PI Ultra Precision Motion Control / Linear Slide / Piezo Stage: Datasheets: F-206.S HexAlign™ 6-Axis Micro Motion Robot (Hexapod) ; PI: Leader in Nanopositioning, Piezo Technology, Piezo Stages, Piezo Motor

The F-206.S HexAlign™ micro robot is of great value for any complex, high-accuracy positioning and alignment task where independent motion in six degrees of freedom is required. The compact hexapod is based on PI's long experience in high-resolution, parallel-kinematic machines (PKM) and provides 6D motion with 0.1 µm minimum incremental motion (combined 6-axis move; the design-resolution of each individual strut is 0.033 µm).

Compact, Plug & Play
The F-206.S Hexapod is considerably more compact and accurate than conventional multi-axis stage stacks (serial kinematics). Its parallel-kinematics design and powerful, digital 6D controller minimizes unwanted crosstalk motion. The controller automatically manages its path planning and the coordination of all six motors. There are none of the servotuning and dynamic setup procedures necessitated by the widely varying effective loads on stages in a stacked assembly. The F-206 is truly a plug-and-play motion system that requires no servo adjustment or tuning.

Because all actuators connect directly to the same platform, accumulative orthogonality/ crosstalk errors, which are a formidable assembly and service concern for stacked multi-axis units, do not affect the F-206 system.

PivotAnywhere™ Virtualized Rotation Capability
For positioning tasks such as alignments, it is important to define a certain point in space as the center of rotation. Since Hexapod motion is not determined by fixed bearings, but rather by sophisticated, real-time, 6-space control algorithms, this point can be chosen freely with a single software command.

6 DOF, Zero Moving Cables
Another advantage of the F-206.S design is that there are no moving cables to limit repeatability with friction and no cable management issues to be resolved when integrating the unit. The hexapod concept provides the following additional advantages:

Reduced size
Reduced inertia for improved dynamic performance
Independent, modular, identical drive/strut units, simplifying assembly and service

F-206.S for Superior: The improved F-206.S features redesigned struts for higher travel ranges and superior lifetime compared to the classical F-206 systems.

Easy Programming, Logical Axes and Open Interface
Control of the F-206.S is facilitated by the controller's open architecture interface which provides a variety of high-level commands for minimized communication. The user-friendly software and command structure allows direct six-axis positioning by entering Cartesian coordinates X, Y, Z and q_X, q_Y, q_Z.

Automated Optical Alignment
The F-206.S can be upgraded to include an integrated photometer card for optical alignment and built-in automatic alignment procedures (option F-206.IRU or F-206.00U, see link). The F-361 high-speed, absolute measuring photometer can also be used with the F-206.S (see link).

Technical Data
Models	F-206.S0 / F-206.SD

Travel range X	-8 to +5.7 mm

Travel range Y	-5.7 to 5.7 mm

Travel range Z	-6.7 to + 6.7 mm

Travel range q_X	-5.7 to +5.7°

Travel range q_Y	-6.6 to +6.6°

Travel range q_Z	-5.5 to +5.5°

Actuator design resolution	33 nm

Minimum incremental motion X, Y, Z	0.1 µm (6-axis move!)*.

Minimum incremental motion q_X, q_Y, q_Z	2 µrad (0.4 arc sec.) (6-axis move!)

Bidirectional Repeatability X, Y, Z	0.3 µm

Repeatability q_X, q_Y, q_Z	3.6 µrad

Velocity range X, Y, Z	0.01 to 10 mm/sec

Load capacity	2 kg (centered and normal to mounting platform)

Weight	5.8 kg

Connector/cable	Mini-Delta Ribbon, 68-Pin / 6 x 15-pin sub-D, 3 m cable

Controller	Digital Hexapod controller with optional internal photometer and internal scan & automatic alignment functions, included

Operating voltage range	100-240 VAC, 50/60 Hz

Software	LabView™ Drivers, Arrayed Component Alignment Software, DLL Libraries, HexControl Scan & Alignment Software, Terminal Software


* No moving cables! No friction, bending or twisting forces induced by moving cables as with stacked units. ** -The travel ranges of the individual coordinates (X, Y, Z, q_X, q_Y, q_Z) are interdependent. The data in this table show maximum travel (where at least one actuator is totally extended). If motion from a particular point or in more than one axis is desired, the available travel may be less.

Technical Data

Models

F-206.S0 / F-206.SD

Travel range X

-8 to +5.7 mm

Travel range Y

-5.7 to 5.7 mm

Travel range Z

-6.7 to + 6.7 mm

Travel range q_X

-5.7 to +5.7°

Travel range q_Y

-6.6 to +6.6°

Travel range q_Z

-5.5 to +5.5°

Actuator design resolution

33 nm

Minimum incremental motion X, Y, Z

0.1 µm (6-axis move!)*.

Minimum incremental motion q_X, q_Y, q_Z

2 µrad (0.4 arc sec.) (6-axis move!)

Bidirectional Repeatability X, Y, Z

0.3 µm

Repeatability q_X, q_Y, q_Z

3.6 µrad

Velocity range X, Y, Z

0.01 to 10 mm/sec

Load capacity

2 kg (centered and normal to mounting platform)

Weight

5.8 kg

Connector/cable

Mini-Delta Ribbon, 68-Pin / 6 x 15-pin sub-D, 3 m cable

Controller

Digital Hexapod controller with optional internal photometer and internal scan & automatic alignment functions, included

Operating voltage range

100-240 VAC, 50/60 Hz

Software

LabView™ Drivers, Arrayed Component Alignment Software, DLL Libraries, HexControl Scan & Alignment Software, Terminal Software

* No moving cables! No friction, bending or twisting forces induced by moving cables as with stacked units.
** -The travel ranges of the individual coordinates (X, Y, Z, q_X, q_Y, q_Z) are interdependent. The data in this table show maximum travel (where at least one actuator is totally extended). If motion from a particular point or in more than one axis is desired, the available travel may be less.