PIMars Multi-Axis Piezo Scanning- and NanoPositioning Stages

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The product You were Looking for was moved Click Here for new Address P-560 PIMars Multi-Axis Piezo Scanning- and NanoPositioning Stages Single-Module, Parallel-Kinematics Design Parallel Metrology / Capacitive Feedback for Nanometer Resolution Low Out-of-Plane Motion To 300 x 300 x 300 µm Travel Range 66 x 66 mm Clear Aperture Versions to 6-DoF Ultra-fast XY and XYZ Versions Available Ultrahigh Vacuum Versions up to 10-9 hPa Available Invar, Super-Invar and Titanium Versions Available Large Variety of Models and Options PIMars piezo stages are fast and highly accurate multi-axis scanning and nanopositioning systems that are offered in a large variety of travel ranges. Derived from the XYZ standard versions (including high-speed and vacuum versions) custom designs to 6 degrees of freedom are available on request. PIMars piezo stages are equipped with capacitive feedback sensors for highest linearity, accuracy and repeatability, in the nanometer and sub-nanometer range, and provide a positioning and scanning range of up to 300 x 300 x 300 µm. Higher Precision through Parallel Kinematics/ Metrology P-560 PIMars piezo scanning stages are equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details). PIMars-Up to 6 Degrees of Freedom The new PIMars family of nanopositioning stages offers up to 6 degrees of freedom in the footprint 150 x 150 mm² with travel ranges from 15 µm to 300 µm per axis (and rotation up to 6 mrad). Direct Drive-Ultra-Fast Scanning and Positioning With the same footprint as standard PIMars stages, the P-561.2DD and P-561.3DD Versions provide a resonant frequency of up to 1 kHz in X and Y. This enables millisecond scanning rates with sub-nanometer resolution over a range of 45 µm x 45 µm ( x 15 µm). Dynamic Digital Control for Best Scanning Linearity Use our new digital control electronics with the DDL (Dynamic Digital Linearization) control option for the highest linearity in scanning applications. These systems virtually eliminate tracking errors and permit use of the entire travel range with high dynamic accuracy in the nanometer range. Working Principle/ Reliability PIMars NanoPositioning stages are equipped with ultra-high-performance PICMA® monolithic multilayer piezo actuators integrated into a sophisticated single-module, parallel-kinematics flexure guiding system. The newly designed and highly optimized piezo drives (first with 100% ceramic insulation) are more robust than conventional piezo actuators, and feature superior lifetime in dynamic and static applications. The wire-EDM-cut flexures are FEA modeled for zero-stiction/zero-friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors in a parallel-metrology configuration provide sub-nanometer resolution and stability in closed-loop operation (with PI electronics). Because guidance, sensors and actuators are all frictionless and maintenance-free, PIMars systems achieve exceptional levels of reliability. Ultra-High Vacuum Option For applications in ultrahigh vacuum (to 10-9 hPa) PI offers a special version of the P-562.3UD. It is non-magnetic (as well as non magnetizable) and contains vacuum qualified components only. These guarantee minimal outgassing rates and an optimal UHV suitability. Scanning microscopy Mask & wafer alignment Scanning interferometry Surface metrology Biotechnology Micromanipulation P-562.3CD PIMars NanoPositioning stage: 200 µm x 200 µm x 200 µm travel. P-562.3CD dimensions in mm. P-562.3CD (unloaded) step and settle is faster than 15 ms in X, Y and Z. P-562.3CD with 330 g load settles within 40 milliseconds. P-561.3DD: same footprint, different direct-drive technology for highest resonant frequencies and ultra-fast scanning dynamics.

Technical Data

Model	P-561.3CD	P-562.3CD	P-563.3CD	P-561.3DD**	Units
Active axes	XYZ	XYZ	XYZ	XYZ
Closed-loop travel	100x100x100	200x200x200	300x300x300	45x45x15	µm
Min. open-loop travel -20 to 120V	150x150x150	220x220x220	350x350x350	55x55x18	µm
Integrated feedback sensor	capacitive	capacitive	capacitive	capacitive
Closed-loop/open-loop resolution*	0.8/0.2	1/0.4	1/0.7	0.2/0.1	nm
Closed-loop linearity (typ.)	0.03	0.03	0.03	0.01	%
Push force capacity (in X, Y, Z)	200, 200, 50	120, 120, 50	100, 100, 50	200, 200, 50	N
Pull force capacity (in X, Y, Z)	30, 30, 30	30, 30, 30	30, 30, 30	30, 30, 30	N
Maximal load	50	50	50	50	N
Electrical capacitance (X, Y, Z)	5.2, 5.2, 10.4	7.2, 7.2, 14.4	7.2, 7.2, 14.4	37.2, 37.2, 6	µF +/-20%
Dynamic Operating Current Coefficient (X, Y, Z)	5.2, 5.2, 10.4	4.9, 4.9, 9.8	3.1, 3.1, 6.2	103, 103, 50	µA/(Hz x µm)
Resonant frequency unloaded (X, Y, Z)	190, 190, 380	170, 170, 315	120, 120, 240	920, 920, 1050)**	Hz ±20%
Resonant frequency with 66 g load (X, Y, Z)				800, 800, 1000)**	Hz ±20%
Resonant frequency with 330 g load (X, Y, Z)	140, 140, 300	140, 140, 195	90, 90, 170	500, 500, 500)**	Hz ±20%
Operating temperature	-20 to 80	-20 to 80	-20 to 80	-20 to 80	°C
Voltage & sensor connection	Sub-D special	Sub-D special	Sub-D special	Sub-D special
Body material	Al	Al	Al	Al
Recommended controller	E-710, E-500 System	E-710, E-500 System	E-710, E-500 System	E-710, E-500 System
* Resolution of PIPiezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 digital piezo controller. ** Also availabe as XY-version (P-561.2DD) with 20% higher resonant frequency.

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P-561.3CD
PIMars XYZ NanoPositioner, 100x100x100 µm³, Capacitive Sensors, Sub-D Connector

P-562.3CD
PIMars XYZ NanoPositioner, 200x200x200 µm³, Capacitive Sensors, Sub-D Connector

P-563.3CD
PIMars XYZ NanoPositioner, 300x300x300 µm³, Capacitive Sensors, Sub-D Connector

P-561.2DD
PIMars XY NanoPositioner, 45x45 µm², Capacitive Sensors, High-Speed, Direct-Drive

P-561.3DD
PIMars XYZ NanoPositioner, 45x45x15 µm³, Capacitive Sensors, High-Speed, Direct-Drive

Vacuum Versions:

P-561.3VD
PIMars XYZ NanoPositioner, 100x100x100 µm³, Capacitive Sensors, 10^-6 hPa

P-562.3VD
PIMars XYZ NanoPositioner, 200x200x200 µm³, Capacitive Sensors, 10^-6 hPa

P-563.3VD
PIMars XYZ NanoPositioner, 300x300x300 µm³, Capacitive Sensors, 10^-6 hPa

P-561.3UD
PIMars XYZ NanoPositioner, 100x100x100 µm³, Capacitive Sensors, 10^-9 hPa

P-562.3UD
PIMars XYZ NanoPositioner, 200x200x200 µm³, Capacitive Sensors, 10^-9 hPa

P-563.3UD
PIMars XYZ NanoPositioner, 300x300x300 µm³, Capacitive Sensors, 10-9 hPa

Further Vacuum Versions Available Invar, Super-Invar & Titanium Versions Available 6-DoF Versions Available