PI: Piezo Tutorial: Applications, Theory and Piezoelectric Positioning Products

Tutorial: Piezoelectrics in Positioning Contents

Basic Introduction to NanoPositioning with Piezoelectric Technology

Low-Voltage and High-Voltage PZTs

Open and Closed-Loop Operation

Dynamic Behavior

Mechanical Considerations

Power Requirements

Different Piezo Actuator Designs to Suit Various Applications

Design Points to Remember

Fundamentals of Piezoelectricity and Piezo Actuators

Material Properties

PZT Ceramics Manufacturing Process

Definition of Piezoelectric Coefficients and Directions

Amplifier Noise

Displacement of Piezo Actuators (Stack & Contraction Type)

Hysteresis (open-loop PZTs)

Creep (Drift) (open-loop PZTs)

High-Resolution Sensors

Strain Gauge Sensors

Linear Variable Differential Transformers (LVDT’s)

Capacitive Position Sensors

Mechanical Considerations

Maximum Applicable Forces (Compressive Load Limit, Tensile Load Limit)

Static Large-Signal Stiffness

Dynamic Small-Signal Stiffness

Force Generation

Displacement with External Forces

Mechanical Considerations for Dynamic Operation of PZTs

Dynamic Forces.

Resonant Frequency

How Fast Can a Piezo Actuator Expand?

Electrical Requirements for Piezo Operation

Static Operation

Dynamic Operation (Analog)

Dynamic Operating Current Coefficient (DOCC)

Dynamic Operation (Switched)

Heat Generation in a PZT in Dynamic Operation

Position Servo-Control (Closed-Loop Operation)

Methods to Improve Piezo Dynamics

Input Shaping™ Stops Structural Ringing Caused by High-Throughput Motions

SignalPreshaping

Temperature Effects

Linear Thermal Expansion

Temperature Dependency of the Piezo Effect

Environmental Considerations

PZT Operation in Normal Atmosphere

PZT Operation in Inert Gas Atmosphere

Vacuum Operation of PZTs

Lifetime of PZTs

Basic Designs of Piezoelectric Positioning Elements

Laminar Design (Contraction-Type Actuator)

Bender Type Actuators (Bimorph and Multimorph Design)

Piezo Actuators with Integrated Lever Motion Amplifier

PZT Flexure NanoPositioners

Electrostrictive Actuators

Mounting Guidlines

Units of Measure and Conversion Tables