Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

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Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings

 

The product You were Looking for was moved Click Here for new Address M-014 Ultra-High-Precision, Side-Drive Stages with Magnetic-Kinematic Bearings Travel Range 25 mm Compact Side Drive Straightness/Flatness £ 0.3 µm PZT Drive for Scanning and Tracking Applications 0.1 µm Resolution w/ Closed-Loop DC Motor 5 nm Resolution with Closed-Loop PZT Drive 30 mm Ø Clear Aperture M-014 ultra-high-precision magnetically coupled stages use the force of integrated magnets to preload the bearing. This magnetic preload results in extremely uniform and smooth motion with minimum friction. Unlike conventional stages, where two bearings with limited parallelism guide the carriage (inducing runout and rotational errors) in M-014 stages, only one of the two linear bearings has a guiding function (V-groove) while the second bearing is for support only (U-groove). Ultra-Straight Motion The coupling between the stage and the space-saving side drive units (DC-motor drives, PZTs, micrometer drives) is not rigid but via magnets. This design allows only on-axis forces (drive direction) to be transmitted to the stage; torque-induced positioning errors induced by non-parallelism between the drive axis and the guiding axis are eliminated. M-014 is available in 6 versions: The basic version, the M-014.00, is equipped with a precision manual micrometer providing a sensitivity of 1 µm. M-014.D01 is equipped with a closed-loop DC-motor drive providing 0.1 µm minimum incremental motion. High-Resolution Piezo Option For both the manual and motorized version, closed-loop and open-loop PZT drives are available. They provide 5 nm minimum incremental motion over a travel range of 45 µm and allow for dynamic operation such as scanning andtracking. The closed-loop PZT drive provides repeatability of 90 nm (see the "PZT Actuators" section for further details on PZT actuators and recommended controllers). All stages can be cross stacked and combined with the M-053.10 (manual versions) and M-053.20 (motorized versions) Z-axis mounting bracket to provide multi-axis motion. Vertical use of the M-014 is only permitted with loads less than 0.5 kg. For vertical positioning with loads in excess of 0.5 kg we recommend M-126 stages (see link) and the 125.90 Z-axis mounting bracket. Upgrades M-014 stages without PZT or DC-motor drives can be upgraded at a later date (see ordering information). Microscopy Quality control Metrology,... M-014.00 translation stage M-014.D01 translation stage XY combination of two M-014.00 stages M-014.00 dimensions (in mm) M-014.DS1 dimensions (in mm)

Technical Data

Models	M-014.00	M-014.P0	M-014.PS	M-014.D01	M-014.DP1	M-014.DS1	Units	Notes see link
Travel range	25	25	25	25	25	25	mm
PZT fine travel range		45	45		45	45	µm
Min. incremental motion (PZT drive)	-	0.005	0.005	-	0.005	0.005	µm	A4
Repeatability (PZT drive)	-	-	0.09	-	-	0.09	µm
Design resolution (DC Motor)	-	-	-	0.0035	0.0035	0.0035	µm	A3
Min. incremental motion	1	1	1	0.1	0.1	0.1	µm	A4
Unidirectional repeatability	-	-	-	0.1	0.1	0.1	µm
Bidirectional repeatability	-	-	-	2	2	2	µm
Backlash	-	-	-	2*	2*	2*	µm
Straightness / flatness per 5 mm	0.1	0.1	0.1	0.1	0.1	0.1	µm
Straightness / flatness full travel	0.3	0.3	0.3	0.3	0.3	0.3	µm
Max. normal load capacity	5	5	5	5	5	5	kg	B1
Max. velocity	-	-	-	1	1	1	mm/sec
Max. push/pull force	15/5	15/5	15/5	15/5	15/5	15/5	N	B2
Max. lateral force	10	10	10	10	10	10	N
Drive	M-624 Micrometer	M-624 Micrometer	M-624 Micrometer	M-227.25 DC-Mike	M-227.25 DC-Mike	M-227.25 DC-Mike
PZT Drive	-	P-840.30	P-841.30	-	P-840.30	P-841.30		D1
Encoder resolution	-	-	-	2048	2048	2048	counts/rev.
Drive screw pitch	0.5	0.5	0.5	0.5	0.5	0.5	mm/rev.
Gear ratio	-	-	-	69.12:1	69.12:1	69.12:1
Nominal motor power	-	-	-	2	2	2	W
Motor voltage range	-	-	-	0 to ±12	0 to ±12	0 to ±12	V
Weight	0.72	0.78	0.8	0.98	1.04	1.06	kg
Body material	Al, St	Al, St	Al, St	Al, St	Al, St	Al, St		L
Recommended PZT controller (codes explained see link)	-	A, C, G	D, H	-	A, C, G	D, H
Recommended motor controller	-	-	-	C-843, C-848, C-862	C-843, C-848, C-862	C-843, C-848, C-862		D2
* gearhead

To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

M-014.00
Translation Stage, 25 mm

M-014.P0
Translation Stage, 25 mm, Manual + PZT Drive

M-014.PS
Translation Stage, 25 mm, Manual + Closed-Loop PZT Drive

M-014.D01
Translation Stage, 25 mm, DC-Motor Drive

M-014.DP1
Translation Stage, 25 mm, DC-Motor + PZT Drive

M-014.DS1
Translation Stage, 25 mm, DC-Motor + Closed-Loop PZT Drive

Upgrades

M-014.U0
Upgrade Kit with Open-Loop PZT Drive

M-014.US
Upgrade Kit with Closed-Loop PZT Drive

M-014.UD
Upgrade Kit with DC-Motor Drive and Limit Switches (Factory Installed)

Custom Designs for Volume Buyers