Piezoelectrically Driven Tip/Tilt Platforms
(Steering Mirrors, Active Optics)





   
PI offers a large range of Ultra-Fast PZT Tip/Tilt Platforms specially designed for active and adaptive optics applications. Providing a tilt range of several milliradians, fast response (down to sub-millisecond range) and submicroradian resolution, the systems are ideal for dynamic operation (e.g. tracking, scanning, drift and vibration cancellation, dithering, etc.) as well as static positioning of optics and samples.
    


PI PZT Active Optics Solutions
  • Standard, OEM and custom designs
  • One-, two- or three-axis systems with sub-arc-second/sub-nanometer resolution and fast rise time (milliseconds or faster)
  • Closed-loop operation for highest accuracy, linearity and repeatability
  • Optional integrated capacitive position sensors for ultra-high resolution and repeatability
  • Wire-EDM-cut (electric discharge machining) flexures for zero stiction/friction
  • Optimized mechanical design, control algorithms and soft-ware for best response and throughput
  • Standard, custom and OEM control electronics (digital and analog controllers, rackmount and modular systems, compatible with advanced feedforward techniques) with software
  • Finite Element Analysis (FEA) computer-designed flexures for ultra-precise trajectory control
  • Invar, titanium, steel and aluminum versions for optimized thermal match
  • Stepped or continuous operation
  • Platforms driven by 1 to 4 integrated piezo actuators
  • Standard platforms accommodate optics to 100 mm in diameter
  • Custom designs for optics up to 300 mm diameter (astronomical telescopes)

Typical Applications of Active Optics
  • Mass storage (optical disk) mastering
  • Beam switching, alignment, steering
  • Interferometry (Fabry-Perot filters)
  • Dynamic error correction in refraction systems (e.g. polygon scanning mirrors)
  • Optical path length stabilization
  • Vibration cancellation (laser systems, imaging)
  • Image stabilization (astronomical telescopes, imaging)
  • Image resolution enhancement (dithering)
  • Laser beam stabilization (resonators, optical setups)
  • Laser beam scanning (lithography, optical setups)
  • Laser beam steering and tracking (telecommunication satellites, etc.)
  • Bore-sight systems (defense industry, law enforcement)
       
Basic design of an active optics platform featuring three actuators and four sensors
 
 
Why Can PI Provide
Superior Active Optics Solutions?

  • 30 years experience designing piezoelectric positioning systems
  • In-house PZT ceramics manufacture ensures consistency and reliable quality
  • Largest variety of controllers (digital, analog, high-speed, high-power, OEM....)
  • State-of-the-art metrology lab: thermal, acoustic, seismic isolation for repeatable sub-nanometer measurements
  • State-of-the-art equipment for simulation, manufacturing and testing
  • Highly motivated team of engineers and physicists
  • In-house capacitance-position-sensor design & manufacture
  • Patented vibration-killing feedforward techniques for highest throughput

FEA analysis of a mirror platform shows nanometer range deformation due to gravity