Drive Options for M-500 Stages
| The product You were Looking for was moved Click Here for new Address | M-5xx.DD, ActiveDrive™ DC-Motor with Direct Output Metrology This version features 0.1 µm minimum incremental motion and a max. velocity of 50 mm/sec. An optical linear encoder (mounted in the center of the stage, close to the ballscrew drive to prevent cosine errors found in other designs) eliminates drivetrain errors due to non-linearity, backlash and elastic deformation. The linear encoder measures the actual position of the moving carriage directly and with exceptional accuracy. The encoder is based on an optical grating and a non-contacting read head with integrated signal conditioner and interpolator.
For maximum dynamic performance we integrated our unsurpassed ActiveDrive™ system. This unique design features a high efficiency PWM servo amplifier mounted side-by-side with the motor. It provides superior dynamic performance and several additional advantages:
Increased efficiency by eliminating power losses between the amplifier and motor Reduced cost of ownership and improved reliability because no external driver is required Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in an electrically shielded case A remote-control brake is available to lock the stage after power-off (part No. M 5x1.DDB).
M-5xx.PD, ActiveDrive™ DC Motor This version provides velocities to 150 mm/sec and resolution of 0.5 µm, a unique combination. It is equipped with the ActiveDrive™ found in the M-5xx.DD versions but uses a 4000 counts/rev. shaft-mounted position encoder instead of the linear scale for position feedback. A remotely controllable brake is available to lock the stage after power-off.
M-5xx.DG, DC-Motor/Gearhead Drive A 3-watt DC motor with zero-backlash gearhead and shaft-mounted 2048 counts/rev. optical encoder is used. The gear ratio is 29.6:1, providing minimum incremental motion of 0.1 µm and a maximum velocity of 6 mm/sec.
M-5xx.2S, Stepper-Motor Direct Drive A micro-stepped 2-phase stepper motor (20,000/rev. with the C-600 controller) combines high resolution with ultra-smooth low-speed positioning. 5-phase stepper motors are available on request.
M-5xx.5i IntelliStage™ This unique series features an integrated motion controller (see link).
| |
| | | | |
|
 M-511, M-521 and M-531 Dimensions (in mm)
|