PZT Motion Controller Experience



PI PZT Control Electronics Solutions
  • Custom designs
  • Single- and multi-channel, standard & OEM PZT con-trollers for low- & high-voltage PZTs
  • Digital & analog servo-control circuits, compatible with capacitive, LVDT & strain gauge position feed-back sensors
  • Modular PZT controllers with high-speed parallel command interface, optionally opto-isolated for enhanced EMI Immunity
  • Ultra-fast fiber optic interfaces
  • Modular rackmount controllers with analog and digital interfaces
  • Unique multi-axis addressing capabilities for up to 32 axes
  • Multi-channel, 32-bit digital controllers with highly responsive FiberLink, RS-232 & IEEE-488 interfaces
  • Advanced feedforward techniques for throughput enhancement
  • Patented vibration-cancelling InputShapingTM algorithm for highest throughput
  • 100 V and 1000 V PZT power amplifiers
  • Ultra-high-output power amplifiers featuring energy recovery techniques and 2000 W peak power
Group of Digital Controllers featuring the ultra-fast optical FiberLink interface and PI‘s exclusive Mach™ vibration-cancelling feedforward algorithm. (licensed by Convolve, Inc., www.convolve.com).

Simulation tools help predict the performance of a new servo-control circuit even before the first prototype has been built.
Design phase of a new piezo controller.


Group of standard and custom multi-axis digital NanoAutomation® controllers with different interface options.
 
Custom 6-channel NanoAutomation® controller with ultra-fast digital parallel-port interface.



Custom DSP-based 7-channel capacitive-sensor controller with fiber-optic interface for communication with servo-controller.
Typical Applications of PI Piezo Controllers
NanoCapture software for Digital Piezo Controllers features Bode plotting function to obtain a precise analysis of the NanoMechanisms connected to the controller.

Digital NanoAutomation® controller with ultra-fast fiber-optical interface
          
  • Mass storage (optical disk) mastering
  • Beam switching, alignment, steering
  • Photonics alignment & packaging
  • Interferometry (Fabry-Perot filters)
  • Vibration cancellation
  • Image stabilization
  • Image resolution enhancement
  • Laser beam steering and tracking
  • Adaptive optics
  • Scanning microscopy
  • Auto-focus systems
  • Nano-metrology
  • Wafer and mask positioning/alignment
  • Microlithography
  • Critical-dimension measurement
  • Fast tool servos
  • Out-of-roundness finishing
  • Smart structures / structural deformation
 
Qualifying a new NanoAutomation® controller.

Three-axis NanoCube™ piezo NanoAutomation® stage and controller card with integrated optic metrology and automatic alignment functions. (for photonics alignment applications)



Ultra-high-output power amplifier featuring energy recovery techniques and 2000 W peak power.
Custom PCI-based digital PZT controller with high-speed fiber-optic interface and steering mirror unit.
Block diagram showing the principle of the energy recovery concept.

Custom controller with several compact NanoPositioning stages.