Ultra-Fast Multi-Axis Tip / Tilt Platforms and Z Positioners

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The product You were Looking for was moved Click Here for new Address S-310- S-316 Ultra-Fast Multi-Axis Tip / Tilt Platforms and Z Positioners 10 mm Clear Aperture Triple-PZT-Actuator-Supported Platform Tilt Range up to 1.2 mrad Piston Movement up to 12 µm Closed-Loop Versions For Optics, Mirrors or Other Components S-310 to S-316 multi-axis tip/tilt platforms and Z-positioners are fast and compact units based on the triple-piezo-drive-supported platform design (see link for details and equations). They offer piston movement up to 12 µm and tilt movement up to 1.2 mrad (±600 µrad) with sub-msec response and settling. The S-310 to S-316 systems are designed for mirrors and optics up to 25 mm diameter; the clear aperture is ideal for transmitted-light applications. The units can be mounted in any orientation. In open-loop operation, the vertical position / platform angle roughly corresponds to the drive voltage (see the "Tutorial" section for behavior of open-loop piezos). The S-310 to S-315 open-loop models are ideal for applications where the position is controlled by an external loop based on data provided by a sensor (e.g. PSD quad cell, CCD chip, ...). The S-316.10 closed-loop version allows absolute position control, high linearity and repeatability basedon the internal ultra-high-resolution feedback sensor. Working principle The S-310 to S-316 tilt platforms are equipped with three low-voltage (0 to 100 V) piezoelectric linear drives (see link for details and equations). Five different versions are available: S-310.10 S-314.10 Open-loop Z-platforms; all three piezo linear actuators are electrically connected in parallel, providing vertical positioning (piston movement) of the top ring. Only one drive channel is required. The three piezo actuators are individually matched for equal displacement, providing straight motion with tilt errors of less than 70 µrad over the complete range. S-311.10 S-315.10 Open-loop Z, tip/tilt positioners; all three piezo linear actuators can be driven individually (or in parallel) by a three-channel amplifier. Vertical (piston movement) positioning and tip/tilt positioning is possible. S-316.10 Closed-loop Z, tip/tilt positioner. All three piezo linear actuators are equipped with strain gauge position feedback sensors and can be driven individually (or in parallel) by a three-channel amplifier/position servo-controller. Vertical positioning (piston movement) and tip/tilt positioning is possible. The integrated position feedback sensors provide sub-µrad resolution and repeatability (with PI control electronics). Image stabilization Beam switching Interferometry Optical filters Laser cavity tuning Laser beam stabilization Laser beam steering & scanning. S-310.10, S-316.10 S-310 - S-316 dimensions (in mm) S-316 cable configuration

Technical Data

Models	S-310.10	S-314.10	S-311.10	S-315.10	S-316.10	Units	Notes see link
Active axes	Z	Z	Z,θX, θY	Z,θX, θY	Z,θX, θY
* Open-loop tilt angle @ 0 to 100 V	-	-	600 (±300)	1200 (±600)	1200 (±600)	µrad ±20%
* Closed-loop tilt angle ³	-	-	-	-	1200 (±600)	µrad	A3
Open-loop linear travel @ 0 to 100 V	6	12	6	12	12	µm ±20%	A5
Closed-loop linear travel ³	-	-	-	-	12	µm	A6
Integrated feedback sensor	-	-	-	-	3 x strain gauge		B
Closed-loop *** angular resolution £	-	-	-	-	±0.05	µrad	C1
Closed-loop / open-loop *** linear resolution £	- / 0.1	- / 0.2	- / 0.1	- / 0.2	0.2 / 0.4	nm	C1
Stiffness (Z)	20	10	20	10	10	N/µm ±20%	D1
Electrical capacitance	0.7	1.4	3 x 0.23	3 x 0.45	3 x 0.45	µF ±20%	F1
** Dynamic operating current coefficient (DOCC)	15	15	3 x 5	3 x 5	3 x 5	µA/(Hz x µm)	F2
Unloaded resonant frequency (f0)	9.5	5.5	9.5	5.5	5.5	kHz ±20%	G2
Resonant frequency w/Æ 15 x 4 mm glass mirror	6.5	4.4	5.5	4.1	4.1	kHz ±20%	G3
Resonant frequency w/Æ 20 x 4 mm glass mirror	6.1	4.2	4.4	3.4	3.4	kHz ±20%	G3
Distance, pivot point to platform surface (T)	-	-	5	5	5	mm
Platform moment of inertia	-	-	150	150	150	gmm²
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	1 x VL, 2 m cable	1 x VL, 2 m cable	3 x VL, 2 m cable	3 x VL, 2 m cable	3 x VL, 2 m cable		J1
Sensor connection	-	-	-	-	3 x L, 2 m cable		J2
Weight (w/o cables)	45	55	45	55	55	g ±5%
Material (case / platform)	N-S / N-S	N-S / N-S	N-S / N-S	N-S / N-S	N-S / N-S		L
Recommended amplifier/controller (codes explained see link)	G, C	G, C	G, C	G, C	H, D
* For maximum tilt range, all three piezo actuators must be biased at 50 V. Linear travel and tilt angle are interdependent. The values quoted here refer to pure linear / pure angular motion. See triple-piezo-drive tilt platform equation see link for more information. ** Dynamic Operating Current Coefficient in µA per hertz and µm (per actuator). Example S-314.10: Sinusoidal scan of 10 µm at 10 Hz requires approximately 1.5 mA drive current. For tilt calculation, calculate power requirement for the individual actuators and use triple-piezo-drive tilt platform equation see link. *** Resolution of PZT tip/tilt platforms is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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S-310.10
Vertical Piezo Positioner with Clear
Aperture, 6 µm

S-311.10
Multi-Axis Piezo Tip/ Tilt Platform with
Clear Aperture, 600 µrad, 6 µm

S-314.10
Vertical Piezo Positioner with Clear
Aperture, 12 µm

S-315.10
Multi-Axis Piezo Tip/Tilt Platform with
Clear Aperture, 1200 µrad, 12 µm

S-316.10
Multi-Axis Piezo Tip/Tilt Platform with
Clear Aperture, 1200 µrad, 12 µm,
Closed-Loop

Custom Designs
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