M-850 | HEXAPOD Six-Axis Parallel-Kinematics MicroMotion Robot |
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- Works in any Orientation
- No Moving Cables, for Improved Reliability, Ease of Setup and Reduced Friction
- Load Capacity 200 kg Vertically, 50 kg Random Orientation
- Heavy-Duty, Ultra-High-Resolution Bearings for 24/7 Applications
- Repeatability ±1 µm (Z) ±2 µm (Six-Axis Moves)
- To 0.005 µm Design Resolution
- Significantly Smaller and Stiffer Package than Conventional Multi-Axis Positioners Provides Better Dynamics & Throughput
- True Path Control
- Linear and Rotary Multi-Axis Scans
- PivotAnywhere™ Virtualized Center of Rotation (Pivot Point) Set by Software
- Sophisticated, User-Friendly Software and Control Electronics
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The M-850 MicroMotion robot is based on PI's ultra-high-resolution hexapod technology developed for aligning optics in astronomical telescopes a decade ago. It provides six degrees of freedom with 1 µm minimum incremental motion (design resolution of individual struts is 0.005 µm for the M-850.11) and allows the user to define the center of rotation (pivot point) anywhere inside or outside the system envelope by one simple software command. Rotation about that pivot point can be specified (with microradian resolution) for any axis of rotation.
The M-850 Hexapod is of great value for any complex, high-accuracy positioning and alignment task where independent motion in six degrees of freedom is required.
Working Principle
The M-850 Hexapod consists of six struts which expand and contract between a bottom and a top platform. Similar in geometry to positioning systems used in flight simulators, it is the first commercially available system to introduce this design to sub-micron-resolution positioning.
The use of extremely stiff and accurate components for all moving parts, such as joints, bearings and drive screws, results in an unusually high natural frequency (500 Hz @ 10 kg load). Because the six Hexapod struts and the six orthogonal coordinates (X, Y, Z, qX,qY,qZ) are all interrelated, the twelve strut-end universal joints must guarantee zero backlash and zero runout. To meet this challenge in Hexapod construction, CAD, FEA (finite element analysis) and laser vibrometry were employed for system optimization.
In contrast to conventional multi-axis positioning systems, where a change in one coordinate also affects the pivot point and the other coordinates, the M-850 system automatically manages its path planning and the coordination of its six motors and minimizes runout and unwanted motion.
PivotAnywhere™ Virtualized Rotation Capability
A highly useful feature is the M-850's PivotAnywhere™ fully virtualized rotation capability. Hexapod motion is not defined by fixed bearings, but rather by sophisticated real-time 6-space control algorithms. You can define any point in space to be the center of rotation with a single software command. This is ideal for any kind of for angular alignment. All commands and operations are high-level, using human-readable units (mm, degrees) and coordinates (X, Y Z, qX, qY, qZ).
Open Interface
Control of the M-850 is facilitated by the controller's open interface architecture which provides a variety of high-level commands for minimized communication overhead & bandwidth. The user-friendly software allows direct six-axis positioning by entering the X,Y,Z and qX,qY,qZ coordinates and the position of the pivot-point using human-readable units (mm, degrees). The software also allows easy programming of motion sequences. A smaller Hexapod with higher resolution is available as product number F-206 (see link in the "Photonics" section).
Automated Optical Alignment
The M-850 can be upgraded with an integrated photometer card (infrared or visible light) for optical alignment and built-in automatic alignment procedures, similar to the compact F-206 HexAlign™ photonics alignment robot (option F-206.IRU or F-206.00U, see link). The F-361 high-speed, absolute measuring photometer (see link) can also be used with the M-850.
|  | - Alignment of Optics, Electron Guns, Lasers, or Other Directed-Energy Sources
- Microwave Antenna Test Beds
- Surgical Robots
- Micromachining
- Micromanipulation (Life Sciences)
- X-ray Diffraction Measurements
- Semiconductor Handling Systems
- Tool Control for Precision Machining & Manufacturing
- Fine Positioning of Active Secondary Mirror Platforms in High-Resolution Telescopes
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M-850 Hexapod 6D MicroMotion Robot
Optical device scan with M-850.50 and F-206.IRU optical power meter
Custom Hexapod for brain surgery. Photo courtesy of IPA
F-206 "Micro-Hexapod" (see link in the "Photonics" section for details)
Custom "6+3" Hexapod with additional struts providing independant position feedback and M-531 translation stage for extended Z-travel.
Custom water-resistant Hexapod
M-850 Hexapod, dimensions (in mm)
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