Multi-Axis, Single-Module Piezo Flexure NanoPositioners and Scanners

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Multi-Axis, Single-Module Piezo Flexure NanoPositioners and Scanners

 

The product You were Looking for was moved Click Here for new Address P-518 P-528 P-558 Multi-Axis, Single-Module Piezo Flexure NanoPositioners and Scanners Precision Trajectory Control Single-Module, Parallel-Kinematics Design Features Enhanced Responsiveness and Automatic Runout Compensation 1- to 6-Axis Versions Travel Ranges to 200 µm Clear Aperture to 66 x 66 mm Integrated Capacitive Displacement Sensors Optional Active Error Compensation for Enhanced Trajectory Control P-500 series NanoPositioners are low-profile, high-resolution, piezoelectrically driven, multi-axis flexure stages providing motion with up to 6 degrees of freedom. Linear travel ranges to 200 × 200 × 20 µm and rotation ranges to ±2 mrad are available. The 66 x 66 mm clear aperture is ideal for transmitted-light applications. Parallel Kinematics, Versatility The low cost and versatility of the P-500 stages are made possible by their unique single-module multi-axis design. Another advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details). State-of-the-art trajectory control is achieved in a special 6D version of the P-500. This stage incorporates 6-axis active error compensation to force sub-nm and sub-µrad straightness and flatness (ask for separate information). For longer travel ranges see the P-587 six-axis NanoPositioning system (see link). Working Principle Low-voltage PZTs (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed-loop operation (with PI electronics). Metrology Lithography Nanopositioning Scanning microscopy Disk-drive testing Optics Laser technology Micromanufacturing P-527.2CL Single-module Flexure NanoPositioner P-558, P-518, P-528 dimensions (in mm)

Technical Data P-500-Series (Z and Z/Tip/Tilt Stages)

Models	P-558.ZCD	P-518.ZCD	P-528.ZCD	P-558.ZCL	P-518.ZCL	P-528.ZCL	P-558.TCD	P-518.TCD	P-528.TCD	Units	Notes see link
Active axes	Z	Z	Z	Z	Z	Z	Z, qX, qY	Z, qX, qY	Z, qX, qY
Open-loop travel @ 0 to 100 V	50	100	200	50	100	200	50, (±0.28 mrad)	100, (±0.56 mrad)	200, (±1.13 mrad)	µm ±20%	A2
Closed-loop travel ³	50	100	200	50	100	200	50, (±0.25 mrad)	100, (±0.5 mrad)	200, (±1.0 mrad)	µm	A5
Integrated feedback sensor	1 x capacitive	1 x capacitive	1 x capacitive	1 x capacitive	1 x capacitive	1 x capacitive	3 x capacitive	3 x capacitive	3 x capacitive		B
Closed-loop / open-loop* resolution £	0.5	0.5	1	0.5	0.5	1	0.5, (50 nrad)	0.5, (50 nrad)	1, (100 nrad)	nm	C1
Closed-loop linearity (typ.)	0.03	0.03	0.03	0.03	0.03	0.03	0.03	0.03	0.03	%
Full-range repeatability (typ.)	±5	±5	±10	±5	±5	±10	±5, (±0.1 µrad)	±5, (±0.1 µrad)	±10, (±0.1 µrad)	nm	C3
Stiffness	Z: 4.0	Z: 2.7	Z: 1.5	Z: 4.0	Z: 2.7	Z: 1.5	Z: 4.0	Z: 2.7	Z: 1.5	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	Z: 100/50	Z: 100/50	Z: 100/50	Z: 100/50	Z: 100/50	Z: 100/50	Z: 100/50	Z: 100/50	Z: 100/50	N	D3
Max. (±) normal load	5	5	5	5	5	5	5	5	5	kg	D4
** Electrical capacitance	8	11	15	8	11	15	Z: 8	Z: 11	Z: 15	µF ±20%	F1
** Dynamic operating current coefficient (DOCC)	20	13.7	9.5	20	13.7	9.5	Z: 20	Z: 13.7	Z: 9.5	µA/	F2
Unloaded resonant frequency	570	500	350	570	500	350	Z: 570 qX, qY: 610	Z: 500 qX, qY: 530	Z: 350 qX, qY: 390	Hz ±20%	G2
Resonant frequency load @ 500 g	410	350	210	410	350	210	Z: 410 qX, qY: 430	Z: 350 qX, qY:370	Z: 210 qX, qY: 250	Hz ±20%	G3
Resonant frequency @ 2500 g load	240	190	115	240	190	115	Z: 240 qX, qY: 245	Z: 190 qX, qY:200	Z: 115 qX, qY: 130	Hz ±20%	G3
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	D ***	D ***	D ***	VL	VL	VL	D ***	D ***	D ***		J1
Sensor connection	D ***	D ***	D ***	2 x C	2 x C	2 x C	D ***	D ***	D ***		J2
Weight (with cables)	1380	1400	1420	1380	1400	1420	1380	1400	1420	g ±5%
Body material	Al	Al	Al	Al	Al	Al	Al	Al	Al		L
Recommended Amplifier/Controller (codes explained see link)	M	M	M	H, F, L	H, F, L	H, F, L	K	K	K
* Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710, E-750, E-503 amplifiers. ** Capacitance and DOCC of rotational axes cannot be stated because qZ is based on differential X and Y motion rather than on motion of a dedicated rotational drive. Dynamic Operating Current Coefficient of linear axes is in µA per hertz and µm. Example P-558.CZL: Sinusoidal scan of 10 µm at 10 Hz requires approximately 2 mA drive current. *** Cable length: 1.5 m. One Sub-D special connector only (sensor and operating voltage).

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P-558.ZCD
Z Piezo Flexure Stage, 50 µm, Capacitive Sensor, Sub-D Connector

P-518.ZCD
Z Piezo Flexure Stage, 100 µm, Capacitive Sensor, Sub-D Connector

P-528.ZCD
Z Piezo Flexure Stage, 200 µm, Capacitive Sensor, Sub-D Connector

P-558.ZCL
Z Piezo Flexure Stage, 50 µm, Capacitive Sensor, LEMO Connectors

P-518.ZCL
Z Piezo Flexure Stage, 100 µm, Capacitive Sensor, LEMO Connectors

P-528.ZCL
Z Piezo Flexure Stage, 200 µm, Capacitive Sensor, LEMO Connectors

P-558.TCD
Z, q_X, q_Y Piezo Flexure Stage, 50 µm, ±025 mrad, Capacitive Sensor, Sub-D Connector

P-518.TCD
Z, q_X, q_Y Piezo Flexure Stage, 100 µm, ±0.5 mrad, Capacitive Sensor, Sub-D Connector

P-528.TCD
Z, q_X, q_Y Piezo Flexure Stage, 200 µm, ±1 mrad, Capacitive Sensor, Sub-D Connector Continued see link

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