PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors

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M-661 · M-662
PILine® Miniature Translation Stages with Ultrasonic Piezo Linear Motors
  • Smallest Translation Stage with High-Speed Linear Motor Drive
  • Velocity to 500 mm/s
  • Acceleration to 20 g
  • Resolution to 50 nm
  • 20 mm Travel Range
  • Self-Locking
  • XY-Combinations Available
  • 20,000 h MTBF
  • Vacuum Versions to 10-7 hPa






PILine® – Ultimate Motion in the Smallest Package
PILine® M-661- and M-662-series micropositioning systems are the smallest high-speed piezo-motor-driven translation stages currently available on the market.

Working Principle
M-661 and M-662 stages have a new, patented, ultrasonic drive developed by PI. The highly compact, integrated P-661 piezomotor drive can provide accelerations of up to 20 g and velocities of 500 mm/s and more, together with high resolution and holding force. Because the ceramic stator is pressed against a slider of the stage, piezomotors resist motion with an intrinsic holding force when the stage is at rest. The result is very high position stability without the heat dissipation common with conventional linear motors. Furthermore, there are no gears, leadscrews or other mechanical components to contribute play or backlash.

M-661 / M-662 Fast and Compact
Both models are operated without position feedback, where they can achieve speeds of up to 500 mm/s. The square footprint of the M-662.470 makes it suitable for XY-configurations, while the M-661.370, which is even smaller, is designed for single-axis systems.

Drive Electronics for Open-Loop Operation
Two different driver electronics solutions are available for PILine® open-loop stages and OEM motors. They can either be operated by a simple pulsed-mode driver (C-181), or by a more sophisticated version which allows controlling the speed with an analog signal in the ±10 V range (C-185).

C-181, C-170 – Pulsed Mode Operation
Pulsed operation is especially suited for applications requiring small steps or rapid end-to-end motion, as in microscopy, automation or similar applications.

The motor can be controlled with 5 V TTL pulses connected to the signal input on the driver electronics. The width of the pulses will determine the approximate length of the steps the motor makes. The smallest possible step is about 50 nm, requiring a pulse of about 10 µs in duration. The pulse rate and width can be used to influence the step size and rate, thus determining the velocity.

A flexible, programmable pulse generator with integrated C-181 driver is available as C-170.161.

C-185 Analog Driver
The C-185 analog driver controls the motor speed as a function of a ±10 V analog input. With an external position sensor and a controller, it is thus possible to set up a very fast, closed-loop system. The M-663 stage with integrated linear encoder (see p. see page) can also be run with this driver.

Accessories
For the operation of PILine® stages and piezo linear motors, a drive electronics is required. The driver is necessary to create the ultrasonic oscillations of the piezoceramic actuator of the motor. The choice of the drive electronics depends on the application and the motion controller used and is therefore not part of delivery of a PILine® stage or motor. The unit with the drive electronics, however, must be ordered at the same time as the stage, so that they can be tuned for optimum performance with each other.
  • Biotechnology
  • Micromanipulation
  • Microscopy
  • Quality Control
  • Semiconductor Test Equipment
  • Shutters
  • High-Speed-Scanning
  • R&D
  • Photonics Packaging
PILine<sup>®</sup> M-662 (left side) and M-661 stages are the smallest piezo-motor-driven translation stages available on the market that achieve speeds of up to 500 mm/s.

PILine® M-662 (left side) and M-661 stages are the smallest piezo-motor-driven translation stages available on the market that achieve speeds of up to 500 mm/s.


M-662.470 dimensions in mm; decimal places separated by commas.

M-662.470 dimensions in mm; decimal places separated by commas.


In place of the bench-top electronics, the C-181.161 OEM board (left rear) can be used with M-661 /P-661 ultra-compact piezo linear motors.

In place of the bench-top electronics, the C-181.161 OEM board (left rear) can be used with M-661 /P-661 ultra-compact piezo linear motors.


M-661.370 dimensions in mm

M-661.370 dimensions in mm


50 nm steps created with a system consisting of C-170.161 RedStone and PILine<sup>®</sup> M-662.470 open-loop piezo linear motor stage.

50 nm steps created with a system consisting of C-170.161 RedStone and PILine® M-662.470 open-loop piezo linear motor stage.


Technical Data
ModelM-661.370M-662.470UnitsNotes

Travel range1820mm

Design resolution--µmA3

Min. incremental motion0.050.05µmA4

Bidirectional repeatability--µm

Max. velocity500500mm/s

Max. normal load capacity55NB1

Max. push/pull force11NB2

Max. holding force22N

Operating voltage (drivers)1212V

Operating voltage (piezo6060V

Integrated piezomotorP-661P-661

Operating current<500<500mA

Weight0.030.03kg

Dimensions (L x W x H)30 x 23 x 1028 x 28 x 8mm

Body materialAluminumAluminumL

MTBF>20,000>20,000

Recommended driverC-181.161 (TTL); C-170.161 (TTL); C-185.161 (analog)C-181.161 (TTL); C-170.161 (TTL); C-185.161 (analog)




To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

M-661.370
PILine® Ultra-Compact Translation Stage with P-661 Piezo Linear Motor Drive, 18 mm Travel

M-662.470
PILine® Ultra-Compact Translation Stage with P-661 Piezo Linear Motor Drive, 20 mm Travel

M-662.4V0
Vacuum-compatible version of the M-662.470

C-181.161
Pulse-Mode Drive Electronics for PILine® P-661 Piezo Linear Motors or Translation Stages with P-661 Motors; with Power Supply

C-185.161
Analog Drive Electronics for PILine® P-661 Piezo Linear Motors or Translation Stages with P-661 Motors; with Power Supply

C-170.161
RedStone Open-Loop Piezomotor Controller/Driver, 1 Channel, for PILine® Systems with P-661 Motors

C-170.261
RedStone Open-Loop Piezomotor Controller/Driver, 1 Channel, for PILine® Systems with P-664 Motors

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