PIFOC^® High-Speed Piezo Nano-Focussing Device with Direct Metrology Feedback

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PIFOC^® High-Speed Piezo Nano-Focussing Device with Direct Metrology Feedback

 

The product You were Looking for was moved Click Here for new Address P-721 PIFOC® High-Speed Piezo Nano-Focussing Device with Direct Metrology Feedback Scans and Positions Objectives with Sub-nm Resolution High Linearity and Stability with Direct-Measuring Capacitive Sensors/LVDTs Travel to 100 µm Straightness of Travel £13 µrad Fast Settling Time Compatible with Metamorph™ Imaging Software P-721 are high-end microscope objective nanofocussing devices for travel ranges to 100 µm with a resolution to less than a nanometer. The units are screwed between the turret and the objective, providing a positioning and scanning range of up to 100 µm with sub-nanometer resolution, while extending the optical path by only 12.5 mm (infinity-corrected microscope required; extension tubes are available to adjust path lengths of other objectives on the turret). Superior Accuracy Through Direct Motion Metrology / Capacitive Feedback P-721.CLQ and .CDQ are equipped with direct-measuring capacitve position sensors. Unlike conventional systems, they measure the position rather than strain in the actuator / guiding system. This technique, combined with the inherent precision of the non-contact capacitive sensor and the temperature compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability at the nanometer level. Model P-721.LLQ is a lower cost version, equipped with a direct measuring LVDT sensor providing 10 nm resolution. A variety of analog and digital controllers (OEM, bench-top and rackmount) are available to drive the units. Model P-721.CDQ can be operated with the new E-665 servo-controller through an anlalog or RS-232 interface or the E-750 high-speed digital NanoAutomation® controller. This controller also features a number of options such as high-throughput PIO (parallel I/O port) or fiber link interfaces and InputShaping™ signal processing for the fastest possible settling. Working Principle PIFOC® positioners are equiped with high-performance piezoelectric drives integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, high resolution and exceptional guiding precision. Integrated, absolute measuring, direct metrology position sensors provide highest possible resolution, linearity and stability in closed-loop operation. Quick Lock The new quicklock thread adapter options allow Easy attachment of the PIFOC® to the microscope. Flexible use of several thread adapter options with one PIFOC® nanofocussing device. After the thread adapter is screwed into the microscope, the PIFOC® is attached to the adapter with the quick lock system in the desired position. Mounting does not require rotation of the PIFOC® unit, so there are no cable twisting issues. Please order thread adapters separately, the basic PIFOC® units P-721.CDQ, P-721.CLQ and P-721.LLQ do not include any thread adapter. Other PIFOC®s PIFOC®s are also available with up to 400 µm travel (P-725, see link) and for open loop operation only (P-720, see link). Custom units for moving the whole turret are available on request. Scanning interferometry Surface structure analysis Disk drive testing Autofocus systems Confocal microscopy Biotechnology Semiconductor test equipment P-721.CLQ with quick lock option P-721.12Q and objective (not included). Quick lock thread adapter P-721.12Q exploded view with microscope objective and PIFOC® P-721.CLQ. Mounting tools are included. Dimensions of the P-721.CLQ, CDQ or LLQ in mm (dimensions including thread adapter).

Technical Data

Models	P-721.CLQ	P-721.LLQ	P-721.0LQ	units	Notes see link
Max. objective diameter	39	39	39	mm
Open-loop travel @ 0 to 100 V	90	90	90	µm ±20%	A2
Closed-loop travel	100	100	-	µm	A5
Integrated feedback sensor	Capacitive	LVDT	-		B
Closed-loop ** resolution	0.7	10	-	nm	C1
Closed-loop linearity (typ.)	0.03	0.1	-	%
Full-range repeatability (typ.)	±5	±20	-	nm	C3
Stiffness	0.3	0.3	0.3	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	100 / 20	100 / 20	100 / 20	N	D3
Tilt (qX) (typ.)	0.5	0.5	0.5	µrad	E1
Tilt (qY) (typ.)	13	13	13	µrad	E1
Lateral runout (Y) (typ.)	100	100	100	nm	E2
Electrical capacitance	3.6	3.6	3.6	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	5	5	5	µA/(Hz x µm)	F2
Unloaded resonant frequency	580	580	580	Hz ±20%	G2
Resonant frequency @ 120 g load	250	250	250	Hz ±20%	G3
Resonant frequency @ 200 g load	190	190	190	Hz ±20%	G3
Operating temperature range	-20 to 80	-20 to 80	-20 to 80	°C	H2
Voltage connection	P-721.CLQ: VL; P-721.CDQ: D	VL	VL		J1
Sensor connection	P-721.CLQ: 2 x C; P-721.CDQ: D	L	-		J2
Weight (with cables)	240	230	220	g ±5%
Body material	Al	Al	Al		L
Recommended driver/controller (codes explained see link)	H, M, F	H, E	G, C
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.4 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-721.CLQ
PIFOC^® Objective Positioner & Scanner, 100 µm, Capacitive Sensor, LEMO Connectors, for Quick Lock Thread Adapters

P-721.CDQ
PIFOC^® Objective Positioner & Scanner, 100 µm, Capacitive Sensor, Sub-D connector, for Quick Lock Thread Adapters

P-721.LLQ
PIFOC^® Objective Positioner & Scanner, 100 µm, LVDT Sensor, LEMO Connectors, for Quick Lock Thread Adapters

P-721.0LQ
PIFOC^® Objective Positioner & Scanner, 100 µm, Open-Loop, LEMO Connectors, for Quick Lock Thread Adapters

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