PI Ultra Precision Motion Control / Linear Slide / Piezo Stage: Datasheets: E-710 High-Speed Digital NanoAutomation<sup>®</sup> Piezo Controllers ; PI: Leader in Nanopositioning, Piezo Technology, Piezo Stages, Piezo Motor

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E-710

High-Speed Digital NanoAutomation^® Piezo Controllers

For Piezo NanoPositioners with Capacitive Feedback Sensors
3-, 4- & 6-Channel Versions
32-Bit Digital Filters
Polynomial Linearization
Coordinate Transformation for Parallel Kinematics / Parallel Metrology Systems
Optional Dynamic Digital Linearization (Firmware Option) Improves Scanning Linearity
AutoCalibrate Function for Easy Controller /Stage Interchangeability
Fast RS-232 and IEEE 488 Interfaces
Optional High-Speed Parallel Port Interface
Extensive Software Support

E-710 digital piezo controllers/ drivers are the most advanced and flexible controllers for piezo nanopositioning and scanning stages on the market. Based on powerful 32-bit DSPs (digital signal processor) they control up to six-degrees of freedom with integrated power amplifiers for multilayer PZT drives (-20 to 110 V) and signal conditioning electronics for two-plate capacitive position sensors. E-710 controllers represent a major advance over conventional multi-axis controllers because the sensor and output channels of two or more axes can participate in an internal coordinate transformation for multi-axis parallel-kinematics positioning systems with parallel-motion metrology, e.g. the P-500 series see link.

Parallel Motion Metrology "Sees" all Controlled Degrees of Freedom Simultaneously
Parallel-kinematics nanopositioning systems with parallel-metrology position feedback are superior to stacked or nested multi-axis positioning systems. They allow active trajectory control, automatic crosstalk and runout compensation and provide direct, non-contacting position information, measuring motion exactly where it matters (rather than measuring the strain in the drive system, a technique common in lower-precision positioning systems relying onthe feedback of piezo resistive sensors).

Integrated Linearization Systems
E-710-controlled nanopositioning systems boast outstanding linearity, achieved by PI's proprietary ILS (Integrated Linearization System) and additional digital polynomial linearization. The ILS, part of the E-710's capacitive position sensor signal conditioning circuitry, compensates for influences caused by non-parallelism of the sensor plates. The digital poly-nomial linearization is calibrated for each individual nanopositioning system and can improve linearity to 0.001% over the full travel range.

Dynamic Digital Linearization

System Analysis-Advanced Software Tools
The E-710 comes with the NanoCapture software featuring advanced functions for measuring-system response, step-and-settle and Bode plots. All positioning commands use standard units such as micrometers or microradians, for easy programming. In addition, all control parameters are non-volatile, user-accessible and can be easily modified and optimized. Fully programmable low-pass & notch filters round out the E-710.

Integrated Wave Generator & Look-up Table
The implementation of a wave generator for all E-710 models allows the synchronous driving of several axes with a mathematical function or with a user-defined random signal stored in a lookup table containing 65,535 points. Programmable trigger inputs and outputs facilitate synchronization with external events.

Communication / Interfaces
E-710 controllers are equipped with fast RS-232 and IEEE 488 interfaces. The optional parallel port I/O (PIO) interface allows the fastest possible position setting/reading (20,000 positions per second bypassing the command parser).

Dynamic Digital Linearization Improves Scanning Linearity up to 3 Orders of Magnitude
Control theory predicts that conventional PID (proportional integral derivative) servo motion controllers exhibit phase lag and tracking errors in dynamic operation (due to the fact that a PID controller needs to see an error first before a reaction occurs, and also due to the nonlinear nature of PZT material). Depending on the controller settings and specs of the nanopositioning system driven, tracking errors (the difference between the commanded position and actual position) can reach double-digit percentage values even at moderate scanning rates. Consequently, scanning stages often cannot be driven at the desired rates, or the acquired data has poor linearity.

The new E-710.SCN Dynamic Digital Linearization upgrade (standard for the E-710.6CD 6-axis controller, optional for the 3- and 4-channel versions) solves this problem. This PI-exclusive technology is a breakthrough for scanning applications, reducing phase lag and nonlinearity to indiscernible levels, even with high-frequency dynamic actuation under load. The effect is an improvement in linearity (and usable bandwidth) of up to three orders of magnitude, resulting in significantly increased throughput. Dynamic Digital Linearization works both in single-axis and multi-axis applications (see graphs).

Extensive Software Support

The E-710 controller comes with a variety of software tools as well as LabView^® drivers and DLL's for easy setup, system analysis and integration.

E-710.6CD 6-axis digital piezo controller shown with custom Super Invar 6-DOF piezo flexure NanoPositioning stage.

E-710 data acquisition and analysis functions (Bode plots, etc.) help optimize performance of NanoPositioning systems.

Triangular scanning signal at 312 Hz. There is a significant difference (2.6 µm max.) between target and real position with the conventional PID motion controller.

Triangular scanning signal at 312 Hz, with the E-710 with dynamic digital linearization. The difference between the target positon and the actual motion is indiscernible. The maximum error is only 7 nanometers.

Elliptical scan in a laser micro-drilling application with XY piezo scanning stage, conventional controller, 60 msec/rev. The outer curve ellipse describes the target position, the inner ellipse shows the actual motion at the stage.

Same scan as before, with dynamic digital linearization. Target and actual data can hardly be discerned.

Model	E-710.3CD	E-710.4CD / E-710.4CL / E-710.P3D / E-710.P4D / E-710.P4L	E-710.6CD

Function	Digital NanoAutomation^® PZT controller and power amplifier	Digital NanoAutomation^® PZT controller and power amplifier	Digital NanoAutomation^® PZT controller and power amplifier

Axes	3	4	6

Sensor	Capacitive sensors	Capacitive sensors	Capacitive sensors

Processor	DSP 32-bit floating point, 33 MHz	DSP 32-bit floating point, 33 MHz	2 x DSP 32-bit floating point, 33 MHz

Sampling interval	50 µs (sensor), 200 µs (servo-loop, 4 axes)	50 µs (sensor), 200 µs (servo loop, 4 axes)	40 µs (sensor), 200 µs (servo-loop, 6 axes)

Effective Resolution DAC	20-bit	20-bit	20-bit

Maximum output power	25 W / channel	25 W / channel	25 W / channel

Average output power	6 W / channel	6 W / channel	6 W / channel

Peak output current 20 ms	60 mA / channel	60 mA / channel	60 mA / channel

Current limitation	Short-circuit proof	Short-circuit proof	Short-circuit proof

Output voltage	-20 to +110 V	-20 to +110 V	-20 to +110 V

PZT voltage output sockets	3-channel sub-D, special	3-ch. + 1ch. sub-D, special (models E-710.P3D only), 4x 1-ch. Sub-D, special (models E-710.4CD and E-710.P4D only)	LEMO ERN.00.250.CTL (E-710.xxL only) 2x 3-channel sub-D, special

Sensor sockets	3-channel sub-D, special	3-ch. + 1ch. sub-D, special (models E-710.P3D only), 4x 1-ch. Sub-D, special (models E-710.4CD and E-710.P4D only) LEMO PSA.00.250CTAC22 (models E-710.xxL only)	2x 3-channel sub-D, special

Interfaces	RS-232 and IEEE 488	RS-232 and IEEE 488, all models (for ASCII command structure) PIO (models E-710.xxP only)	RS-232 and IEEE 488, all models (for ASCII command structure)

Software	PZT Control, NanoCapture, LabView^® Drivers, DLLs	PZT Control, NanoCapture, LabView^® Drivers, DLLs	PZT Control, NanoCapture, LabView^® Drivers, DLLs

Dimensions	450 x 105 x 390 mm	450 x 105 x 390 mm	450 x 105 x 390 mm

Weight	7 kg	7 kg	7 kg

Power consumption (max)	60 W	60 W	60 W

Operating voltage	90-120 or 220-264 VAC, 50-60 Hz	90-120 or 220-264 VAC,50-60 Hz	90-120 or 220-264 VAC, 50-60 Hz