Introduction to Piezo Flexure NanoPositioners & Scanners
PI designs and manufactures the fastest and highest precision piezo nanopositioning and scanning systems in the world. PI Piezo Stages are superior to traditional positioning stages with crossed roller bearings, etc.) in terms of response, speed, resolution, accuracy, straightness and flatness. PI Flexure NanoPositioners can easily achieve resolution and repeatability and flatness in the nanometer realm and below. See Technologies that set PI apart for further information.
Piezo NanoPositioning and Scanning Stages Selection Guide
*Models Description Axes *Travel [µm] *Feedback PDF
Objective Nano-Focus Devices
P-725
PIFOC®. Long range microscope objective piezo nanopositioner, compact & light weight, QuickLock
Z 100, 250, 400 capacitive Download PDF
P-721.CDQ PIFOC®. Microscope objective piezo nanopositioner.
Now with QuickLock
Z 100 capacitive Download PDF
P-720 PIFOC®. Compact, open-loop microscope objective piezo nanopositioner Z 100 no Download PDF
P-722
P-723
PIFOC®. Microscope objective piezo nanopositioner Z 200, 350 LVDT Download PDF
Open Loop Single Axis Stages
P-280 Piezo nanopositioning stage. Low cost, XY and XYZ combinations X 30, 50, 100 no Download PDF
P-290 Vertical piezo nanopositioning stage. Large travel range Z 1000 no Download PDF
P-287 Vertical/tilt piezo nanopositioning stage. Large travel range Z, θx 700, 12 mrad no Download PDF
Closed Loop, Single Axis Stages with Direct Metrology Feedback
Direct metrology measures the position of the moving platform rather than strain in the actuator (as is common with lower-precision piezo resistive strain gauge sensors). This results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nano-meter level.

Download paper on state-of-the-art nanopositioning stages (Download PDF)
An improvement of up to 3 orders of magnitude in dynamic linearity can be achieved with the Dynamic Digital Linearization (Download PDF) option in the E-710 controller.

*Models Description Axes *Travel [µm] *Feedback PDF
P-783 Vertical piezo nanopositioning stage. Large travel range, closed-loop, compact Z 300 LVDT Download PDF
P-620.Z -
P-622.Z
PIHera vertical piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. Z 50, 100, 250 capacitive Download PDF
P-772 Ultra-compact piezo nanopositioning stage. Fast and accurate, smallest closed-loop stage with capacitive position feedback X 10 capacitive Download PDF
P-780 Piezo nanopositioning stage. Compact, fast, for small loads X 80 LVDT Download PDF
P-750 High-load piezo nanopositioning stage. Extremely straight motion, very stiff X 75 capacitive, LVDT Download PDF
P-752 NanoAutomation® stage. Very fast and accurate, for FBG writing and disk drive test set ups X 15, 30 capacitive Download PDF
P-753 NanoAutomation® actuator/stage. Very small and accurate, works as both stage and linear actuator Z & X 12, 25, 38 capacitive Download PDF
P-620.1 -
P-625.1
PIHera piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. X (XY, Z) 100, 250, 500 capacitive Download PDF
Multi Axis, Serial Kinematics Stages
*Models Description Axes *Travel [µm] *Feedback PDF
P-281
P-282
Open-loop piezo nanopositioning stage family. Low cost, compact XY, XYZ 30, 50, 100 no Download PDF
P-611 NanoCube XYZ piezo nanopositioning stage. Smallest XYZ closed-loop stage with 100 µm travel XYZ 100 SGS Download PDF
P-762 Piezo nanopositioning stage family. Compact, 20 X 20 mm clear aperture. 1 through 5 axis versions X, XY, XYZ, Z,
xθy, XYZθxθy
100, ±2.6 mrad LVDT Download PDF
P-620.2 -
P-625.2
PIHera XY piezo nanopositioning stage family. Very compact, long travel, low cost, very precise. Direct metrology XY (Z, XYZ) 50,100,250, 500 capacitive Download PDF
Multi-Axis, Parallel Metrology, Parallel Kinematics Stages
Why Download PDF Parallel Metrology /Parallel Kinematics?
Parallel metrology can "see" all controlled degrees of freedom simultaneously. These stages provide superior trajectory control to serial kinematics stages.

Download paper on state-of-the-art nanopositioning stages (Download PDF)
An improvement of up to 3 orders of magnitude in dynamic linearity can be achieved with the Dynamic Digital Linearization (Download PDF) option in the E-710 controller.

*Models Description Axes *Travel [µm] *Feedback PDF
P-615 NanoCube™ 350C XYZ Piezo NanoAligner. Clear aperture, ideal for photonic alignment. XYZ to 350 capacitive Download PDF
P-363 PicoCube™: Closed-loop XYZ, XY piezo scanner for AFM, SPM. Nanomanipulation tool, extremely high resolution, compact, ideal for Nanotech and Biotech. XY, XYZ 6 capacitive Download PDF
P-733 XY piezo Nano-scanning and positioning stage. NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture XY 100x100 capacitive Download PDF
P-733.2DD
P-733.3DD

High-speed, direct-drive XY, XYZ nanoscanning stages. Clear aperture. Flat and extremely fast: 2.2 kHz Fres. UHV version available. XY, XYZ 30x30 (x10) capacitive Download PDF
P-734 XY Nanoscanning stage. Special design for extremely straight & flat motion (low nm-range). Clear aperture XY 100 capacitive Download PDF
P-770 Large aperture (200 X 200 mm) XY piezo nanopositioning stage. XY 200 LVDT Download PDF
P-517 -
P-527
"P-500"-series XY, XYZ, XYθz piezo nanopositioning & scanning stages Clear aperture, active trajectory control, special version with 6 degrees of freedom XY, XYZ, XYθz Up to 200 in XYZ, 2 mrad capacitive Download PDF
P-561.3DD Series PIMars XYZ, direct-drive, high-speed, piezo stages for scanning microscopy. Very fast, clear aperture, active trajectory control XY, XYZ 45 XY, 11 Z capacitive Download PDF
P-561
P-562
P-562
PIMars series XY & XYZ, long range piezo scanning stages. Up to 300x300x300 µm. Clear aperture, active trajectory control XY, XYZ 100x100x100,
200x200x200,
300x300x250
capacitive Download PDF
P-558
P-518
P-528

"P-500" series vertical & tip/tilt nanopositioning stages. Clear aperture, capacitive sensors Z, Zθxθy Up to 200 in Z, 2 mrad tip/tilt capacitive Download PDF
Closed and Open Loop Vertical / Tilt Nanopositioning Stages
P-620.Z -
P-622.Z
PIHera vertical piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. Z 50, 100, 250 capacitive Download PDF
P-558
P-518
P-528

"P-500" series vertical & tip/tilt nanopositioning stages. Clear aperture, capacitive sensors Z, Zθxθy Up to 200 in Z, 2 mrad tip/tilt capacitive Download PDF
P-762.ZL
P-762.TL
Piezo nanopositioning stages. P-762.ZL: elevation stage; P-762.TL: tilt/elevation stage with aperture Z,
xθy
& 5-axis versions
100, ±2.6 mrad LVDT Download PDF
P-783 Vertical piezo nanopositioning stage. Large travel range, closed-loop, compact Z 300 LVDT Download PDF
P-290 Vertical piezo nanopositioning stage. Large travel range Z 1000 no Download PDF
P-287 Vertical/tilt piezo nanopositioning stage. Large travel range Z, θx 700, 12 mrad no Download PDF
"Piezo Hexapod" 6DOF Parallel-Kinematic Stages
*Models Description Axes *Travel [µm] *Feedback PDF
P-587
 
Piezo Hexapod 6DoF nanopositioning & scanning stage. Sophisticated closed-loop, 6-axis system XYZ, θxθyθz 800 / 10 mrad capacitive Download PDF
Ultrasonic Piezo Linear Motor Driven Stages click here
 
Custom Nanopositioning Stages: see PI's capabilities
*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision.

For piezo steering mirrors, tip/tilt positioners see the “Piezo Active Optics” section.