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MCS Metrology Cross Stage

PI MCS
    • Travel range 102 mm x 102mm (4”)
    • Uni-directional repeatability down to 0.1µm
    • Maximum speed 200 mm/sec
    • Load capacity up to 20 kg
    • Integrated optical limit switches
    • Option: Linear scale

The MCS XY Stage was developed for inspection and microscopy applications.
The MCS XY stage is equipped with re-circulating ball guides on a rigid aluminium-alloy body and two optical limit switches on each axis. Optionally MCS stages can be motorized with DC, 2-phase stepper or linear motor. For higher positioning accuracy and repeatability the MCS stage can be optionally equipped with linear scales.

Spezifikationen

MCS

Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

DC-B-040

200

200

200

130

130

90

80

60

2Phase-048

80

80

200

130

130

90

80

60

LM-010

87

87

200

130

130

90

80

60

Travel range (mm)

102 x 102

Straightness / Flatness (µm)

± 2

Pitch (µrad)

± 40

Yaw (µrad)

± 20

Orhogonality (µrad)

on request

Weight (kg)

22

Motor (Pitch 2 mm)

DC-B-040

2Phase-048

LM-010

Linear scale

LS-073

Speed max. (mm/sec)

90

35

240

240

Resolution calculated (µm)

0.1 (RE)

10 (FS)

Resolution typical (µm)

0.2

0.1

0.01

Bi-directional Repeatability (µm)

± 1

± 1

Uni-directional Repeatability (µm)

0.2

0.2

Nominal Current (A)

1.2

3.8

4.4

Voltage Range (V)

24

Accuracy

on request

on request

on request

on request

Velocity Range (mm/sec)

0.001 ... 200

0.001 ... 200

0.001 ... 200

0.001 ... 200

Material

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI MCS Drawing PI CS-430 Drawing

Bestellinformation

6304912030MCS Metrologie Kreuztisch, DC-Motor-B-040, Stellweg: 102 mm (4") x 102 mm (4"), Optischer Endschalter-010

6304912230MCS Metrologie Kreuztisch, DC-Motor-B-040, Stellweg: 102 mm (4") x 102 mm (4"), Linearencoder,
Stahlmaßstab-073, Optischer Endschalter-010

6304922030MCS Metrologie Kreuztisch, 2Phasen-Schrittmotor-048, Stellweg: 102 mm (4") x 102 mm (4"), Optischer Endschalter-010

6304922230MCS Metrologie Kreuztisch, 2Phasen-Schrittmotor-048, Stellweg: 102 mm (4") x 102 mm (4"), Linearencoder, Stahlmaßstab-073, Optischer
Endschalter-010

6304942030MCS Metrologie Kreuztisch, Linearmotor-010, Stellweg: 102 mm (4") x 102 mm (4"),
Optischer Endschalter-010

6304942230MCS Metrologie Kreuztisch, Linearmotor-010, Stellweg: 102 mm (4") x 102 mm (4"), Linearencoder,
Stahlmaßstab-073, Optischer Endschalter-010

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