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Custom NanoPositioning Experience
Second to None! |
Over the last decades, PI has developed many different piezo- driven NanoPositioning stages for applications from precision machining to semiconductors, to fiber alignment. |
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The following examples illustrate the depth of our experience. Some of the systems depicted are standard catalog items, others were designed for a special customer application and are not available off the shelf, and some are subject to non-disclosure agreements and cannot be shown at all. |
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XYΘz Stage, 100 x 100 µm, ±1 mrad, Capacitive Feedback |
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XYZ Stage, 100 x 100 x 20 µm, Capacitive Feedback |
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XYΘz Stage, 200 x 200 µm, ± 2 mrad, Capacitive Feedback |
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X,Y: 100 µm Clear Aperture: 75 x 75 mm Closed-Loop, Capacitive Feedback Height: 20 mm Application: Optical Inspection |
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X,Y: 100 µm Clear Aperture: 50 x 50 mm Closed-Loop, Capacitive Feedback Height: 25 mm |
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X,Y: 100 µm Clear aperture: 50 x 50 mm Capacitive Feedback Special Z-Runout Compensation Application: Metrology |
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X,Y: 100 µm Clear Aperture: 50 x 50 mm Capacitive Feedback 1 nm Flatness Special Z-Runout Compensation Application: Metrology |
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X,Y: 800 µm, Z: 200 µm Capacitive Feedback 6-Axis Error Compensation 6-Axis Digital Controller Application: Metrology |
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X,Y: 100 µm, Super Invar, Capacitive Feedback Sensors, Active Trajectory Control Sub-nm, Sub-µrad Straightness and Flatness, 6-Axis Digital Controller Application: Metrology |
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X,XY,XYZ: Versions with 30, 50 and 100 µm Application: Photonics Alignment, Lifescience |
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XY: 7 x 7 µm and 15 x 15 µm Versions, Stainless Steel 40 x 40 x 40 mm SGS and LVDT Sensors Application: Optics Grinding |
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X,Y: 100 µm Active Trajectory Control Sub-nm, Sub-µrad Straightness and Flatness 8 Actuators, 7 Capacitive Sensors 6-Axis Digital Controller Applications: AFM, ATM, etc. |
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X,Y: 100 µm Clear Aperture: 40 mm Closed-Loop: LVDT & Capacitive Sensors Height: 30 mm |
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Z: 15 µm Clear Aperture: 200 x 200 mm LVDT Sensors |
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X,Y: 100 µm Clear Aperture: 100 x 100 mm Closed-Loop, LVDT Sensors |
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X,Y: 100 µm; Z: 15 µm Dimensions: 100 x 100 x 40 mm Capacitive Feedback Sensors |
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X,Y: 100 µm; Z: 15 µm Dimensions 100 x 100 x 65 mm; 25 mm Clear Aperture Capacitive Feedback |
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XY: 100 µm; Z: 5 µm Stainless Steel, Dim: 150 x 150 x 37 mm Differential Eddy Current Sensors |
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Microscope Turret NanoPositioner Z: 150 µm 90 x 100 x 108 mm Clear Aperture 50 mm Capacitive Feedback Sensor |
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Microscope Objective NanoPositioner, Z: 100 µm LVDT Sensor Application: Optical Scanning |
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Optics NanoPositioner, Z: 50 µm, Diam. 129 x 115 mm; Clear aperture 75 mm, 3 Capacitive Feedback Sensors Straightness< 25 nrad |
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Microscope Objective NanoPositioners Z: 90 and 100 µm Capacitive and LVDT Sensors |
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Microscope Objective NanoPositioner Z: 200 and 350 µm Dim: 60 x 60 x 50 mm LVDT Sensor |
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Z Tip/Tilt Stage. Z: 200 µm, Tip, Tilt: 2 mrad Clear Aperture: 100 mm Height 20 mm |
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Z: 12 µm, Clear Aperture 25 mm Capacitive Feedback Sensor |
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Z Stage. Z: 200 µm, Clear Aperture: 100 mm, Height 20 mm |
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X: 140 mm PZT Linear Motor Drive Glass Scale Encoder Up to 150 mm/sec |
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X: 12, 25, 38 µm Stainless Steel 16 x 30 x 44 (62, 80) mm Capacitive Feedback Very Fast Response |
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Z: 30 µm Clear Aperture: 200 x 200 mm Closed Loop, LVDT Sensors Application: Optical Inspection |
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X Stage, 15 µm, Capacitive Feedback, Light Weight, Application: Data Storage |
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X: 100 µm Dim: 80 x 80 x 20 mm Clear Aperture 20 x 20 mm Capacitive Feedback |
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X: 100 µm Dim: 80 x 80 x 15 mm Clear Aperture 20 x 20 mm LVDT Sensor |
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X, Y: 100 x 100 µm Dim: 80 x 80 x 30 mm Clear Aperture 20 x 20 mm LVDT Sensor |
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XYZ Tip/Tilt: 100 µm, ± 2 mrad 80 x 80 x 55 mm LVDT Sensor Clear Aperture 20 x 20 mm |
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XYZ, 100 µm Dim: 44 x 44 x 44 mm SGS Sensors |
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X: 30 µm Stainless Steel 40 x 79 x 13.5 mm Capacitive Feedback Sensor, Very Fast Response, Ultra-Straight Motion |
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XY: 150 µm Clear Aperture: 200 x 200 mm Height 28 mm Closed Loop, LVDT Sensors Application: Mask Alignment |
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X: 50 µm Dimensions 20 x 12 x 30 mm |
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X: 10 µm, Capacitive Feedback, Titanium |
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X: 10 µm, Capacitive Feedback, Titanium |
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X: 5 µm, Steel, Open-Loop, Ultra-Compact & Fast |
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X: 6 µm, Ultra-Compact SGS Sensor |
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XZ: 7 µm Dimensions: 25 x 30 x 15 mm |
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X: 7 µm Stainless Steel SGS Sensor Dimensions: 10 x 15 x 20 mm |
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X: 2 µm (500 V) Stainless Steel Dim: 70 x 160 x 20 mm Very Stiff, Very Straight Motion Application: X-Ray Interferometry |
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X: 80 µm Stainless Steel Dim: 40 x 50 x 12.5 mm LVDT Position Sensor |
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X: 5 µm Stainless Steel |
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X: 5 µm (1000 V) Stainless Steel Dim: 70 x 70 x 20 mm Very Stiff, Very Straight Motion Application: Phase Shift Interferometry |
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X: 25, 45, 65 µm Stainless Steel, UHV Compatible |
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X, XY, XYZ-Combinations: ±150 µm Application: Photonics Alignment |
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X: 6 mm Coarse, 30 µm Fine |
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X,Y: 100 µm, Θz: ± 50 µrad, Vacuum Compatible (10 -6 torr) Clear Aperture: 120 x 120 mm Application: X-Ray-Lithography LVDT Position Sensor |
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Z: 300 µm LVDT Sensor Application: Wafer Positioning |
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X: ± 200 µm Application: Micro-Manufacturing |
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Z: 1000 µm Application: Microscopy |
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Z: 700 µm Application: Wafer Positioning |
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X,Y: 100 x 100 µm, 1 mrad Clear Aperture: 140 x 160 mm LVDT Position Sensors Application: X-Ray-Lithography |
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X,Y: 15 µm Dim: 120 x 120 x 30 mm Very Stiff, Very Straight Motion Vacuum Compatible 10 -6 torr Application: Lithography |
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X,Y: 100 µm Stainless Steel, UHV Compatible (10 -9 torr) Capacitive Feedback |
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X,Y: 100 x 100 µm Vacuum Compatible (10 -6 torr) Clear Aperture: 50 x 50 mm Capacitive Feedback |
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X,Y: 100 µm; Coarse X,Y: 25 mm Vacuum Compatible (10 -6 torr) Clear Aperture: 25 x 25 mm Capacitive Feedback |
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X,Y: 50 µm Invar, Steel and Aluminum Versions 700 Hz Resonant Frequency, Tilt < 5 arc sec |
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X:75 µm Aluminum 115 x 115 x 25 mm Very Stiff, Very Straight Motion |
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X: 15 µm Aluminum and Invar Versions Dimensions: 70 x 70 x 20 mm Closed- & Open-Loop Versions Application: Phase Shift Interferometry |
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X:15 µm Stainless Steel 115 x 115 x 25 mm Very Stiff, Very Straight Motion Capacitive Feedback Sensor |
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X Stage: 100 µm Clear Aperture: 85 mm LVDT Position Sensors |
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X: 200 µm, Clear Aperture 40 x 40 mm, LVDT Sensor |
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X,Y: 15 x 15 µm (30 x 30 µm) Stainless Steel Application: ATM |
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X: 2 mm Voice Coil Drive LVDT Feedback Sensor Operating Frequency: 30 Hz |
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Translation Stage with PZT Linear Motor X: 50 mm Glass Scale Encoder Up to 50 mm/sec. |
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