IntelliStages™

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M-511.5i
M-521.5i
M-531.5i
IntelliStages™
  • Precision Translation Stage and Motor Controller in a Single Package
  • Daisy-Chain Network Capability
  • Fewer Components — Higher Reliability
  • Plug & Play Operation Through RS-232 Interface from Any PC or PLC
  • Travel Ranges up to 306 mm (12")
  • 0.1 µm Resolution
  • Stress-Relieved Aluminum Stage Base for Highest Stability
  • Zero-Backlash Recirculating Ballscrews
  • Hall-Effect Origin and Limit Switches
  • >20,000 Hours MTBF






M-500 Series IntelliStages™ are designed to meet demanding positioning requirements at minimum expense.

High Level of Integration
Because of the high level of integration, IntelliStages™ contain less than 50% of the components of a classical controller/stage setup (electronics, mechanics and cables!). This fact automatically increases the reliability and eliminates the potentiaIl of incompatibility.

Mechanically, the stages feature an ultra-stable, lightweight base precision machined from high-density, stress-relieved aluminum. The functional flat design allows multi-axis combinations.

Precision-ground recirculating ballscrews (higher precision than rolled ballscrews) with preloaded nuts provide low-friction, backlash-free positioning. High-precision linear guiding rails with recirculating ball bearings (no cage migration!) guarantee 1 µm/100 mm straightness and flatness. A high-resolution, 5-phase stepper motor with 20,000 steps/revolution provides minimum incremental motion of 0.1 µm.

Non-Contact Limit and Origin Switches
Integrated, high-precision, non-contact Hall-effect origin and limit switches with direction sensing on the origin switch protect your equipment and increase versatility in automation applications.

Setup and Daisy-Chain Feature
Setting up the IntelliStage™ is very easy. Connect one end of the cable (included) to the RS-232 interface of the PC and to the power supply (included), the other end to the stage and start the software (included). IntelliStages™ can be easily daisy-chain networked to form multi-axis motion-control systems— no extra parts are required. Whenever an additional stage is needed, it can be added and controlled from the same PC off the same interface (see drawing). Up to 27 IntelliStages™ can be daisy-chain networked (more with minor modifications).
  • Quality control
  • Semiconductor test equipment
  • Metrology
  • Disk drive test setups
  • R&D
M-511.5i IntelliStage™ with integrated motion controller

M-511.5i IntelliStage™ with integrated motion controller


Command editor for controlling multiple IntelliStages™ from one computer

Command editor for controlling multiple IntelliStages™ from one computer


Macro editor software for M-511.5i IntelliStages™

Macro editor software for M-511.5i IntelliStages™


IntelliStage™ translation stage with the integrated motion controller exposed

IntelliStage™ translation stage with the integrated motion controller exposed


IntelliStage™, master/slave configuration. Up to 27 stages can be networked in a chain (custom designs with more than 27 are feasible).

IntelliStage™, master/slave configuration. Up to 27 stages can be networked in a chain (custom designs with more than 27 are feasible).


Combination of two M-511.5i IntelliStages and an M-060 rotation stage. The special controller in the foreground allows operation of IntelliStages™ and other PI motorized stages from one computer interface.

Combination of two M-511.5i IntelliStages and an M-060 rotation stage. The special controller in the foreground allows operation of IntelliStages™ and other PI motorized stages from one computer interface.


Technical Data
ModelsM-511.5iM-521.5iM-531.5iUnitsNotes see link

Travel range 102204306mm

Design resolution0.10.10.1µmA3

Min. incremental motion0.10.10.1µmA4

Unidirectional repeatability0.20.20.2µm

Bidirectional repeatability111µm

Origin repeatability111µm

Accuracy per 50 mm 222µm

Straightness / flatness per 100 mm 111µm

Max. velocity202020mm/sec

Max. normal load capacity100100100kgB1

Max. push/ pull force80 / 8080 / 8080 / 80N B2

Max. lateral force200200200N

Motor resolution200002000020000steps/rev.

Ballscrew pitch 222mm/rev.

Motor type 5-phase stepper5-phase stepper5-phase stepper

Operating voltage *2424 24V

Weight5.16.27.3kg

Body materialAlAlAlL

Motor controller *Integrated IntegratedIntegrated

* Motor controller integrated in stage, cable for RS-232 interface and power included, 24 V power supply included in M-5x1.5iM Master Sets


To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

M-511.5iM
IntelliStage™ Translation Stage,102 mm (4"), Master Set, Including 24 V P/S

M-521.5iM
IntelliStage™ Translation Stage, 204 mm (8"), Master Set, Including 24 V P/S

M-531.5iM
IntelliStage™ Translation Stage, 306 mm (12") , Master Set, Including 24 V P/S

M-511.5iS
IntelliStage™ Translation Stage, 102 mm (4"), Slave Set

M-521.5iS
IntelliStage™ Translation Stage, 204 mm (8"), Slave Set

M-531.5iS
IntelliStage™ Translation Stage, 306 mm (12"), Slave Set

Custom Designs for Volume Buyers

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