Drive Options for M-500 Stages

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Drive Options for M-500 Stages
 


M-5xx.DD, ActiveDrive™ DC-Motor with Direct Output Metrology
This version features 0.1 µm minimum incremental motion and a max. velocity of 50 mm/sec. An optical linear encoder (mounted in the center of the stage, close to the ballscrew drive to prevent cosine errors found in other designs) eliminates drivetrain errors due to non-linearity, backlash and elastic deformation. The linear encoder measures the actual position of the moving carriage directly and with exceptional accuracy. The encoder is based on an optical grating and a non-contacting read head with integrated signal conditioner and interpolator.

For maximum dynamic performance we integrated our unsurpassed
ActiveDrive™ system. This unique design features a high efficiency PWM servo amplifier mounted side-by-side with the motor. It provides superior dynamic performance and several additional advantages:

  • Increased efficiency by eliminating power losses between the amplifier and motor
  • Reduced cost of ownership and improved reliability because no external driver is required
  • Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in an electrically shielded case

A remote-control brake is available to lock the stage after power-off (part No. M 5x1.DDB).

M-5xx.PD, ActiveDrive™ DC Motor
This version provides velocities to 150 mm/sec and resolution of 0.5 µm, a unique combination. It is equipped with the ActiveDrive™ found in the M-5xx.DD versions but uses a 4000 counts/rev. shaft-mounted position encoder instead of the linear scale for position feedback. A remotely controllable brake is available to lock the stage after power-off.

M-5xx.DG, DC-Motor/Gearhead Drive
A 3-watt DC motor with zero-backlash gearhead and shaft-mounted 2048 counts/rev. optical encoder is used. The gear ratio is 29.6:1, providing minimum incremental motion of 0.1 µm and a maximum velocity of 6 mm/sec.

M-5xx.2S, Stepper-Motor Direct Drive
A micro-stepped 2-phase stepper motor (20,000/rev. with the C-600 controller) combines high resolution with ultra-smooth low-speed positioning. 5-phase stepper motors are available on request.

M-5xx.5i IntelliStage™
This unique series features an integrated motion controller (see link).

M-511, M-521 and M-531 Dimensions (in mm)

M-511, M-521 and M-531 Dimensions (in mm)



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