QuickScan Voice-Coil Scanning System
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QuickScan Voice-Coil Scanning System
Technical DataModel V-102 Travel 5 mm Min. Incremental Motion 0.1 μm (noise: m 50 nm p-p) Repeatability 0.2 μm Velocity up to 150 mm/sec Settling time X (top): 15 msec (10%); 25 msec (1%); 50 msec (0.25%); Y: 30/45/75 msec (@ 75 g load) Linearity <0.2% Displacement sensor LVDT (linear variable differential transformer) Controller Digital PID controller 32-bit processor Waveforms sine, triangle, saw tooth, step; internally generated, amplitude and frequency programmable Interfaces Digital: IEEE 488, RS-232 analog: commanded position: 0.to +5 V, internally 12-bit A/D converted, 3.33 kHz actual position output: -10 to 10 V, 12-bit D/A converted, 10 kHz sample rate Software Windows™ operating program, terminal software MTBF > 20000 hours
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V-102.1L QuickScan Voice Coil Scanning System: Controller (V-101.02) and X-Axis Stage
V-102.2L QuickScan Voice Coil Scanning System: Controller (V-101.02) and XY-Axis Stage
V-101.02 QuickScan Controller
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