PIHera^® Compact Long-Range Piezo Nano-Translation Stages

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The product You were Looking for was moved Click Here for new Address P-620.1CD P-621.1CD P-622.1CD P-625.1CD PIHera® Compact Long-Range Piezo Nano-Translation Stages Travel to 500 µm Compact Design Resolution < 1 nm Low Cost New Longlife Piezo Drive Capacitive Feedback (Closed-Loop) 0.01 % Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions P-620.1CD - P-625.1CD PIHera® systems are piezo nano-translation stages featuring travel ranges from 50 to 500 µm. Despite the increased travel ranges the units are extremely compact, while providing sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system which also offers excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range) and rapid settling. Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors Applications such as optical path control in interferometry, or sample positioning in microscopy require long travel ranges with nanometer positioning accuracy. PIHera® offers travel ranges to 500 µm. The closed-loop versions are equipped with non contact, zero friction, direct-measuring two-plate capacitve position sensors. Unlike conventional indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator / guiding system. Capacitive sensors are absolute-measuring high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01 % and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability. Rapid Positioning over Long Ranges One of the advantages of PIHera® stages over (linear) motor driven positioning stages is the rapid response to motion inputs and fast and precise settling behavior. The P-622.1CD, for example, can settle to an accuracy of 10 nm in only 30 msec after a 10 µm step (other PI stages provide even faster response)! Dynamic Digital Control for Best Scanning Linearity Use our new digital control electronics with the dynamic digital control option for the highest linearity in scanning applications. These systems virtually eliminate tracking errors and permit use of the entire travel range with high dynamic accuracy in the nanometer range. Increased Lifetime with New Piezoceramic Technology The PIHera® stage drive units are based on our P-885 PICMA® low-voltage multilayer piezo ceramics. These newly designed and highly optimized drives are more robust than conventional piezo actuators, and feature superior lifetime in dynamic and static applications. Because guidance and sensors are all frictionless and maintenance-free, PIHera® systems achieve exceptional levels of reliability. (Dynamic) interferometry Microscopy Nanopositioning Biotechnology Quality assurance Semiconductor technology Multi-Axis Versions, X, XY, Z, XYZ PIHera® stages are also available in XY and Z versions. See see link and see link. XZ and XYZ combinations can be assembled (no adapters required). P-622.1CD, P-621.1CD, P-620.1CD and P-625.1CD PIHera® piezo nano-translation stages, from left to right (credit card for size comparison). Dimensions of the P-62x.1CD/.1CL/.10L in mm, decimal places separated by commas. Rapid scanning motion of a P-621.1CD (commanded rise time 5 ms) with the E-710 controller and DDL option. Digital Dynamic Linearization virtually eliminates the tracking error (<20 nm) during the scan. The improvement over a classical PID controller is up to 3 orders of magnitude, and grows with the scanning frequency. Position repeatability data of a 100 µm PIHera® stage show the exceptional precision of these nanopositioning devices. PIHera® XYZ combination

Technical Data

Models	P-620.1CD	P-621.1CD	P-622.1CD	P-625.1CD	P-62x.1CL	P-62x.10L	Units
Active axes	X	X	X	X	X	X
Closed-loop travel	50	100	250	500	same as CD version	-	µm
Min. open-loop travel -20 to 120V	60	120	300	600	same as CD version	same as CD version	mm
Integrated feedback sensor	capacitive	capacitive	capacitive	capacitive	capacitive	-
Open-loop resolution*	0.1	0.2	0.4	0.5	same as CD version	same as CD version	nm
Closed-loop resolution*	0.2	0.4	0.7	1.4	same as CD version	-	nm
Closed-loop linearity (typ.)	0.01	0.01	0.01	0.01	0.01	-	%
Stiffness	0.42	0.35	0.15	0.1	same as CD version	same as CD version	N/µm
Push/pull force capacity (in X)	10/5	10/8	10/8	10/8	same as CD version	same as CD version	N
Max. Load	10	10	10	10	10	10	N
Lateral force limit	10	10	10	10	10	10	N
Tilt (qY, qZ) (typ.)	3	3	3	6	same as CD version	same as CD version	µrad
Electrical capacitance	0.75	1.5	3.0	6.0	same as CD version	same as CD version	µF ±20%
Unloaded resonant frequency	1240	800	400	215	same as CD version	same as CD version	Hz ±20%
Resonant frequency @ 20 g load	550	520	340	180	same as CD version	same as CD version	Hz ±20%
Resonant frequency @ 120 g load	260	240	185	110	same as CD version	same as CD version	Hz ±20%
Operating temperature range	-40 to 120	-40 to 120	-40 to 120	-40 to 120	-40 to 120	-40 to 150	°C
Voltage and sensor connection	Sub-D special connector	Sub-D special connector	Sub-D special connector	Sub-D special connector	Voltage: LEMO FFA.00.250 male; sensor: 2xLEMO FFA.00.250 female	Voltage: LEMO FFA.00.250, no sensor
Weight (with cables)	108	158	195	238			g ±5%
Body material	Al	Al	Al	Al	Al	Al
Recommended controller	E-500 System, E-665, E-750 (digital), E-710 (digital)				E-500 System, E-610
*Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 controller.

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P-620.1CD
PIHera^® Nanopositioning System, 50 µm, Capacitive Sensors, Sub-D Connector

P-620.1CL
PIHera^® Nanopositioning System, 50 µm, Capacitive Sensors, LEMO Connectors

P-620.10L
PIHera^® Nanopositioning System, 50 µm, Open-Loop, LEMO Connector

P-621.1CD
PIHera^® NanoPositioning System, 100 µm, Capacitive Sensors, Sub-D Connector

P-621.1CL
PIHera^® NanoPositioning System, 100 µm, Capacitive Sensors, LEMO Connectors

P-621.10L
PIHera^® NanoPositioning System, 100 µm, Open-Loop, LEMO Connector

P-622.1CD
PIHera^® NanoPositioning System, 250 µm, Capacitive Sensors, Sub-D Connector

P-622.1CL
PIHera^® NanoPositioning System, 250 µm, Capacitive Sensors, LEMO Connectors

P-622.10L
PIHera^® NanoPositioning System, 250 µm, Open-Loop, LEMO Connector

P-625.1CD
PIHera^® NanoPositioning System, 500 µm, Capacitive Sensors, Sub-D Connector

P-625.1CL
PIHera^® NanoPositioning System, 500 µm, Capacitive Sensors, LEMO Connectors

P-625.10L
PIHera^® NanoPositioning System, 500 µm, Open-Loop, LEMO Connector

Vacuum versions available! XY & Z Versions: See separate Datasheets.

Custom sizes & specifications available!