NanoCube™ XYZ Rapid PhotonicsNanoAlignment System

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P-611.3OF
P-611.3SF*
NanoCube™ XYZ Rapid PhotonicsNanoAlignment System
  • Ideal for Fiber Alignment and Photonics Packaging Applications
  • Optional E-760 Controller Card with Built-In Optical Metrology
  • 100 x 100 x 100 µm Travel Range, Ultra-Compact Package!
  • 1 nm Resolution
  • Closed- and Open-Loop Versions
  • Precision Trajectory Control
  • Fast Scanning and Settling
  • Large Variety of Controllers






The P-611.3OF and P-611.3SF NanoCube™ NanoAlignment systems are based on PI's vast experience with ultra-high-precision piezo scanning systems (see section PZT flexure NanoPositioners) and photonics packaging applications. They combine a 100 x 100 x 100 µm XYZ positioning and scanning range with a zero stiction/friction wire-EDM-cut guiding system in an extremely compact package. NanoCube™ systems provide motion with nanometer-scale resolution and settling times of only a few milliseconds.

Open- & Closed-Loop Models
Open- and closed-loop versions are offered to suit your application. Several fiber, waveguide and optics adapters are available for mounting on the NanoCube™ (e.g. model F-603.60, see "Fiber, Objective and Waveguide Holders" see link).

NanoCubes™ are also available in a slightly different package without the fiber adapter interface, see the P-611 article see link in the "Flexure NanoPositioners" section.

Automatic Alignment
NanoCube™ can be operated with a special controller card (model E-760, see link) featuring built-in optical metrology and search functionality for automatic alignment tasks. A variety of other rackmount and bench-top controllers is also available.

NanoCubes™ can be easily combined with a number of automated or manual PI MicroPositioning systems, from single axis stages to 6-degree-of-freedom micromanipulators.

Working Principle
P-611 NanoPositioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled (finite element analysis) for zero stiction and friction, ultra-high resolution and exceptional guiding precision. Integrated position feedback sensors provide nanometer-scale resolution and stability in closed-loop operation (with PI control electronics).

  • Photonics packaging
  • Optical device testing
  • MEMS positioning/alignment
  • Fiber alignment
  • Micromachining
  • Micromanipulation (life sciences)
  • Semiconductor test systems
P-611 NanoCube™, XYZ Compact NanoAlignment System, 100 x 100 x 100 µm travel range, 1 nm resolution, shown with optional F-603.22 ferrule holder.

P-611 NanoCube™, XYZ Compact NanoAlignment System, 100 x 100 x 100 µm travel range, 1 nm resolution, shown with optional F-603.22 ferrule holder.


P-611 NanoCube™ in a coarse/fine travel alignment application with M-511, M-501 and M-037 stages. CyberAligner™ software takes data of the complete cross-coupling section, aligns the platform and displays the profile on screen (this process only takes a few seconds).

P-611 NanoCube™ in a coarse/fine travel alignment application with M-511, M-501 and M-037 stages. CyberAligner™ software takes data of the complete cross-coupling section, aligns the platform and displays the profile on screen (this process only takes a few seconds).


Combination of NanoCube™ and F-206 Six-Axis Parallel-Kinematics MicroMotion-Robot

Combination of NanoCube™ and F-206 Six-Axis Parallel-Kinematics MicroMotion-Robot


P-611.3OF, P-611.3SF dimensions (in mm)

P-611.3OF, P-611.3SF dimensions (in mm)


Technical Data
ModelsP-611.3SFP-611.3OFUnitsNotes see link

Active axesX,Y,ZX,Y,Z

Open-loop travel @ 0 to 100 V100 / axis100 / axisµm ±20%A2

Closed-loop travel ³100 / axis100 / axisµmA5

Integrated feedback sensorSGS-B

Closed-loop / open-loop ** resolution £2 / 1- / 1nmC1

Stiffness 0.30.3N /µm ±20%D1

Max. (+/-) normal load1.51.5kgD4

Electrical capacitance 1.8 / axis 1.8 / axis µF ±20%F1

* Dynamic operating current coefficient (DOCC)2 / axis2 / axisµA/(Hz x µm)F2

Unloaded resonant frequency (X/Y/Z)350/220/250350/220/250Hz ±20%G2

Operating temperature range- 20 to 80- 20 to 80°CH2

Voltage connection ***Sub-D-Special Sub-D-Special J1

Sensor connection ***Sub-D-Special-J2

Weight (w/o cables)250250g ±5%

Body materialS/AlS/AlL

Recommended Amplifier/Controller (codes explained see link) N, C, D ,G , HN, G, C

* Dynamic Operating Current Coefficient in µA per hertz and µm.
Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 1 mA drive current.
** Resolution of PZT NanoPositioners is not limited by stiction or friction. Noise equivalent motion with E-503 amplifier.
*** Adapter cable with LEMO connectors for sensor and operating voltage included.


To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

P-611.3SF
NanoCube™ XYZ NanoAlignment
Stage, 100 x 100 x 100 µm, Closed-
Loop, Fiber Adapter Interface

P-611.3OF
NanoCube™ XYZ NanoAlignment
Stage, 100 x 100 x 100 µm,
Open-
Loop, Fiber Adapter Interface

Recommended Controllers
E-760, E-664

Custom Designs
for Volume Buyers

Piezo Nano-Actuators · Low Inertia Hexapod Piezo · Piezoelectric Material · Capacitance Sensors · Ultra-Precision Motion Control, Flexure Nano-Positioning Stage · Precision Nanopositioner · Parallel Kinematic · · Micropositioners · PI Ceramic Piezoceramic Material Nanoautomation · PI-USA · Nanopositioning-Systems PDF Catalog · Hexapod · Micropositioning · Hexapod PIFOC® Piezo Microscopy Focus Scanner · Ultrasonic Piezo Motors, Piezomotor · Multilayer Piezo Lifetime · Piezo Systems, Piezo Actuator