Vertical MicroPositioning Stage

The PI Product / Information You were Looking for
was moved to a new location

 

Click Here for new Address of

Vertical MicroPositioning Stage

 

The product You were Looking for was moved Click Here for new Address M-501 Vertical MicroPositioning Stage Travel Range 12.5 mm (1/2") Ultra-High-Resolution Encoder ActiveDrive™ Motor Compatible with Leading Industrial Motion Controllers Stress-Relieved Aluminum Stage Base for Highest Stability Zero-Backlash Recirculating Ballscrews Non-Contact Origin and Limit Switches >20,000 Hours MTBF The M-501 vertical stage is the latest family member of the M-500 series of translation stages. It is ideal for forming compact XYZ combinations together with the low-profile M-511, M-521 and M-531 translation stages. M-501 vertical stages feature a precision-machined base of high-density, stress-relieved aluminum for exceptional stability and minimum weight. Precision-ground recirculating ballscrews (more accurate than rolled ballscrews) with preloaded nuts provide low-friction, maintenance-free and backlash-free positioning. Two DC-motor drives are currently available: Model M-501.1PD features an ultra-high-resolution ballscrew-mounted interferometric encoder (40960 counts/rev!) and the ActiveDrive™ motor, providing superior dynamic performance with a minimum incremental motion of better than 100 nanometers (design resolution 24 nm). The ActiveDrive™ system includes a high-efficiency PWM servo-amplifier mounted side-by-side with the motor. This design provides several decisive advantages: Increased efficiency, by eliminating power losses between the amplifier and motor Reduced cost of ownership and improved reliability because no external driver is required Elimination of PWM amplifier noise radiation, because amplifier and motor are mounted together in the same electrically shielded case Model M-501.1DG is equipped with a DC-motor/gearhead drive. A 3-watt DC motor with zero-backlash gearhead and shaft-mounted 2048 counts/ rev. optical encoder are used. The gear ratio is 29.6:1, providing a minimum incremen-tal motion of better than 100 nanometers (design resolution 5 nm). Non-Contact Limit and Origin Switches Integrated, high-precision, non-contact Hall-effect origin and limit switches protect your equipment and increase versatility in automation applications. Photonics packaging Quality control Semiconductor test equipment Metrology Disk drive test assemblies R&D M-501.1PD vertical stage XYZ combination of M-521.DD (204 mm), M-511.DD (102 mm) and M-501.1PD vertical stage M-501 dimensions (in mm)

Technical Data

Models	M-501.1PD	M-501.1DG	Units	Notes see link
Travel range	12.5	12.5	mm
Design resolution	0.024	0.005	µm	A3
Min. incremental motion	<0.1	<0.1	µm	A4
Unidirectional repeatability	0.1	0.1	µm
Max. velocity	12	1	mm/sec
Max. normal load capacity	5	10	kg	B1
Max. holding force (motor off)	20	100	N	B2
Encoder resolution	40960*	2048	Counts/rev.
Ballscrew pitch	1	1	mm/rev.
Gear ratio	80/26 (belt drive)	80/26 (belt drive); (28/12)4 : 1 »29.6:1 gearhead
Nominal motor power	17 **	3	W
Motor voltage range	0 to ±24	0 to ±12	V
Body material	Al	Al		L
Recommended motor controller	C-843, C-848, C-862	C-843, C-848, C-862		D2
* Ballscrew-mounted, interferometric, ultra-high-resolution direct encoder; ** ActiveDrive™ (integrated PWM servo-amplifier), 24 V power supply included

To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

M-501.1PD
Vertical Stage, 12.5 mm, ActiveDrive™ DC Motor (Includes Power Supply for Servo Amplifier)

M-501.1DG
Vertical Stage, 12.5 mm, DC Motor / Gearhead

Custom Designs for Volume Buyers