PI Ultra Precision Motion Control / Linear Slide / Piezo Stage: Datasheets: S-325 High-Speed Piezo Tip/Tilt Platform and Z Positioner ; PI: Leader in Nanopositioning, Piezo Technology, Piezo Stages, Piezo Motor

The S-325 multi-axis tip/tilt platforms and Z-positioners are fast and compact units based on the triple-piezo-drive supported platform design (see link in the PI NanoPositioning catalog for details).

High Resolution, Rapid Motion and Stable Positioning
The S-325 offers piston movement up to 30 µm (ideal for path length adjustment) and tilt movement up to 5 mrad (mechanical tilt, which is equivalent to 10 mrad optical beam deflection) with sub-msec response and settling. The zero-friction PZT drives allow sub-nm linear resolution and sub-µrad angular resolution. The S-325 systems are designed for mirrors and optics up to 25 mm diameter and can be mounted in any orientation.

OEM Proven
Developed for industrial applications, S-325s have performed 10⁹ motion cycles without failure for OEM applications.

Working Principle
The S-325 tip/tilt platforms are equipped with three low-voltage piezoelectric (0 to 100 V) linear drives. The closed-loop model features additional position feedback.

S-325.30L Open-Loop Z, Tip/Tilt Positioner
The S-325.30L open-loop model is ideal for applications where the position is controlled by an external loop based on data provided by a sensor (e. g. PSD quad cell, CCD chip,. . .). All three piezo linear actuators can be driven individually (or in parallel) by a three-channel ampli-fier. Vertical (piston movement) positioning and tip/tilt positioning is possible.
Recommended control electronics: E-663.00, the E-500 system, configured for 3 channels (low or high-power amplifiers) or 3 x E-610.00 or 3 x E-621.00.

S-325.3SL Closed-Loop Z, Tip/Tilt Positioner
The S-325.3SL closed-loop version allows absolute position control, high linearity and repeatability based on the internal position sensors. All three piezo linear actuators are equipped with high-resolution strain gauge sensors and can be driven individually (or in parallel). Vertical positioning (piston movement) and tip/tilt positioning is possible. The integrated position feedback sensors provide sub-µrad (sub-nanometer for piston mode) resolution (with PI control electronics).
Recommended control electronics: The E-500 system, configured for 3 channels (low or high-power amplifiers) and E-509 controller, or 3 x E-610.SR or 3 x E-621.SR.

Technical Data
Models	S-325.30L	S-325.3SL	Units

Active Axes	q_X, q_Y, Z	q_X, q_Y, Z

* Open-loop tilt angle @ 0 to 100 V	**5 (± 2.5)	**5 (± 2.5)	mrad ± 20%

* Closed-loop tilt angle	-	**4 (± 2)	mrad

* Open-loop linear travel @ 0 to 100 V	30	30	µm ± 20%

* Closed-loop linear travel @ 0 to 100 V	-	30	µm

Integrated feedback sensor	-	strain gauge sensor

Closed-loop/open-loop angular resolution	-/±0.05	0.1/±0.05	µad

Closed-loop/open-loop linear resolution	-/0.5	1.0/0.5	nm

Electrical capacitance	3 x 3.6	3 x 3.6	µF ±20%

Unloaded resonant frequency	2	2	kHz ±20%

Resonant frequency with 25 x 8 mm glass mirror	1	1	kHz ±20%

Distance of pivot point to platform surface	6 ±0.5	6 ±0.5	mm

Platform moment of inertia	515	515	gmm²

Operating temperature range	-20 to 80	-20 to 80	°C

Voltage connection	3 x VL, 2.0 m	3 x VL, 2.0 m

Sensor connection	-	3 x L, 2.0 m

Weight (without cables)	65	65	g ±5%

Material casing	Al	Al


* -For maximum tilt range, all three piezo actuators must be biased at 50 V. Linear travel and and tilt angle are interdependent. The values quoted here refer to pure linear / pure angular motion. ** -Mechanical tilt, optial beam deflection is twice as large.

Technical Data

Models

S-325.30L

S-325.3SL

Units

Active Axes

q_X, q_Y, Z

* Open-loop tilt angle @ 0 to 100 V

**5 (± 2.5)

mrad ± 20%

* Closed-loop tilt angle

**4 (± 2)

mrad

* Open-loop linear travel @ 0 to 100 V

µm ± 20%

* Closed-loop linear travel @ 0 to 100 V

µm

Integrated feedback sensor

strain gauge sensor

Closed-loop/open-loop angular resolution

-/±0.05

0.1/±0.05

µad

Closed-loop/open-loop linear resolution

-/0.5

1.0/0.5

Electrical capacitance

3 x 3.6

µF ±20%

Unloaded resonant frequency

kHz ±20%

Resonant frequency with 25 x 8 mm glass mirror

kHz ±20%

Distance of pivot point to platform surface

6 ±0.5

Platform moment of inertia

515

gmm²

Operating temperature range

-20 to 80

°C

Voltage connection

3 x VL, 2.0 m

Sensor connection

3 x L, 2.0 m

Weight (without cables)

g ±5%

Material casing

* -For maximum tilt range, all three piezo actuators must be biased at 50 V. Linear travel and and tilt angle are interdependent. The values quoted here refer to pure linear / pure angular motion.
** -Mechanical tilt, optial beam deflection is twice as large.