High-Resolution Micro-Translation Stages

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M-110.1
M-111.1
M-112.1
High-Resolution Micro-Translation Stages
  • 0.05 µm Minimum Incremental Motion
  • 5, 15 and 25 mm Travel Ranges
  • Velocity to 1.5 mm/sec.
  • Closed-Loop DC Motors and Stepper Motors
  • Integrated Hall-Effect Limit and Reference Switches





M-110, M-111 and M-112 are ultra-high resolution motorized translation stages providing linear motion of 5 to 25 mm in an extremely compact package. They feature a precision leadscrew with sub-micron resolution and precision linear ball bearings guaranteeing <0.5 µm straightness of travel.

Stepper and Servo Motors
Both drive options provide a cost effective solution for industrial and OEM environments. A miniature DC or stepper motor actuates motion via a backlash-compensated leadscrew / nut system and gearhead. To meet the most critical positioning demands, the DC motor is equipped with a high resolution encoder featuring resolution of 0.007 µm per count. The combination of the extremely low stiction / friction construction and high-resolution encoder allows for minimum incremental motion of 50 nanometers at speeds up to 1.5 mm/sec.

Non-Contact Limit and Reference Switches
To protect your investment, non-contacting Hall-effect limit and reference switches are installed. Each stage includes a 0.5 m cable with 15-pin sub-D connector and a 3 m extension cable. The connector on the DC-servo versions features integrated line drivers for cable lengths up to 10 meters between actuator and controller.

M-110, M-111 and M-112 can be combined to XY and XYZ systems for multiaxis alignment applications. A variety of add-on PiezoNanoAlignment units are also available see the "Photonics" section.
  • Photonics packaging automation
  • Fiber optic instrumentation
  • Fiber alignment
  • Metrology
  • Quality control
  • Test equipment
  • Micromachining
M-110.1DG micro-translation stage (battery for size comparison).

M-110.1DG micro-translation stage (battery for size comparison).


M-110, M-111 and M-112. Cable length: 500 mm, 15-pin sub-D connector with integrated encoder line drivers.

M-110, M-111 and M-112. Cable length: 500 mm, 15-pin sub-D connector with integrated encoder line drivers.


M-110, M-111, M-112 Z-mounting bracket, dimensions (in mm).

M-110, M-111, M-112 Z-mounting bracket, dimensions (in mm).


F-130 fiber alignment system consisting of an M-110 XYZ positioning system and a P-611 XYZ Piezo-NanoPositioning system. This combination can be operated by the C-880 controller or NI controllers (request our technote!)

F-130 fiber alignment system consisting of an M-110 XYZ positioning system and a P-611 XYZ Piezo-NanoPositioning system. This combination can be operated by the C-880 controller or NI controllers (request our technote!)


Technical Data
ModelsM-110.1DGM-111.1DGM-112.1DGM-110.12SM-111. 12SM-112.12SUnits

Travel range 5152551525mm

Design resolution0.0070.0070.0070.0120.0120.012µm

Min. incremental motion0.050.050.050.050.050.05µm

Unidirectional repeatability0.10.10.10.10.10.1µm

Backlash222222µm

Max. velocity11.51.5111mm/sec

Max. normal load capacity332332kg

Max. push/pull force101010101010N

Max. lateral force101010101010N

Encoder resolution204820482048---counts/rev.

Motor resolution---1200*1200*1200*steps/rev.

Drive screw pitch 0.4 0.40.4 0.40.40.4mm/rev.

Gear ratio28.44444:128.44444:128.44444:128.44444:128.44444:128.44444:1

Nominal motor power0.622***W

Motor voltage range0 to ±12 0 to ±120 to ±1224*24*24*V

Weight0.30.40.50.30.40.5kg

Recommended motor controllersC-843, C-848, C-862C-843, C-848, C-862C-843, C-848, C-862C-600, C-630C-600, C-630C-600, C-630

* 2-phase stepper, 24 V chopper voltage, max. 250 mA / phase, 1,200 microsteps with C-600, C-630 controllers


To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

M-110.1DG
Micro-Translation Stage, 5 mm, Closed-Loop DC Motor

M-111.1DG
Micro-Translation Stage, 15 mm, Closed-Loop DC Motor

M-112.1DG
Micro-Translation Stage, 25 mm, Closed-Loop DC Motor

M-110.12S
Micro-Translation Stage, 5 mm, 2-Phase Stepper Motor

M-111.12S
Micro-Translation Stage, 15 mm, 2-Phase Stepper Motor

M-112.12S
Micro-Translation Stage, 25 mm, 2-Phase Stepper Motor

Custom Designs for Volume Buyers

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