PIHera™ Compact Vertical Piezo Nano-Elevation Stages

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The product You were Looking for was moved Click Here for new Address P-620.ZCD P-621.ZCD P-622.ZCD PIHera™ Compact Vertical Piezo Nano-Elevation Stages Z-Travel to 250 µm Ultra-Compact Design Resolution < 1 nm Low Cost New Longlife Piezo Drive Capacitive Feedback (Closed-Loop) 0.01 % Position Accuracy X, XY, Z, XYZ Versions Vacuum-Compatible Versions P-620.ZCD - P-622.ZCD PIHera™ systems are novel piezo nano-elevation stages featuring travel ranges from 50 to 250 µm. Despite the increased travel ranges the units are extremely compact, while providing subnanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system which also offers excellent guiding accuracy and rapid settling. Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors Applications such as optical path control in interferometry, or sample positioning in microscopy require long travel ranges with nanometer positioning accuracy. PIHera™ offers Z-travel ranges to 250 µm (500 µm X and XY versions are also available). The closed-loop versions are equipped with non contact, zero friction, direct-measuring two-plate capacitve position sensors. Unlike conventional indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator / guiding system. Capacitive sensors are absolute-measuring high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01% and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability. Rapid Positioning over Long Ranges One of the advantages of PIHera™ stages over (linear) motor driven positioning stages is the rapid response to motion inputs and fast and precise settling behavior. The P-622.1CD, for example, can settle to an accuracy of 10 nm in only 30 msec after a 10 mm step (other PI stages provide even faster response)! Dynamic Digital Control for Best Scanning Linearity Use our new digital control electronics with the dynamic digital control option for the highest linearity in scanning applications. These systems virtually eliminate tracking errors and permit use of the entire travel range with high dynamic accuracy in the nanometer range. Increased Lifetime with New Piezoceramic Technology The PIHera™ stage drive units are based on our P-885 PICMA® low-voltage multilayer piezo ceramics. These newly designed and highly optimized drives are more robust than conventional piezo actuators, and feature superior lifetime in dynamic and static applications. Because guidance and sensors are all frictionless and maintenance-free, PIHera™ systems achieve exceptional levels of reliability. (Dynamic) interferometry Microscopy Nanopositioning Biotechnology Quality assurance Semiconductor technology P-620.ZCL, P-621.ZCL and P-622.ZCL (from left to right) PIHera™ piezo nano-elevation stages (CDfor size comparison). Repeatability of a P-621.ZCD. PIHera™ XYZ combination Dimensions of the P-62x.ZCD/.ZCL/.Z0L in mm, decimal places separated by commas.

Technical Data

Models	P-620.ZCD preliminary data	P-621.ZCD	P-622.ZCD preliminary data	P-62x.ZCL	P-62x.Z0L	Units
Active axes	Z	Z	Z	Z	Z
Closed-loop travel	50	100	250	same as CD version	-	µm
Min. open-loop travel -20 to 120 V	65	140	400	same as CD version	same as CD version	µm
Integrated feedback sensor	capacitive	capacitive	capacitive	capacitive	-
Closed-loop/open-loop resolution*	0.2/0.1	0.3/0.2	1/0.5	same as CD version	-/same as CD version	nm
Closed-loop linearity (typ.)	0.01	0.01	0.01	0.01	-	%
Stiffness	0.5	0.6	0.24	same as CD version	same as CD version	N/µm
Push/pull force capacity (in X)	10/5	10/8	10/8	same as CD version	same as CD version	N
Max. Load	10	10	10	10	10	N
Lateral force limit	10	10	10	10	10	N
Tilt (qY, qZ) (typ.)	<80	<100	<200	same as CD version	same as CD version	µrad
Electrical capacitance	1.5	3.0	6.0	same as CD version	same as CD version	µF ±20%
Unloaded resonant frequency	1000	750	350	same as CD version	same as CD version	Hz ±20%
Resonant frequency @ 30 g load	650	500	270	same as CD version	same as CD version	Hz ±20%
Operating temperature range	-40 to 120	-40 to 120	-40 to 120	-40 to 120	-40 to 150	°C
Voltage and sensor connection	Sub-D special connector	Sub-D special connector	Sub-D special connector	LEMO	Voltage: LEMO
Weight (with cables)	115	170	190	approx. 50 g less than CD version		g ±5%
Body material	Al	Al	Al	Al	Al
Recommended controller	E-500 System, E-665, E-750 (digital), E-710 (digital)		E-500 System, E-610
*Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 controller.

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P-620.ZCD
PIHera™ Vertical Nanopositioning System, 50 µm, Capacitive Sensors, Sub-D Connector

P-620.ZCL
PIHera™ Vertical Nanopositioning System, 50 µm, Capacitive Sensors, LEMO Connectors

P-620.Z0L
PIHera™ Vertical Nanopositioning System, 50 µm, Open-Loop,
LEMO Connector

P-621.ZCD
PIHera™ Vertical Nanopositioning System, 100 µm, Capacitive Sensors, Sub-D Connector

P-621.ZCL
PIHera™ Vertical Nanopositioning System, 100 µm, Capacitive Sensors, LEMO Connectors

P-621.Z0L
PIHera™ Vertical Nanopositioning System, 100 µm, Open-Loop, LEMO Connector

P-622.ZCD
PIHera™ Vertical Nanopositioning System, 250 µm, Capacitive Sensors, Sub-D Connector

P-622.ZCL
PIHera™ Vertical Nanopositioning System, 250 µm, Capacitive Sensors, LEMO Connectors

P-622.Z0L
PIHera™ Vertical Nanopositioning System, 250 µm, Open-Loop, LEMO Connector

Vacuum versions available!
X & XYVersions: See separate Datasheets.

Custom sizes & specifications available!