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LPS-65 Linear Piezo Stage

PI LPS-65
    • Piezo driven stepping motor with subnanometer resolution
    • Travel range up to 52 mm (2")
    • Uni-directional repeatability down to 0.005 μm
    • Maximum speed 10 mm/sec
    • Load capacity up to 2 kg
    • Encoder resolution 0.5 nm
    • Integrated linear scale

The LPS-65 is a low profile linear stage utilizing synchronized piezo stepping motor for increased precision and load capacity. The big platform and the cross roller bearing are guaranteeing a smooth and high accurate movement in the range of sub nanometer. LPS-65 stages can be controlled with our E-861 piezo controller and an optional linear encoder provides nanometer repeatability. Vacuum compatible versions are available.

Spezifikationen

LPS-65

Load Characteristics

Fx (N)

Fy (N)

Fz (N)

Mx (Nm)

My (Nm)

Mz (Nm)

kax (µrad/Nm)

kay (µrad/Nm)

PM-012

50

10

20

2.1

1.7

2.1

100

80

Travel range (mm)

13

26

52

Straightness / Flatness (µm)

±1

±2

±3

Pitch (µrad)

±30

±40

±80

Yaw (µrad)

±30

±30

±30

Weight (kg)

0.3

0.4

0.6

Motor

PM-012

Linear scale

LS-072

Speed max. (mm/sec)

10

Resolution calculated (µm)

0.0005

Resolution typical (µm)

0.002

Bi-directional Repeatability (µm)

±0.005

Uni-directional Repeatability (µm)

0.005

Nominal Current (A)

Accuracy

on request

on request

Material

Aluminium, black anodized

Aluminium, black anodized

Zeichnungen / Bilder

PI LPS-65 Drawing PI Linear Vectors Drawing

Bestellinformation

586092120LPS-65 Piezo-Linearversteller, Piezoschreitantrieb-012, 13 mm (1/2"), Linearencoder, Glasmaßstab-072

586092220LPS-65 Piezo-Linearversteller, Piezoschreitantrieb-012, 26 mm (1"), Linearencoder, Glasmaßstab-072

586092320LPS-65 Piezo-Linearversteller, Piezoschreitantrieb-012, 52 mm (2"), Linearencoder, Glasmaßstab-072

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Downloads

fileadmin/images/filelist/pdf.png PI Datenblatt LPS-65
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PDF 735 K
fileadmin/images/filelist/pdf.png PI miCos Motors & Encoders: Piezo Motor
Technical data of Piezo Motor
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fileadmin/images/filelist/pdf.png PI miCos Technical Data Linear and Rotary Encoders
Technical Data of Linear Encoders (LE) and Rotary Encoders (RE/AE)
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fileadmin/images/filelist/pdf.png PI Datasheet LPS-65 Vacuum
Linear Piezo Stage
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