Compact XYZ Motorized/Piezoelectric Photonics Alignment Systems

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Compact XYZ Motorized/Piezoelectric Photonics Alignment Systems

 

The product You were Looking for was moved Click Here for new Address F-130 F-131 Compact XYZ Motorized/Piezoelectric Photonics Alignment Systems Up to 15 mm Travel 1 nm Resolution Closed-Loop Piezo Drives Available Stepper- & DC-Motor Drives F-130 are compact computer-controllable XYZ alignment and positioning systems combining the advantages of ultra-high-resolution piezo drives with the long travel range of motorized stages. They are based on the M-110 / M-111 micropositioning stages (see link) and the P-611 rapid piezo NanoAlignment units (see link). The F-130 / F-131 is available in 8 different versions, with stepper- and DC-motor coarse drives, and open- and closed-loop piezoelectric fine drives. (see Ordering Information). The motor drives provide better than 0.1 µm resolution over a travel range of 5 and 15 mm. The piezo fine drives feature a 100 µm travel range in X, Y and Z, with zero-stiction, zero-friction flexure guiding systems and 1nm resolution. Several fiber, waveguide and optics adapters are available from PI (e.g. model F-603.60, see "Fiber, Objective and Wave guide Holders", see link). The C-880 multi-axis automation platform (see link) is recommended as controller. Photonics packaging Optical device testing MEMS positioning/alignment Fiber alignment Micromachining Micromanipulation (life sciences) Semiconductor test systems F-130.3SD XYZ Alignment System, 1 nm resolution, with optional F-603.22 ferrule holder (see link). F-130.3xx, dimensions (in mm) F-131.3xx, dimensions (in mm) The C-880 Multi-axis automation platform is recommended as conroller for the F-130/F-131.

Technical Data

Models	F-130.3SD	F-130.3SS	F-130.3OD	F-130.3OS	F-131.3SD	F-131.3SS	F-131.3OD	F-131.3OS	Units	Notes see link
Key features	Closed-loop DC motors, closed-loop PZT drives	Stepper motors, closed-loop PZT drives	Closed-loop DC motors, open-loop PZT drives	Stepper motors, open-loop PZT drives	Closed-loop DC motors, closed-loop PZT drives	Stepper motors, closed-loop PZT drives	Closed-loop DC motors, open-loop PZT drives	Stepper motors, open-loop PZT drives
Active axes	X,Y, Z	X,Y, Z	X,Y, Z	X,Y, Z	X,Y, Z	X,Y, Z	X,Y, Z	X,Y, Z
Motorized travel range (XYZ)	5	5	5	5	15	15	15	15	mm
Piezo travel range (XYZ)	100	100	100	100	100	100	100	100	µm
Design resolution (motor)	0.007	0.006	0.007	0.006	0.007	0.006	0.007	0.006	µm	A3
Min. incremental motion (motor)	0.05	0.05	0.05	0.05	0.05	0.05	0.05	0.05	µm	A4
Closed-loop / open-loop resolution (PZT)	2/1	2/1	- / 1	- / 1	2/1	2/1	- / 1	- / 1	nm
Motorized stage	M-110.3DG	M-110.32S	M-110.3DG	M-110.32S	M-111.3DG	M-111.32S	M-111.3DG	M-111.32S		see link
PZT drive	P-611.3SF	P-611.3SF	P-611.3OF	P-611.3OF	P-611.3SF	P-611.3SF	P-611.3OF	P-611.3OF		see link
Material	Al	Al	Al	Al	Al	Al	Al	Al		L
Recommended controller (see link)	C-880		C-880		C-880		C-880

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F-130.3SD
XYZ Alignment System, 5 mm, 100 µm, DC Motor/Encoder, C/L Piezo

F-130.3SS
XYZ Alignment System, 5 mm, 100 µm, Stepper Motor, C/L Piezo

F-130.3OD
XYZ Alignment System 5 mm, 100 µm, DC Motor/Encoder, O/L Piezo

F-130.3OS
XYZ Alignment System, 5 mm, 100 µm, Stepper Motor, O/L Piezo

F-131.3SD
XYZ Alignment System, 15 mm, 100 µm, DC Motor/Encoder, C/L Piezo

F-131.3SS
XYZ Alignment System, 15 mm, 100 µm, Stepper Motor, C/L Piezo

F-131.3OD
XYZ Alignment System, 15 mm, 100 µm, DC Motor/Encoder, O/L Piezo

F-131.3OS
XYZ Alignment System, 15 mm, 100 µm, Stepper Motor, O/L Piezo

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