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Flatness of NanoPositioning stage with active trajectory control is better than of 1 nanometer over a 100 x 100 µm scanning range.
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PZT unit cell: 1) Perovskite-type lead zicronate titanate (PZT) unit cell in the symmetric cubic state above the Curie temperature. 2) tetragonally distorted unit cell below the Curie temperature
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Different Ways of Designing
Multi-Axis NanoPositioning Flexure Stages
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A) Stacking 2 single-axis stages.
Pro: Simple.
Con: Slower response (lower stage carries inertial mass of upper stage); orthogonality error is mounting-angle dependant; runout in Y cannot be monitored/ compensated by the sensor in the X stage or vice versa.
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B) Single module (monolithic) but nested (serial) X and Y.
Better response than A) but X and Y still work without "knowledge" of each other.
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C) Single-module parallel-kinematics X and Y (with crosstalk compensation).
Best solution.
Same low inertia for X and Y motion, providing higher responsiveness and axis-independent performance.
Best orthogonality. X sensor can monitor and correct for Y runout and vice versa. Additional rotation axis (θz) feasible with 3 actuators / sensors and digital controller.
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Patented InputShaping™ feedforward algorithm eliminates resonance-driven vibration of parts on and around the NanoPositioning systems.
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Piezoelectric NanoPositioning Systems:
small (e.g. data storage), medium (e.g. fiber optics),
large (e.g. precision machining).
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Ceramic spray dryer at PI Ceramic
ensures piezo ceramics quality.
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Variety of multilayer piezo stack and bender actuators.
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PI offers the largest selection of research and industrial-reliability Piezo Actuators, PiezoNanoPositioning Systems, Steering Mirrors and Control Electronics worldwide.
In addition to the hundreds of models presented in this catalog, we manufacture customer's requirements.
PI is highly vertically integrated, controlling each manufacturing step from PZT raw materials to finished systems thus ensuring the best quality.
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Variety of "cofired" and "classical" piezo stacks and rings.
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Sputtering (vacuum plating) process of
piezo ceramic discs at PI Ceramic.
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Equipment for multilayer piezo actuator production, at the PI Ceramic factory.
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Response of an open-loop piezo actuator to triangule-wave drive signal shows sub-nanometer resolution.
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Heavy-duty closed-loop piezoelectric
positioning systems for machining applications.
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Principle of a simple motionamplified NanoPositioning stage.
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Elongation and contraction of a piezo disk when a voltage is applied.
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Variety of digital motion controllers for piezoelectric NanoPositioning systems.
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Variety of piezoelectric flexure nanopositioners.
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