F-311 | PIMotion&Vision-Integration of Vision System and Micro-/Nanopositioning |
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- Controls up to Six DOF Motion with Sub-µm or Sub-nm (Sub-µrad) Resolution
- National Instruments Compatible Vision System
- Multi-Channel Vision for a Mix of Resolutions and/or 3D Observation
- Powerful LabView VIs for PIMotion&Vision
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PIMotion&Vision offers an integrated solution for difficult tasks such as automated positioning of optics, semi-conductor wafers, microsystems technology MEMS fabrication or alignment and scanning of samples under a microscope.
Basic functions such as autofocus, edge and pattern recognition, and gap measurement. Intelligent automated procedures. Motion systems capable of carrying out the positioning or scanning required.
NI Framegrabber
The hardware for the F-311 PIMotion&Vision system consists of a National Instruments PCI bus framegrabber card. This fact guarantees a high degree of compatibility for further system integration. The framegrabber card supports a number of camera systems and is available with one or four channels.
Software Interface to Micro- and NanopositionersPIMotion&Vision offers a large number of LabView™ drivers for continuous monitoring and processing of the image information, including standard procedures for gap measurement, autofocus, aligning edges all the way to complex alignment routines in six degrees of freedom with up to 80 axes of motion, switching functions and read-in of analog signals (e.g. photometer signals for optical fiber alignment).
Motion is commanded using the PI General Command Set, which is supported by all PI multi-axis micropositioning and nanopositioning controllers.
The basic version contains all the drivers provided by PI; the Pro Version includes the full IMAQ development environment from National Instruments, making possible an even wider range of system integration and function development.
|  | - Optical 6D Alignments
- Autofocussing
- Gap Measurements
- Pattern Matching
- in - Semiconductor Industry
- - Biotechnology
- - Life Science
- - MEMS Manufacturing/MST
- - Photonics
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F-311 PIMotion&Vision software integrates vision systems with PI Micro- and Nanopositioners.
Simple setup with a single camera, two M-111 stages in an XY configuration and an M-116 rotatary platform (all controlled from a C-843 PCI card). This sample setup can be used for pattern recognition, as can be seen in the next graphics.
PIMotion&Vision sample pattern recognition task. The sample program searches for PI logos, counts and aligns them. The logos are 1 x 0.5 mm in size.
Gap measurement with PIMotion&Vision is linear down to 5 µm, and at separations down to 1 µm the values provided can be used with correction. Optical gap measurement then begins to be limited by refraction and optical imperfections. The reference measurements were made with a P-611 NanoCube piezo NanoPositioning system.
Optical fiber-alignment with F-206 6-axis-alignment system and P-611 Nanocube 3D piezo nanopositioning / scanning system. Two cameras allow a 3-dimensional visual automated coarse alignment.
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