Low-Profile, High-Resolution Translation Stages

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Low-Profile, High-Resolution Translation Stages

 

The product You were Looking for was moved Click Here for new Address M-511 M-521 M-531 Low-Profile, High-Resolution Translation Stages Travel Ranges to 306 mm (12") Velocity up to 150 mm/sec. ActiveDrive™ Motors Compatible with Leading Industrial Motion Controllers Linear-Scale Encoders for Highest Accuracy Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contacting Origin and Limit Switches IntelliStage™ Version with Integrated Controller Load Capacity 100 kg >20,000 Hours MTBF M-500 series translation stages are designed to meet the most demanding positioning requirements. They combine an extremely flat design to allow multiaxis combinations and feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision ground recirculating ballscrews (more accurate than rolled ballscrews) with preloaded nuts provide low friction, backlash-free positioning. Drive Options Five different stepper- and DC-motor drives are available. The IntelliStage™ models (M-511.5i, M-521.5i and M-531.5i) feature integrated motion controllers, another first from PI (see link). For highest accuracy and repeatability we recommend versions with integrated linear-scale encoder (direct output metrology) providing 0.1 µm minimum incremental motion and 1 µm full-travel accuracy. Maintenance Free High-precision linear guiding rails with recirculating ball bearings guarantee 1 µm/100 mm straightness and flatness. They are also immune to the cage migration problems of crossed roller bearings (can be an issue where small ranges are scanned repeatedly) and are maintenance free. Direction-Sensing Origin Switch Integrated, high-precision, non-contact Hall-effect origin and limit switches with direction sensing on the origin switch protect your equipment and increase versatility in automation applications. An optional auto-lock motor brake is available for the DC-Motor Direct Drive versions to secure the stage position when power is shut off. Precision Assembly Each M-500 stage is precision assembled and optimized using laser interferometers for performance testing. For the most stringent testing requirements individual stage data are available as option M-500.90.M-5xx.DD, ActiveDrive™ DC-Motor with Direct Output Metrology This version features 0.1 µm minimum incremental motion and a max. velocity of 50 mm/sec. An optical linear encoder (mounted in the center of the stage, close to the ballscrew drive to prevent cosine errors found in other designs) eliminates drivetrain errors due to non-linearity, backlash and elastic deformation. The linear encoder measures the actual position of the moving carriage directly and with exceptional accuracy. The encoder is based on an optical grating and a non-contacting read head with integrated signal conditioner and interpolator. For maximum dynamic performance we integrated our unsurpassed ActiveDrive™ system. This unique design features a high efficiency PWM servo amplifier mounted side-by-side with the motor. It provides superior dynamic performance and several additional advantages: Increased efficiency by eliminating power losses between the amplifier and motor Reduced cost of ownership and improved reliability because no external driver is required Elimination of PWM amplifier noise radiation by mounting the amplifier and motor together in an electrically shielded case A remote-control brake is available to lock the stage after power-off (part No. M 5x1.DDB). M-5xx.PD, ActiveDrive™ DC Motor This version provides velocities to 150 mm/sec and resolution of 0.5 µm, a unique combination. It is equipped with the ActiveDrive™ found in the M-5xx.DD versions but uses a 4000 counts/rev. shaft-mounted position encoder instead of the linear scale for position feedback. A remotely controllable brake is available to lock the stage after power-off. M-5xx.DG, DC-Motor/Gearhead Drive A 3-watt DC motor with zero-backlash gearhead and shaft-mounted 2048 counts/rev. optical encoder is used. The gear ratio is 29.6:1, providing minimum incremental motion of 0.1 µm and a maximum velocity of 6 mm/sec. M-5xx.2S, Stepper-Motor Direct Drive A micro-stepped 2-phase stepper motor (20,000/rev. with the C-600 controller) combines high resolution with ultra-smooth low-speed positioning. 5-phase stepper motors are available on request. M-5xx.5i IntelliStage™ This unique series features an integrated motion controller (see link). Photonics packaging Quality control Semiconductor test equipment Metrology Disk drive test assemblies R&D M-531.DD, M-521.DD and M-511.DD and M-505.2DG precision translation stages (bottom to top) XYZ combination of two M-511.DD translation stages and one M-501.1PD vertical stage M-511, M-521 and M-531 Dimensions (in mm)

Technical Data

Models	M-511.DD	M-521.DD	M-531.DD	M-511.PD	M-521.PD	M-531.PD	M-511.DG	M-521.DG	M-531.DG	M-511.2S	M-521.2S	M-531.2S	M-511.5i	M-521.5i	M-531.5i	Units	Notes see link
Key features	Linear scale, ActiveDrive DC motor	Linear scale, ActiveDrive DC motor	Linear scale, ActiveDrive DC motor	ActiveDrive DC motor rotary encoder	ActiveDrive DC motor rotary encoder	ActiveDrive DC motor rotary encoder	DC motor / gear head, rotary encoder	DC motor / gear head, rotary encoder	DC motor / gear head, rotary encoder	2-phase stepper motor	2-phase stepper motor	2-phase stepper motor	IntelliStage, integrated controller	IntelliStage, integrated controller	IntelliStage, integrated controller
Travel range	102	204	306	102	204	306	102	204	306	102	204	306	102	204	306	mm
Design resolution	0.1	0.1	0.1	0.5	0.5	0.5	0.033	0.033	0.033	0.1	0.1	0.1	0.1	0.1	0.1	µm	A3
Min. incremental	0.1	0.1	0.1	0.5	0.5	0.5	0.1	0.1	0.1	0.1	0.1	0.1	0.1	0.1	0.1	µm	A4motion
Unidirectional	0.1	0.1	0.1	0.5	0.5	0.5	0.2	0.2	0.2	0.2	0.2	0.2	0.2	0.2	0.2	µm	repeatability
Bidirectional	0.2	0.2	0.2	1	1	1	1	1	1	1	1	1	1	1	1	µm	repeatability
Origin	1	1	1	1	1	1	1	1	1	1	1	1	1	1	1	µm	repeatability
Accuracy	0.2	0.2	0.2	2	2	2	2	2	2	2	2	2	2	2	2	µm	per 50 mm
Straightness /	1	1	1	1	1	1	1	1	1	1	1	1	1	1	1	µm	flatness per 100 mm
Max. velocity	50	50	50	125	125	125	6	6	6	20	20	20	20	20	20	mm/sec
Max. normal	100	100	100	100	100	100	100	100	100	100	100	100	100	100	100	kg	B1load capacity
Max. push/	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	80 / 80	N	B2pull force
Max. lateral force	200	200	200	200	200	200	200	200	200	200	200	200	200	200	200	N
Encoder	0.1 µm *	0.1 µm *	0.1 µm *	4000	4000	4000	2048	2048	2048	-	-	-	-	-	-	counts/rev.	resolution
Motor resolution	-	-	-	-	-	-	-	-	-	20000**	20000**	20000**	20000	20000	20000	steps/rev.
Ballscrew pitch	2	2	2	2	2	2	2	2	2	2	2	2	2	2	2	mm/rev.
Gear ratio	-	-	-	-	-	-	(28/12)4 : 1 »29.6:1	(28/12)4 : 1 »29.6:1	(28/12)4 : 1 »29.6:1	-	-	-	-	-	-
Nominal	30 ***	30 ***	30 ***	30 ***	30 ***	30 ***	3	3	3	- **	- **	- **	-	-	-	W	motor power
Motor	0 to ±24	0 to ±24	0 to ±24	0 to ±24	0 to ±24	0 to ±24	0 to ±12	0 to ±12	0 to ±12	24 **	24 **	24 **	24	24	24	V	voltage range
Weight	5.0	6.1	7.2	5.0	6.1	7.2	4.9	6.0	7.1	4.9	6.0	7.1	5.1	6.2	7.3	kg
Body material	Al	Al	Al	Al	Al	Al	Al	Al	Al	Al	Al	Al	Al	Al	Al		L
Recommended motor controller	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862	C-600, C-630	C-600, C-630	C-600, C-630	Integrated****	Integrated****	Integrated****		D2
* Linear encoder ** 2-phase stepper, 24 V chopper voltage, max. 0.8 A / phase, 20,000 microsteps with C-600, C-630 controllers; *** ActiveDrive™ (integrated PWM servo-amplifier), brake option for M-5xx.DD **** -Motor controller integrated in stage, cab

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M-511.DG
Translation Stage, 4", DC Motor / Gearhead

M-511.DD*
Translation Stage, 4", ActiveDrive™ DC Motor, 0.1 µm Linear Encoder

M-511.PD
Translation Stage, 4", ActiveDrive™ DC Motor, Rotary Encoder

M-511.2S
Translation Stage, 4", 2-Phase Stepper Motor

M-511.5i
**IntelliStage™ Translation Stage, 4", 5-Phase Stepper Motor, Integrated Motor Controller

M-521.DG
Translation Stage, 8", DC Motor / Gearhead

M-521.DD
*Translation Stage, 8", ActiveDrive™ DC Motor, 0.1 µm Linear Encoder

M-521.PD
Translation Stage, 8", ActiveDrive™ DC Motor, Rotary Encoder

M-521.2S
Translation Stage, 8", 2-Phase Stepper Motor

M-521.5i
**IntelliStage™ Translation Stage, 8", 5-Phase Stepper Motor, Integrated Motor Controller

M-531.DG
Translation Stage, 12", DC Motor / Gearhead

M-531.DD
*Translation Stage, 12", ActiveDrive™ DC Motor, 0.1 µm Linear Encoder

M-531.PD
Translation Stage, 12", ActiveDrive™ DC Motor, Rotary Encoder

M-531.2S
Translation Stage, 12", 2-Phase Stepper Motor

M-531.5i
IntelliStage™ Translation Stage, 12", 5-Phase Stepper Motor, Integrated Motor Controller

* -version M-5x1.DDB with motor brake available
** see separate datasheet, see link.

Custom Designs for Volume Buyers

Options

M-500.90
Linear and Guiding Accuracy Interferometric Test Sheet for M-500 Stages

M-590.00
Three-Point Support

M-592.10
Z-axis Mounting Bracket for Vertical Mount of M-500 Series Stages