Capacitive Position Sensors / Controllers
Featuring Sub-Nanometer Resolution


Capacitive position sensors and modular control electronics

 

 

Working principle of two-plate capacitive position sensors
PI Capacitive Position Sensor Solutions
  • Highest resolution (0.01 nanometer) of all commercially available position sensors
  • Measurment ranges of up to 1 mm
  • Linearity to 0.003%
  • Digital Controllers featuring 4 th order polynomial linearzation
  • Extremely high long-term stability (better than
    0.1 nm / 3 hours)
  • Bandwith to 10 kHz
  • Invar versions for highest temperatur stability
    (5x10³/ K)
  • Stand-alone and modular electronics
  • Digital electronics for position servo-control with PI NanoMechanism ans PZT actuators
  • Custom designs available
 
Quality control and long-term stability test of capacitive displacement sensors at PI
Capacitive position sensors in an ultra-high-accuracy, 6-degree-of-freedom NanoPositioning system designed by PI for the German Institute of Standards (PTB). Application: scanning microscopy
Working principle of STM (scanning tunneling microscope) with integrated capacitive position sensors.
Why can PI Provide Superior Capacitive Sensor Solutions?
  • 30 years experience in designing ultra-high-precision mechanics
  • In-house capacitive-position-sensor design & manufacture
  • State-of-the-art metrology lab: thermal, acoustic, seismic isolation for repeatable sub-nanometer measurement
  • State-of-the-art equipment for simulation, manufacturing and testing
  • Highly motivated team of engineers and physicists


PI's state-of-the-art, six-fold isolated, room-in-room metrology lab is essential in developing and testing sensors with sub-nanometer resolution.

Custom multi-channel capacitive position sensor electronics