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Introduction to Piezo Flexure NanoPositioners & Scanners |
| PI designs and manufactures the fastest and highest precision piezo nanopositioning and scanning systems in the world. PI Piezo Stages are superior
to traditional positioning stages with crossed roller bearings, etc.) in terms of response, speed, resolution, accuracy, straightness and flatness. |
PI Flexure NanoPositioners can easily achieve resolution and repeatability and flatness in the nanometer realm and below. See Technologies that set PI apart for further information. |
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Piezo NanoPositioning and Scanning Stages Selection Guide
| *Models |
Description |
Axes |
*Travel [µm] |
*Feedback |
PDF |
Objective Nano-Focus Devices |
| P-725 |
PIFOC®. Long range microscope objective piezo nanopositioner, compact & light weight, QuickLock |
Z |
100, 250, 400 |
capacitive |
 |
| P-721.CDQ |
PIFOC®. Microscope objective piezo nanopositioner.
Now with QuickLock |
Z |
100 |
capacitive |
|
| P-720 |
PIFOC®. Compact, open-loop microscope objective piezo nanopositioner |
Z |
100 |
no |
|
P-722
P-723 |
PIFOC®. Microscope objective piezo nanopositioner |
Z |
200, 350 |
LVDT |
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Open Loop Single Axis Stages |
| P-280 |
Piezo nanopositioning stage. Low cost, XY and XYZ combinations |
X |
30, 50, 100 |
no |
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| P-290 |
Vertical piezo nanopositioning stage. Large travel range |
Z |
1000 |
no |
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| P-287 |
Vertical/tilt piezo nanopositioning stage. Large travel range |
Z, θx |
700, 12 mrad |
no |
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Closed Loop, Single Axis Stages with Direct Metrology Feedback |
| Direct metrology measures the position of the moving platform rather than strain in the actuator (as is common with lower-precision piezo resistive strain gauge sensors). This results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nano-meter level. |
Download paper on state-of-the-art nanopositioning stages ()
An improvement of up to 3 orders of magnitude in dynamic linearity can be achieved with the Dynamic Digital Linearization () option in the E-710 controller. |
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| *Models |
Description |
Axes |
*Travel [µm] |
*Feedback |
PDF |
| P-783 |
Vertical piezo nanopositioning stage. Large travel range, closed-loop, compact |
Z |
300 |
LVDT |
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P-620.Z -
P-622.Z |
PIHera vertical piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. |
Z |
50, 100, 250 |
capacitive |
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| P-772 |
Ultra-compact piezo nanopositioning stage. Fast and accurate, smallest closed-loop stage with capacitive position feedback |
X |
10 |
capacitive |
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| P-780 |
Piezo nanopositioning stage. Compact, fast, for small loads |
X |
80 |
LVDT |
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| P-750 |
High-load piezo nanopositioning stage. Extremely straight motion, very stiff |
X |
75 |
capacitive, LVDT |
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| P-752 |
NanoAutomation® stage. Very fast and accurate, for FBG writing and disk drive test set ups |
X |
15, 30 |
capacitive |
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| P-753 |
NanoAutomation® actuator/stage. Very small and accurate, works as both stage and linear actuator |
Z & X |
12, 25, 38 |
capacitive |
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P-620.1 -
P-625.1 |
PIHera piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. |
X (XY, Z) |
100, 250, 500 |
capacitive |
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Multi Axis, Serial Kinematics Stages |
| *Models |
Description |
Axes |
*Travel [µm] |
*Feedback |
PDF |
P-281
P-282 |
Open-loop piezo nanopositioning stage family. Low cost, compact |
XY, XYZ |
30, 50, 100 |
no |
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| P-611 |
NanoCube XYZ piezo nanopositioning stage. Smallest XYZ closed-loop stage with 100 µm travel |
XYZ |
100 |
SGS |
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| P-762 |
Piezo nanopositioning stage family. Compact, 20 X 20 mm clear aperture. 1 through 5 axis versions |
X, XY, XYZ, Z,
Zθxθy, XYZθxθy |
100, ±2.6 mrad |
LVDT |
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P-620.2 -
P-625.2 |
PIHera XY piezo nanopositioning stage family. Very compact, long travel, low cost, very precise. Direct metrology |
XY (Z, XYZ) |
50,100,250, 500 |
capacitive |
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Multi-Axis, Parallel Metrology, Parallel Kinematics Stages |
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| *Models |
Description |
Axes |
*Travel [µm] |
*Feedback |
PDF |
| P-615 |
NanoCube™ 350C XYZ Piezo NanoAligner. Clear aperture, ideal for photonic alignment. |
XYZ |
to 350 |
capacitive |
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| P-363 |
PicoCube™: Closed-loop XYZ, XY piezo scanner for AFM, SPM. Nanomanipulation tool, extremely high resolution, compact, ideal for Nanotech and Biotech. |
XY, XYZ |
6 |
capacitive |
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| P-733 |
XY piezo Nano-scanning and positioning stage. NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture |
XY |
100x100 |
capacitive |
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P-733.2DD
P-733.3DD
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High-speed, direct-drive XY, XYZ nanoscanning stages. Clear aperture. Flat and extremely fast: 2.2 kHz Fres. UHV version available. |
XY, XYZ |
30x30 (x10) |
capacitive |
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| P-734 |
XY Nanoscanning stage. Special design for extremely straight & flat motion (low nm-range). Clear aperture |
XY |
100 |
capacitive |
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| P-770 |
Large aperture (200 X 200 mm) XY piezo nanopositioning stage. |
XY |
200 |
LVDT |
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P-517 -
P-527 |
"P-500"-series XY, XYZ, XYθz piezo nanopositioning & scanning stages Clear aperture, active trajectory control, special version with 6 degrees of freedom |
XY, XYZ, XYθz |
Up to 200 in XYZ, 2 mrad |
capacitive |
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| P-561.3DD Series |
PIMars XYZ, direct-drive, high-speed, piezo stages for scanning microscopy. Very fast, clear aperture, active trajectory control |
XY, XYZ |
45 XY, 11 Z |
capacitive |
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P-561
P-562
P-562 |
PIMars series XY
& XYZ, long range piezo scanning stages. Up to 300x300x300 µm. Clear aperture, active trajectory control |
XY, XYZ |
100x100x100,
200x200x200,
300x300x250 |
capacitive |
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P-558
P-518
P-528
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"P-500" series vertical & tip/tilt nanopositioning stages. Clear aperture, capacitive sensors |
Z, Zθxθy |
Up to 200 in Z, 2 mrad tip/tilt |
capacitive |
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Closed and Open Loop Vertical / Tilt Nanopositioning Stages |
P-620.Z -
P-622.Z |
PIHera vertical piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. |
Z |
50, 100, 250 |
capacitive |
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P-558
P-518
P-528
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"P-500" series vertical & tip/tilt nanopositioning stages. Clear aperture, capacitive sensors |
Z, Zθxθy |
Up to 200 in Z, 2 mrad tip/tilt |
capacitive |
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P-762.ZL
P-762.TL |
Piezo nanopositioning stages. P-762.ZL: elevation stage; P-762.TL: tilt/elevation stage with aperture |
Z,
Zθxθy
& 5-axis versions |
100, ±2.6 mrad |
LVDT |
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| P-783 |
Vertical piezo nanopositioning stage. Large travel range, closed-loop, compact |
Z |
300 |
LVDT |
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| P-290 |
Vertical piezo nanopositioning stage. Large travel range |
Z |
1000 |
no |
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| P-287 |
Vertical/tilt piezo nanopositioning stage. Large travel range |
Z, θx |
700, 12 mrad |
no |
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"Piezo Hexapod" 6DOF Parallel-Kinematic Stages |
| *Models |
Description |
Axes |
*Travel [µm] |
*Feedback |
PDF |
P-587
|
Piezo Hexapod 6DoF nanopositioning & scanning stage. Sophisticated closed-loop, 6-axis system |
XYZ, θxθyθz |
800 / 10 mrad |
capacitive |
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Ultrasonic Piezo Linear Motor Driven Stages click here |
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*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision. For piezo steering mirrors, tip/tilt positioners see the “Piezo Active Optics” section.
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