Selection Guides: Hexapods, Translation Stages, Rotation Stages, Actuators
| *Models |
Description |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
PDF File |
Hexapods (6DOF Parallel-Kinematics) |
| F-206.S |
HexAlign™: High-Resolution, Six-Axis MicroMotion Robot & Alignment System |
2 |
+/-6 mm, +/- 5 deg. |
DC Servo |
 |
| M-840 |
HexaLight™: Higher load capacity than F-206, faster.
NEW: Available with optical metrology for automated alignment |
10 |
up to 100 mm up to 60 deg |
DC Servo |
|
| M-850 |
High Load, High Precision Hexapod / Six-axis MicroMotion Robot |
200 |
up to 60 mm up to 15 deg |
DC Servo |
|
| P-587 |
Piezo Hexapod. Sophisticated 6-axis, closed-loop, piezo nanopositoning & scanning stage |
|
XYZ, θxθyθz 800 µm / 10 mrad |
piezo/capacitive feedback |
|
Micro Translation /Rotation Stage Series (DC Servo / Stepper Driven) |
M-110.1
M-111.1
M-112.1 |
Micro Translation Stages with Lead Screw Drive: For lab and research use |
3 |
5, 15, 25 |
DC servo / stepper |
|
M-110.2
M-111.2
M-112.2 |
Micro Translation Stages with Ball Screw Drive: For industiral use (extended lifetime) |
3 |
5, 15, 25 |
DC servo / stepper |
|
| M-116 |
Micro Rotation Stage for M-110, M-111, M-112 Translation Stage Series. Very small, clear aperture, high resolution. |
1.5 |
Continuous |
DC servo / stepper |
|
Ultrasonic Piezo Linear Motor Driven Stages |
M-661
M-662
M-663 |
M-661 & M-662 (open loop) and M-663 (closed loop) are the smallest piezo-linear-motor driven stages available. They feature high velocity (800 mm/sec) and 0.1 µm resolution |
0.5 |
20 |
Piezo Linear Motor |
|
| M-665 |
This closed-loop, piezo-linear-motor driven translation stage features a low profile, 0.1 µm resolution and velocity up to 250 mm/sec. XY mountable |
5 |
50 |
Piezo Linear Motor |
|
Ultrasonic Piezo Motors |
P-661
P-665 |
OEM piezo linear motors. Ultra-small and powerful |
n/a |
n/a |
Piezo Linear Motor |
|
Linear Actuators and Micrometers |
| *Models |
Description |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
PDF File |
| M-227 |
DC Mike. High resolution, non-rotating tip |
5 |
10, 25, 50 |
DC servo, piezo option |
|
| M-230 |
DC/Stepper Mike. Integrated limit switches, compact, high resolution, non-rotating tip |
5 |
10, 25 |
DC servo / 2-phase stepper |
|
| M-235 |
DC/Stepper Mike. Ball screw, high load, integrated limit switches, high resolution, non-rotating tip. High-speed version. |
5 |
20, 50 |
DC servo / 2-phase stepper |
|
| M-231 |
DC/Stepper Mike. Compact, high resolution, integrated limit switches |
5 |
17 |
DC servo / 2-phase stepper |
|
| M-232 |
Compact DC/Stepper Mike. Folded drive features ultra-short design. High resolution, integrated limit switches |
5 |
17 |
DC servo / 2-phase stepper |
|
| M-168 |
Stepper Mike. High resolution, non-rotating tip, excellent repeatability |
5 |
10, 25, 50 |
5-phase / 2-phase stepper, piezo option |
|
P-853
P-854 |
PiezoMikes. Sub-nanometer resolution |
1 |
6, 18 |
PiezoMike |
|
| M-631 - M-633 |
Precision mikrometers. Non-rotating tip, compact, excellent repeatability |
10 |
10, 25, 50 |
Manual micrometer |
|
M-619
M-626 |
Mikrometers. Low friction, compact |
2-5 |
6, 10, 15, 18, 25 |
Manual micrometer |
|
| M-653/655 |
Differential Mikrometers. 0.1 µm resolution, compact |
2 |
6, 20 |
Differential micrometer |
|
Translation Stages (DC Servo & Stepper Driven, Manual) |
| *Models |
Description |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
PDF File |
| M-310 |
Manual Micro Translation Stage. Ultra-compact, stainless steel |
4 |
6 |
Manual / PiezoMike |
|
M-105
M-106 |
Manual Translation Stages with Motor Upgrade. Crossed roller bearings, PiezoMike and DC-Mike upgrades |
10 |
6, 18 |
Manual / Piezo and Motor Upgrade |
|
| M-011 |
Side Drive Stages. Low-profile, very straight and smooth motion, 10 nm resolution, magnetic kinematic bearings |
1 |
15 |
Manual / DC servo / Piezo fine range |
|
| M-014 |
Side Drive Stages. Low-profile, very straight and smooth motion, 10 nm resolution, magnetic kinematic bearings |
5 |
25 |
Manual / DC servo / Piezo fine range |
|
| M-126 |
Compact Stages. Crossed roller bearings, very high resolution. Optional ActiveDrive |
20 |
25 |
DC servo / stepper / manual |
|
| M-400 |
Translation Stages. Crossed roller bearings, very high resolution. Optional ActiveDrive |
50 |
50, 100, 150 |
DC servo / stepper |
|
| M-605 |
Stages w/ linear encoder and ActiveDrive. High precision, compact. |
20 |
25, 50 |
DC servo |
|
| M-505 |
Ballscrew Stages. Compact, very reliable. Optional ActiveDrive |
100 |
25, 50, 100, 150 |
DC servo / stepper |
|
| M-5x1 |
Ballscrew Stages. High load, precise, durable, optional linear encoder |
100 |
102, 204, 306 |
DC servo / stepper, high accuracy |
|
| M-5x1.5i |
IntelliStages. Integrated controller, multi-stage network feature |
100 |
102, 204, 306 |
Integrated controller,
5-phase stepper |
|
Elevation Stages |
| M-501 |
Elevation Stages. Ballscrew driven, high resolution, fast |
10 |
12.5 |
DC servo |
|
| M-451 |
Elevation Stages. Wedge drive for high load. |
12 |
12.5 |
DC servo |
|
Rotation Stages |
| *Models |
Description |
*Load Capacity [kg] |
*Travel Ranges [mm] |
*Drive Options |
PDF File |
| M-116 |
Micro Rotation Stage for M-110, M-111, M-112 Translation Stage Series. Very small, clear aperture, high resolution. |
1.5 |
Continuous |
DC servo / stepper |
|
| M-035 |
Tangent arm stages. Manual drive, compact, clear aperture, high resolution, piezo option |
30 |
±9.5 |
Manual / piezo |
|
| M-035 |
Tangent arm stages. Motorized, compact, clear aperture, high resolution, piezo option |
30 |
±9.5 |
Manual / DC servo / Piezo |
|
| M-036 |
Tangent arm stages. Manual drive, compact, clear aperture, high resolution, piezo option |
40 |
±10.5 |
Manual / Piezo |
|
| M-036 |
Tangent arm stages. Motorized, compact, clear aperture, high resolution, piezo option |
40 |
±10.5 |
Manual / DC servo / Piezo |
|
| M-037 |
Continuous stages. Compact, clear aperture, high resolution |
30 |
Continuous |
Manual / DC servo / stepper |
|
| M-038 |
Continuous stages. Clear aperture, high resolution |
40 |
Continuous |
Manual / DC servo / stepper |
|
M-060
M-061
|
Continuous stages. Compact, clear aperture, high resolution, high speed from 60 to 120 mm diameter |
50 - 65 |
Continuous |
Manual / DC servo / stepper |
|
Tilt and Tip/Tilt Stages |
| M-041 |
Tilt stage. Compact, high resolution, piezo option |
4 |
±9 |
Manual / DC servo / Piezo fine range |
|
| M-042 |
Tip/Tilt stage. Compact, high resolution, piezo option |
4 |
±9 (θx, θy) |
Manual / DC servo / Piezo fine range |
|
| M-043 |
Tilt stage. High resolution, piezo option |
5 |
±7 |
Manual / DC servo / Piezo fine range |
|
| M-044 |
Tip/Tilt stage. High resolution, piezo option |
5 |
±7 (θx, θy) |
Manual / DC servo / Piezo fine range |
|
High-Speed Voice Coil Scanning Stages |
| V-102 |
Voice Coil Scanner. Fast scanning systems, X and XY, rack-mount controller |
0.1 |
5 |
Voice-coil linear motor |
|
| V-106 |
Voice Coil Scanner. Fast scanning systems, X and XY, PC-plug-in controller |
0.1 |
6 |
Voice-coil linear motor |
|
|
| *Custom designs for volume buyers |
