PI MTS-65
    • Travel range up to 52 mm (2")
    • Uni-directional repeatability down to 0.1 µm
    • Maximum speed 8 mm/sec
    • Load capacity up to 2 kg
    • Integrated limit switches
    • Optionally: linear scale
    • Vacuum Datasheet

The micro stage MTS-65 was developed for industrial application with limited space conditions and is typically used for the positioning of laser diodes and optical parts. Driven by a 2-phase stepper motor using learn more high-resolution micro-stepping, the gear-less stages utilize re-circulating ball bearings and a ground re-circulating ball screw. As a result, maximum of stiffness, accuracy and smoothness of motion is guaranteed. The micro stage is equipped with two optical or hall limit switches. For higher positioning accuracy and repeatability 0.1 µm, the micro stages MTS-65 are offered with a linear scale. Using a special mounting kit, MTS-65 stages can be assembled to XY or XYZ- modules.

Spezifikationen

MTS-65

Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

2Phase-020

10

3

20

0.4

0.6

0.4

80

30

Travel range (mm)

13

26

52

Straightness / Flatness (µm)

± 1

± 2

± 3

Pitch (µrad)

± 40

± 60

± 80

Yaw (µrad)

± 40

± 40

± 40

Weight (kg)

0.4

0.6

0.8

Motor (Pitch 1 mm)

2Phase-020

Linear scale

LS-050

Speed max. (mm/sec)

8

Resolution calculated (µm)

5 (FS)

0.05

Resolution typical (µm)

0.1

0.05

Bi-directional Repeatability (µm)

± 5

± 0.2

Uni-directional Repeatability (µm)

0.2

0.1

Nominal Current (A)

1.2

0.1

Voltage Range (V)

< 100

Accuracy

on request

on request

Velocity Range (mm/sec)

0.001 ... 8

0.001 ... 8

Material

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI MTS-65 Vakuum PI MTS-65 Drawing PI Linear Stage Vectors Drawing

Bestellinformation

621792103MTS-65 Mikrostelltisch, 2Phasen-Schrittmotor-020, 13 mm (1/2"), Optische Endschalter-010

621792113MTS-65 Mikrostelltisch, 2Phasen-Schrittmotor-020, 13 mm (1/2"), Linearencoder, Stahlmaßstab-050, Optische Endschalter-010

621792203MTS-65 Mikrostelltisch, 2Phasen-Schrittmotor-020, 26 mm (1"), Optischer Endschalter-010

621792213MTS-65 Mikrostelltisch, 2Phasen-Schrittmotor-020, 26 mm (1"), Linearencoder, Stahlmaßstab-050, Optischer Endschalter-010

621792303MTS-65 Mikrostelltisch, 2Phasen-Schrittmotor-020, 52 mm (2"), Optischer Endschalter-010

621792313MTS-65 Mikrostelltisch, 2Phasen-Schrittmotor-020, 52 mm (2"), Linearencoder, Stahlmaßstab-050, Optischer Endschalter-010

 

 

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Downloads

fileadmin/images/filelist/pdf.png PI Datenblatt MTS-65
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fileadmin/images/filelist/zip.png MTS-65 STEP
ZIP 5.1 M