Designs

The PI Product / Information You were Looking for
was moved to a new location

 

Click Here for new Address of

Designs

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 
 















PZT Actuators, Piezo Actuator Precision Piezoelectric Flexure NanoPositioning Stage Fast Steering Mirror, Piezo Active Optics/Steering Motors Tutorial: Piezo, Piezoelectrics in Positioning Capacitive Positions Sensor, Capacitance Sensor Ultra Precision Motion Control: Piezo Driver, Control Electronics MicroPositioning Stage, / Hexapod Systems Photonics Packaging Systems Precision Motion Control, Motor Controller Index Products Overview

Go to Homepage


The product You were Looking for was moved

Click Here for new Address

Designs
 


Single-Axis Tilt Platforms

Single-Axis Tilt Platforms (θuX) can be designed in two ways:
I. Single-Flexure, Single-Actuator Tilt Platform
Examples: S-224 and S-226, see link

The platform is supported by one flexure and pushed by one linear piezo actuator (see Fig. 1). The flexure determines the pivot point and doubles as a preload for the PZT actuator.

The advantages of the single-flexure, single-actuator design are the straightforward construction and low costs. If angular stability over a wide temperature range is a critical issue, the differential piezo drive is recommended.


II. Differential-Piezo-Drive Tilt Platform
Examples: Custom designs.
This design features two PZT linear actuators (operated in push/pull mode) supporting the platform (see Fig. 2). The case is machined from one solid metal block with FEA-designed (finite element analysis) wire-EDM-cut (electric discharge machining) flexures. The flexures provide for zero friction, zero stiction and excellent guiding accuracy.

The differential design exhibits excellent angular stability over a wide temperature range. With this arrangement, temperature changes only affect the vertical position of the plat-form (piston motion) and have no influence on the angular position. When the operating- voltage is removed, the plat form returns to the center position.
Several single and multi-axis designs are available.


Multi-Axis Tilt Platforms

PI offers two versions of multi-axis tilt platforms:
I. Triple-Piezo-Drive Tip/Tilt Platform
Examples: S-315 and S-316, see link
The platform is supported by three piezo actuators spaced at 120° intervals. Because expansion of an individual PZT actuator affects both θuX
and θuY rotation, external coordinate transformation (software or hardware) is required to allow platform position commands in θuX and θuY coordinates. See the equations and Fig. 3 for details.

The triple-piezo-drive has another advantage. In addition to tilt motion, it allows active vertical control (piston motion) of the platform - an important feature for interferometric applications and correction of path length errors. Also, the design allows for a central clear aperture, ideal for transmitted-light applications.

Like the differential drives, the triple-piezo-actuator design exhibits excellent angular stability over a wide temperature range. With this arrangement temperature changes only affect the vertical position of the platform (piston motion) and have no influence on the angular position.

II. Differential-Piezo-Drive Tip/Tilt Platform
Examples: S-330 and S-340, see link, see link.
The platform is supported by four piezo actuators (two pairs) spaced at 90° intervals. Each actuator pair is operated as a unit in push/pull mode.

The differential design exhibits excellent angular stability over a wide temperature range. Here too, temperature changes only affect the vertical position of the platform (piston motion) and have no influence on the angular position. After the operating voltage is removed, the platform returns to the center position.


Fig. 1. Single-flexure, single-piezo actuator tilt platform design

Fig. 1. Single-flexure, single-piezo actuator tilt platform design


Fig. 2. Design of a differential-piezo-drive tilt platform

Fig. 2. Design of a differential-piezo-drive tilt platform


Fig. 3. Triple-Piezo-Drive: A, B, C is the linear displacement of the corresponding piezo actuator. <br>a = [2A - (B+C)] / 2a <br>b = (B-C) / b<br>z = (A+B+C) / 3<br><span class=style62>Example:<br></span><span class=style61>S-315 Tip/Tilt Platform (<a href=prdetail.php?secid=3-10>see link</a>). <br><font face=symbol>Æ</font> = 13.9 mm<br>a = 10.4 mm<br>b = 12.0 mm<br>A, B, C 0 to 12 μm<br><br><br></s

Fig. 3. Triple-Piezo-Drive: A, B, C is the linear displacement of the corresponding piezo actuator.
a = [2A - (B+C)] / 2a
b = (B-C) / b
z = (A+B+C) / 3
Example:
S-315 Tip/Tilt Platform (see link).
Æ = 13.9 mm
a = 10.4 mm
b = 12.0 mm
A, B, C 0 to 12 μm





Piezo Nano-Actuators · Low Inertia Hexapod Piezo · Piezoelectric Material · Capacitance Sensors · Ultra-Precision Motion Control, Flexure Nano-Positioning Stage · Precision Nanopositioner · Parallel Kinematic · · Micropositioners · PI Ceramic Piezoceramic Material Nanoautomation · PI-USA · Nanopositioning-Systems PDF Catalog · Hexapod · Micropositioning · Hexapod PIFOC® Piezo Microscopy Focus Scanner · Ultrasonic Piezo Motors, Piezomotor · Multilayer Piezo Lifetime · Piezo Systems, Piezo Actuator