Ultra-Fast Piezo Tip/Tilt Platforms

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S-330
Ultra-Fast Piezo Tip/Tilt Platforms
  • Sub-µrad Resolution
  • For Mirrors to 50 mm Æ
  • Closed-Loop Versions
  • Differential Design for Excellent Temperature Stability
  • 4 mrad Optical Beam Deflection






S-330 piezo tip/tilt platforms are fast and compact tilt units, providing precise angular movements of the top platform in two orthogonal axes. The tip/tilt range is 2 mrad (equivalent to 4 mrad optical beam deflection) with sub-µrad resolution. Closed-loop versions are available for highest accuracy and repeatability. S-330 systems are designed for mirrors up to 50 mm diameter and have outstanding angular stability over a wide temperature range. To match the CTE (coefficient of thermal expansion) of Zerodur glass, the S-330 is equipped with an invar top platform.

Working Principle
S-330 tilt Platforms are equipped with two pairs of low-voltage piezoelectric linear drives (0 to 100 V) operating as a unit in push/pull mode ( figure page see link for schematic diagram). The stainless steel case is equipped with an integrated, FEA-modeled (finite element analysis) circular flexure featuring zero stiction, zero friction and exceptional guiding precision. In open-loop operation, the platform angle roughly corresponds to the drive voltage (see link in the "Tutorial" section for behavior of open-loop piezos). The open-loop model is ideal for applications where the position is controlled by an external loop, based on data provided by a sensor (e.g. PSD quad cell, CCD chip, ...).
The closed-loop version is equipped with two pairs (one per axis) of strain gauge sensors operated in a bridge circuit for ultra-high resolution and angular stability. They provide sub-µrad resolution and repeatability (with PI control electronics).
  • Image stabilization
  • Laser beam stabilization
  • Beam switching
  • Adaptive optics systems
  • Laser beam steering & scanning
  • Correction of polygon scanner errors.
S-330 Tip/Tilt Platform

S-330 Tip/Tilt Platform


S-330 dimensions (in mm)

S-330 dimensions (in mm)


S-330.2SL cable configuration

S-330.2SL cable configuration


S-330 schematic diagram

S-330 schematic diagram


Technical Data
ModelsS-330.30S-330.2SLUnitsNotes see link

Active axesqX,qY qX,qY

Open-loop tilt angle @ 0 to 100 V 2 (±1)*2 (±1)*mrad ±20%A2

Closed-loop tilt angle ³-±1mrad A3

Integrated feedback sensor-4 x strain gaugeB

Closed-loop / open-loop ** resolution £- / 0.050.1 / 0.05µradC1

Closed-loop linearity (typ.)-±0.2%

Full-range repeatability (typ.)-±2µradC3

Electrical capacitance 3.6 / axis 3.6 / axisµF ±20%F1

*** Dynamic operating current coefficient (DOCC)0.22 / axis 0.22 / axisµA/(Hz x µrad)F2

Resonant frequency (f0) without mirror 3.33.3kHz ±20%G2

Resonant frequency w/ Æ 25 x 8 mm glass mirror2.42.4kHz ±20%G3

Distance, pivot point to platform surface (T)66mm

Platform moment of inertia15301530g·mm2

Operating temperature range- 20 to 80- 20 to 80°CH2

Voltage connection 3 x VL, 2 m cable 3 x VL, 2 m cable J1

Sensor connection -1 x L, 2 m cable J2

Weight (w/o cables)200200g ±5%

Material (case/platform)N-S / IN-S / IL

Recommended amplifier/controller (codes explained see link) G, CH, D

* Mechanical tilt, optial beam deflection is twice as large. Special version with 10 mrad a vaillable on request.
** Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.
*** -Dynamic Operating Current Coefficient in µA per hertz and µrad. Example: Sinusoidal scan of 100 µrad at 10 Hz requires approximately 0.22 mA drive current.

To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

S-330.2SL
qXqY Piezo Tip/Tilt Platform 2 mrad, Closed-Loop

S-330.30
qXqY Piezo Tip/Tilt Platform 2 mrad

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