

Introduction to Piezo Flexure NanoPositioners & Scanners 
PI designs and manufactures the fastest and highest precision piezo nanopositioning and scanning systems in the world. PI Piezo Stages are superior
to traditional positioning stages with crossed roller bearings, etc.) in terms of response, speed, resolution, accuracy, straightness and flatness. 
PI Flexure NanoPositioners can easily achieve resolution and repeatability and flatness in the nanometer realm and below. See Technologies that set PI apart for further information. 




Piezo NanoPositioning and Scanning Stages Selection Guide
*Models 
Description 
Axes 
*Travel [µm] 
*Feedback 
PDF 
Objective NanoFocus Devices 
P725 
PIFOC®. Long range microscope objective piezo nanopositioner, compact & light weight, QuickLock 
Z 
100, 250, 400 
capacitive 

P721.CDQ 
PIFOC®. Microscope objective piezo nanopositioner. Now with QuickLock 
Z 
100 
capacitive 

P720 
PIFOC®. Compact, openloop microscope objective piezo nanopositioner 
Z 
100 
no 

P722 P723 
PIFOC®. Microscope objective piezo nanopositioner 
Z 
200, 350 
LVDT 

Open Loop Single Axis Stages 
P280 
Piezo nanopositioning stage. Low cost, XY and XYZ combinations 
X 
30, 50, 100 
no 

P290 
Vertical piezo nanopositioning stage. Large travel range 
Z 
1000 
no 

P287 
Vertical/tilt piezo nanopositioning stage. Large travel range 
Z, θ_{x} 
700, 12 mrad 
no 

Closed Loop, Single Axis Stages with Direct Metrology Feedback 
Direct metrology measures the position of the moving platform rather than strain in the actuator (as is common with lowerprecision piezo resistive strain gauge sensors). This results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the subnanometer level. 
Download paper on stateoftheart nanopositioning stages () An improvement of up to 3 orders of magnitude in dynamic linearity can be achieved with the Dynamic Digital Linearization () option in the E710 controller. 

*Models 
Description 
Axes 
*Travel [µm] 
*Feedback 
PDF 
P783 
Vertical piezo nanopositioning stage. Large travel range, closedloop, compact 
Z 
300 
LVDT 

P620.Z  P622.Z 
PIHera vertical piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. 
Z 
50, 100, 250 
capacitive 

P772 
Ultracompact piezo nanopositioning stage. Fast and accurate, smallest closedloop stage with capacitive position feedback 
X 
10 
capacitive 

P780 
Piezo nanopositioning stage. Compact, fast, for small loads 
X 
80 
LVDT 

P750 
Highload piezo nanopositioning stage. Extremely straight motion, very stiff 
X 
75 
capacitive, LVDT 

P752 
NanoAutomation® stage. Very fast and accurate, for FBG writing and disk drive test set ups 
X 
15, 30 
capacitive 

P753 
NanoAutomation® actuator/stage. Very small and accurate, works as both stage and linear actuator 
Z & X 
12, 25, 38 
capacitive 

P620.1  P625.1 
PIHera piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. 
X (XY, Z) 
100, 250, 500 
capacitive 

Multi Axis, Serial Kinematics Stages 
*Models 
Description 
Axes 
*Travel [µm] 
*Feedback 
PDF 
P281 P282 
Openloop piezo nanopositioning stage family. Low cost, compact 
XY, XYZ 
30, 50, 100 
no 

P611 
NanoCube XYZ piezo nanopositioning stage. Smallest XYZ closedloop stage with 100 µm travel 
XYZ 
100 
SGS 

P762 
Piezo nanopositioning stage family. Compact, 20 X 20 mm clear aperture. 1 through 5 axis versions 
X, XY, XYZ, Z, Zθ_{x}θ_{y}, XYZθ_{x}θ_{y} 
100, ±2.6 mrad 
LVDT 

P620.2  P625.2 
PIHera XY piezo nanopositioning stage family. Very compact, long travel, low cost, very precise. Direct metrology 
XY (Z, XYZ) 
50,100,250, 500 
capacitive 

MultiAxis, Parallel Metrology, Parallel Kinematics Stages 

*Models 
Description 
Axes 
*Travel [µm] 
*Feedback 
PDF 
P615 
NanoCube™ 350C XYZ Piezo NanoAligner. Clear aperture, ideal for photonic alignment. 
XYZ 
to 350 
capacitive 

P363 
PicoCube™: Closedloop XYZ, XY piezo scanner for AFM, SPM. Nanomanipulation tool, extremely high resolution, compact, ideal for Nanotech and Biotech. 
XY, XYZ 
6 
capacitive 

P733 
XY piezo Nanoscanning and positioning stage. NEW: Standard Vacuum Version. Fast and accurate XY positioner, clear aperture 
XY 
100x100 
capacitive 

P733.2DD P733.3DD 
Highspeed, directdrive XY, XYZ nanoscanning stages. Clear aperture. Flat and extremely fast: 2.2 kHz Fres. UHV version available. 
XY, XYZ 
30x30 (x10) 
capacitive 

P734 
XY Nanoscanning stage. Special design for extremely straight & flat motion (low nmrange). Clear aperture 
XY 
100 
capacitive 

P770 
Large aperture (200 X 200 mm) XY piezo nanopositioning stage. 
XY 
200 
LVDT 

P517  P527 
"P500"series XY, XYZ, XYθ_{z} piezo nanopositioning & scanning stages Clear aperture, active trajectory control, special version with 6 degrees of freedom 
XY, XYZ, XYθ_{z} 
Up to 200 in XYZ, 2 mrad 
capacitive 

P561.3DD Series 
PIMars XYZ, directdrive, highspeed, piezo stages for scanning microscopy. Very fast, clear aperture, active trajectory control 
XY, XYZ 
45 XY, 11 Z 
capacitive 

P561 P562 P562 
PIMars series XY
& XYZ, long range piezo scanning stages. Up to 300x300x300 µm. Clear aperture, active trajectory control 
XY, XYZ 
100x100x100, 200x200x200, 300x300x250 
capacitive 

P558 P518 P528 
"P500" series vertical & tip/tilt nanopositioning stages. Clear aperture, capacitive sensors 
Z, Zθ_{x}θ_{y} 
Up to 200 in Z, 2 mrad tip/tilt 
capacitive 

Closed and Open Loop Vertical / Tilt Nanopositioning Stages 
P620.Z  P622.Z 
PIHera vertical piezo nanopositioning stage family. Low cost, compact, accurate, very ling travel. 
Z 
50, 100, 250 
capacitive 

P558 P518 P528 
"P500" series vertical & tip/tilt nanopositioning stages. Clear aperture, capacitive sensors 
Z, Zθ_{x}θ_{y} 
Up to 200 in Z, 2 mrad tip/tilt 
capacitive 

P762.ZL P762.TL 
Piezo nanopositioning stages. P762.ZL: elevation stage; P762.TL: tilt/elevation stage with aperture 
Z, Zθ_{x}θ_{y} & 5axis versions 
100, ±2.6 mrad 
LVDT 

P783 
Vertical piezo nanopositioning stage. Large travel range, closedloop, compact 
Z 
300 
LVDT 

P290 
Vertical piezo nanopositioning stage. Large travel range 
Z 
1000 
no 

P287 
Vertical/tilt piezo nanopositioning stage. Large travel range 
Z, θ_{x} 
700, 12 mrad 
no 

"Piezo Hexapod" 6DOF ParallelKinematic Stages 
*Models 
Description 
Axes 
*Travel [µm] 
*Feedback 
PDF 
P587 
Piezo Hexapod 6DoF nanopositioning & scanning stage. Sophisticated closedloop, 6axis system 
XYZ, θ_{x}θ_{y}θ_{z} 
800 / 10 mrad 
capacitive 

Ultrasonic Piezo Linear Motor Driven Stages click here 


*Custom dimensions, sensors, designs for volume buyers. Capacitive sensors and LVDT sensors are direct metrology sensors and provide the highest precision. For piezo steering mirrors, tip/tilt positioners see the “Piezo Active Optics” section. 

