Piezo Motor Actuators & Stages (Ultrasonic Motors and Piezo Step Motors)
Piezo Flexure Stages     Piezo Stack Linear Actuators
Piezo linear motors can be divided into two groups: resonant motors (ultrasonic motors), and non-resonant motors. Both can, in principle, attain unlimited travel, yet they are very different in their design, specifications and performance. Resonant motors are characterized by a simpler design and higher speeds, piezo step motors can achieve much higher resolution, forces and — over small distances — dynamic performance. A great advantage of piezo motors is their intrinsic steady-state auto-locking capability. It does away with servo dither and the accompanying heat generation, an undesirable feature of electromagnetic motors. Step and continuous piezo motors are in principle nonmagnetic and vacuum-compatible, a requirement for many applications in the semiconductor industry.

Advantages of PI Piezoelectric Motors Self Locking in Power-Off Mode Not Affected by Magnetic Fields Vacuum Compatible Versions Custom Motors and Stages Available

More Information on...  Patented PILine® ultrasonic piezomotors  Patented NEXACT® & NEXLINE® Piezo-Walk® motors  SEMI TIS Award Winning Technology  Piezo Stack Linear Actuators  Piezo Motor AF-Module for Auto focus & Optical zoom in Cell-phone Camera

NEXLINE® High-Force Actuators		NEXACT® Compact Linear Motors		PILine® Ultrasonic Linear Motor Actuators		PILine® Ultrasonic Micro Motors	XY Open-Frame® Piezomotor Stage

Selection Guide Ultrasonic Piezo Motors / Piezo Linear Motor Driven Stages Linear Stages with Ultrasonic Piezo Motor Drives  P-652: 3 mm Micro Piezo Motor Stage (open loop) for OEMs  M-663: 20 mm Closed-Loop Miniature Linear Stage      Closed Loop, 20 mm travel, 0.1 µm Linear Encoder, 400 mm/sec  M-664: 25 mm Compact Linear Stage with Fast Piezo Motor Drive      Closed Loop, 25 mm travel, 0.1 µm Linear Encoder  M-682: 50 mm Compact Linear Stage with Fast Piezo Motor Drive      Closed Loop, 50 mm travel, 0.1 µm Linear Encoder  M-686 Low-Profile XY Open-Frame Piezomotor Linear Stage      Closed Loop, 25 x 25 mm travel, 0.1 µm Linear Encoder  M-665: 50 mm Closed-Loop, Low Profile Linear Stage      Closed Loop, 50 mm travel, 0.1 µm Linear Encoder  M-661/M-662 Ultra-Compact Linear Stages      Open Loop, 18 / 20 mm travel, 500 mm/sec  Download PDF Catalog: PILine® Drives for Automation:      Ultrasonic Piezomotors for High-Speed Actuation and Positioning  Technote: New Linear Ultrasonic Micromotor for Precision      Mechatronic Systems  More Piezoelectric Motor Papers  Miniature Linear Stage Brochure   Watch M-661 demo video      In this demo, recorded at the 2004 BIOS Show San Jose, an M-661 is reversing directions between two hard stops as fast as possible. The stage exceeds the video frame rate, so listen to the sound for an indication of the real speed. Ultrasonic Motors / Actuators for OEM Applications P-652 Sub-mini Ultrasonic Piezomotor Drive for OEMs  Piezo Motor AF-Module / Auto Focus / Zoom in Cell-phone Camera P-661 Ultrasonic Piezo Motors for OEMs M-674 RodDrive, Ultrasonic Piezomotor Linear Actuator for OEMs Controllers for Ultrasonic Piezo Motors / Stages C-170 RedStone Open-Loop Controller C-866 Closed-Loop, High-Performance Controller for      Ultrasonic Linear Piezo Motors Download all PILine® Datasheets:     Piezo Motors, Stages, Controllers (PDF) Selection Guide: PiezoWalk® Step Motors NEXLINE® & NEXACT® High Load, Long Travel, Piezo Motor Drives, Sub-nm Resolution N-310: 20 mm Compact NEXACT® OEM Piezo Stepping Drives N-111: 5 mm High-Load OEM-Drives      <0.1 nm Resolution, >80 N Holding Force N-214: 20 mm High-Load Drive <0.1 nm Resolution,     >600 N Holding Force, Incremental Encoder E-755: Digital Controller for NEXLINE®      Piezoelectric Linear Nanopositioning Drives, Download PDF Catalog: PiezoWalk® Drives: Nanopositioning and      Picopositioning Actuators with Millimeter-Travel Working Principle NEXLINE® Piezo-Walk® Rotational Piezo Motors Unidirectional Rotational Piezo Motor (HTML) Unidirectional Rotational Piezo Motor (PDF) Other Piezo Information Piezo Stacks Download PDF Catalog on Precision Piezo Step Motors      and Fast Ultrasonic Piezo Motors Piezoelectric Motors & Nano Drives PI Catalog: Piezoelectric Motors & Nano Drives Piezo Nanopositioning Systems Catalog Piezo Ultrasonic Motors on Wikipedia PI Katalog: Piezoelektrische Motoren Piezo Linear Actuators (Pushers) and Ceramics (Selection Guide) Piezo Ceramics for Custom and OEM Applications (General Information) PI Piezo Actuator Experience Piezo NanoPositioning Systems, Scanning Stages

Ultrasonic Piezo Motor Driven Stage, Animation Watch Mini Motor Video Below  Watch RodDrive Animation below. RodDrive integrated in positioning stage, animation.  Watch PI NEXLINE Animation   (Combined Dithering/Step Mode)