P-363 | PicoCube™ Ultra-Fast, XY and XYZ NanoPositioning and Scanning Stages |
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- Superior Manipulation Tool for Nanotechnology
- Resonant Frequency 9.8 kHz
- Ultra-High-Resolution Capacitive Feedback
- Parallel-Motion Metrology for Highest Linearity and Stability
- 50 Picometer Resolution
- 5 x 5 x 5 µm Travel Range
- Very Small Package
- Rugged Design
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Ultra-High-Performance Scanner/Manipulator for Nanotechnology
The P-363 PicoCube™ XY/XYZ is an ultra-high-performance closed-loop piezo scanning system. Designed for AFM, SPM and nanomanipulation applications, it combines an ultra-low inertia, high-speed XY/XYZ piezo scanner with non-contact, direct-measuring, parallel-metrology capacitive feedback capable of 50 picometers resolution. On top of being extremely precise, the PicoCube™ system is also very small and rugged. Measuring only 30 x 30 x 40 mm (30 x 30 x 26 mm for XY version), it is easy to integrate in any scanning apparatus.
AFM, STM, SPM, Nanolithography, Nano-Imprinting, Nanometrology
The PicoCube™ was specifically developed to overcome the limitations of the piezoelectric scanners currently available for STM, AFM and SPM. In addition to these applications, the PicoCube™ is also the ideal scanning and manipulation tool for nano-imprinting, nanolithography, ultra-high-resolution near-field scanning optical microscopy and nano-surface-metrology applications.
Higher Precision Through Parallel-Motion Metrology
The PicoCube™ is based on a proprietary, newly developed ultra-fast, frictionless XY/XYZ piezo scanner equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision piezo resistive strain gauge sensors). Parallel metrology can "see" all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes.
This technique, combined with the inherent linearity and precision of the PI non-contact two-plate capacitive sensor and the ultra-compact, temperature-compensated design, results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nanometer level. PI capacitive sen-
sors are equipped with the proprietary ILS (Integrated Linearization System) for enhanced linearity and are also much less sensitive to EMI than other high-resolution sensors.
Nanometer Accuracy in 1 Millisecond with 50-Picometer Resolution.
PicoCube™ systems provide resolution of 50 picometers and below. The ultra-fast XY/XYZ piezo drives offer resonant frequencies of 9.8 kHz in Z and >3 kHz in X and Y! The high resonant frequency and high-bandwidth capacitive feedback allow step & settle to 1% accuracy in as little as one millisecond.
Rugged Design
In spite of its ability to move and position on an atomic scale, the PicoCube™ boasts a rugged design for real-world applications. For extra-high stability and reduced mass, the body is precision machined from heat-treated and stress-relieved titanium. The sophisticated frictionless design also ensures that the (moving) top plate protects the internal actuator/sensor unit from foreign objects.
Control
The PicoCube™ controller is based on the E-500, 19" rackmount chassis with one E-509.CA3 servo-controller and three E-507.36 power amplifier modules. This controller is equipped with high-speed analog interfaces (0 to 10 V). An optional E-516 20-bit interface module (see link) is also available.
|  | - Atomic Force Microscopy
- Micromanipulation
- Biotechnology
- Nanomanipulation
- Nano-imprinting
- Nanometrology
- Nanolithography
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P-363.2CD and .3CD (background) PicoCube™, high-performance piezo positioning- and scanning systems. Smart media card for size comparsion.
The P-363 settles to within 1 nm in 1 ms (100 nm step, X and Y motion; faster response in Z).
Dimensions of the P-363.3CD in mm. Removable top plate.
Dimensions of the P-363.2CD in mm. Removable top plate.
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