P-733.2DD
P-733.3DD | High Speed Direct Drive XY & XYZ Piezo Scanning/Positioning Stages |
| The product You were Looking for was moved Click Here for new Address - 4 x Faster, Through Direct Drive
- To 2.2 kHz Resonant Frequency in X and Y
- 100 Picometers Resolution
- Parallel-Metrology with Capacitive Sensors for Highest Multi-Axis Precision
- Parallel-Kinematics Design for Enhanced Responsiveness
- Active Runout Compensation
- 30 x 30 or 30 x 30 x 10 µm Travel Range
- 50 x 50 mm Clear Aperture
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Fastest Multi-Axis Systems w/Large Aperture
P-733.2DD and .3DD direct-drive stages are the fastest and most accurate multi-axis piezo scanning systems with a large aperture currently available. They provide a positioning and scanning range of 30 x 30 (x10) µm and are equipped with parallel-metrology capacitive position feedback for superior multi-axis linearity and repeatability.
The novel, high-stiffness direct drive system leads to a resonant frequency of more than 2 kHz, (4 x more than similar systems) enabling millisecond scanning rates and >500 Hz scanning frequency with sub-nanometer resolution.
Low-Profile and Clear Aperture-Ideal for Microscopy
Only 20mm high, the P-733.2DD provides one of the lowest profiles available for parallel-metrology NanoPositioning systems. The 50 x 50 mm clear aperture is ideal for transmitted-light applications such as near-field scanning microscopy, confocal microscopy and mask alignment. P-733 stages are designed for applications with loads up to 2 kg.
Higher Precision through Parallel Kinematics/Metrology
P-733 piezo scanning stages feature a parallel-kinematics design with direct-measuring, multi-axis non-contact capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform (rather than strain in the actuator, as common with lower-precision strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes (active trajectory control).
A major advantage of the single-module, parallel-kinematics design is the identical dynamic performance of the X and Y axes, important for high scanning rates. In addition, there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability, enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the force and friction exerted by a moving cable are eliminated (see the "Tutorial" section for further details).
Dynamic Digital Control for Best Scanning Linearity
Use our new digital control electronics with the DDL (Dynamic Digital Linearization) control option for the highest linearity in scanning applications. These systems virtually eliminate tracking errors and permit use of the entire travel range with high dynamic accuracy in the nanometer range.
Working Principle/Reliability
P-733 NanoPositioners units are equipped with ultra-high-performance PICMA® monolithic multilayer piezo actuators integrated into a sophisticated single-module, parallel-kinematics flexure guiding system. The newly designed and highly optimized piezo drives (first with 100% ceramic insulation) are more robust than conventional piezo actuators, and feature superior lifetime in dynamic and static applications. The wire-EDM-cut flexures are FEA modeled for zero-stiction/zero-friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors in a parallel-metrology configuration provide sub-nanometer resolution and stability in closed-loop operation (with PI electronics).
Because guidance, actuators and sensors are all frictionless and maintenance-free, P-733 systems achieve exceptional levels of reliability.
Non-Magnetic Vaccum Versions
For applications in ultrahigh vacuum, the P-733.2UD (see link) is available. It is both nonmagnetic and non-magnetizable, important for SEM applications. To guarantee minimal outgassing rates and optimal UHV suitability, P-733.2UD units contain vacuum qualified components only.
|  | - Imaging (resolution enhancement)
- Scanning microscopy
- Surface structure analysis
- Biotechnology
- Atomic force microscopy
- Semiconductor test equipment
- Precision mask and wafer alignment
- Scanning interferometry
- Nanomanipulation and other applications where high-precision, single-plane multi-axis motion is required
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P-733.3DD (left side) and P-733.2DD, high-speed, direct drive XY(Z) scanning stages are the fastest scanning stages with large aperture currently available (2.2 kHz resonant frequency!). Both units feature a footprint of only 100 x 100 mm. Compact disc for size comparison.
P-733.2UD nonmagnetic XY nanopositioner for ultra-high vacuum up to 10-9 hPa.
Dimensions of P-733.2DD and .3DD in mm.
The P-733.2DD provides more than 2.2 kHz resonant frequency for highest scanning dynamics.
0 to 100 % travel in 1.36 msec, without overshoot. The P-733.2DD is the fastest, highest precision closed-loop XY scanning stage with large aperture currently available.
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