A2 Open-loop travel @ 0 to 100 V
Typical open-loop travel at 0 to 100 V operating voltage. Max. operating voltage range is -20 to +120 V (extremes for short durations only). For details see p. see page in the “Tutorial: Piezoelectrics in Positioning” section.
A4 Open-loop travel @ 0 to -1000 V
Typical open-loop travel at 0 to -1000 V operating voltage. Voltages in excess of -750 V should not be applied for long durations. Operation in the range of +200 to -750 V is recommended for maximum lifetime and displacement. For details see p. see page in the “Tutorial: Piezoelectrics in Positioning” section.
A5 Closed-loop travel
Travel provided in closed-loop operation. PI LVPZT amplifiers have an output voltage range of -20 to +120 V to provide enough margin for the controller to compensate for load changes, etc.
B Integrated feedback sensor
Absolute measuring capacitive and LVDT (inductive) sensors are used to provide position information to the controller. For details see page see page in the “Tutorial: Piezoelectrics in Positioning” section.
C0 Open-loop resolution
Resolution of piezo flexure stages is basically infinitesimal because it is not limited by stiction and friction. Instead of resolution, the noise equivalent motion is specified. Values are typical results (RMS, 1σ), measured with E-507 amplifier module in E-500/501 chassis.
C1 Closed-loop /open-loop resolution
Resolution of piezo flexure stages is basically infinitesimal because it is not limited by stiction and friction. Instead of resolution, the noise equivalent motion is specified. Values are typical results (RMS, 1σ), measured with E-503 amplifier module in E-500/501 chassis.
C3 Full-range repeatability (typ.)
Typical values in closed-loop mode. Repeatability is a percentage of the total angle traveled. For small ranges, repeatability is significantly better.
D1 Stiffness
Static large-signal stiffness of the stage in operating direction at room temperature. Small-signal stiffness and dynamic stiffness may differ because of effects caused by the active nature of piezo material, compound effects, etc. Further details see “Tutorial: Piezoelectrics in Positioning” section, page see page.
D3 Push/pull force capacity (in operating direction)
Specifies the maximum force that can be applied to the system. Limited by the PZT ceramic material and the flexure design. If larger forces are applied, damage to the PZT, the flexures or the sensor can occur. The force limit must also be considered in dynamic applications.
Example:
the dynamic forces generated by sinusoidal operation at 500 Hz, 20 µm peakto-peak, 1 kg moved mass, are approximately ±100 N. Further details see page see page in the “Tutorial: Piezoelectrics in Positioning” section.
D4 Max. (±) normal load
Maximum vertical load, when the stage is mounted horizontally. Limited by the flexures or the load capacity of the piezo actuators.
D5 Lateral force limit
Maximum lateral force orthogonal to the operating direction. Limited by the PZT ceramics and the flexures. For XY stages the push/pull force capacity of the other module (in its operating direction) can further limit the lateral force that can be tolerated.
D6 Torque limit (qX/qY/qZ)
Maximum torque that can be applied to the system before damage occurs. Limited by the PZT ceramics and the flexures.
E1 Tip/Tilt (typ.)
Typical rotational off-axis error.
E2 Lateral runout (X/Y/Z)
Linear off-axis error.
F1 Electrical capacitance
The PZT capacitance values indicated in the technical data tables are small-signal values (measured at 1 V, 1000 Hz, 20°C, no load) large-signal values at room temperature are 30 to 50% higher. The capacitance of PZT ceramics changes with amplitude, temperature, and load, up to 200% of the unloaded, small-signal capacitance at room temperature. For detailed information on power requirements, refer to the amplifier frequency- response graphs in the “PZT Control Electronics” section of this catalog.
F2 Dynamic Operating Current Coefficient (DOCC)
Average electrical current (supplied by the amplifier) required to drive a piezo actuator per unit frequency and unit displacement (sine-wave operation). E.g. to find out if a selected amplifier can drive a given piezo stage at 50 Hz with 30 µm amplitude, multiply DOC coefficient by 50 x 30 and check if the result is smaller or equal to the output current of the selected amplifier. For details see p. see page ff. in the “Tutorial: Piezoelectrics in Posi-tioning” section.
G2 Unloaded resonant frequency
Lowest resonant frequency in operating direction (does not specify the maximum operating frequency). For details see p. see page in the “Tutorial: Piezoelectrics in Positioning” section.
G3 Resonant frequency with xx g load
Resonant frequency of the loaded system.
H2 Operating temperature range
Standard range, other temperature ranges on request. Closed-Loop Systems are calibrated for optimum performance at room temperature. Recalibration is recommended if operation is at a significantly higher or lower temperature.
J1 Voltage connection
Standard operating voltage connectors are LEMO-type connectors.
VL (Voltage Low): LEMO FFA.00.250, male. Cable: coaxial, RG 178, Teflon coated, 1m
VH (Voltage High): LEMO FFA.0A.250, male. Cable: coaxial, RG 174, PVC coated, 1m.
D: Sub-D special connector
ID: Sub-D special connector for digital controllers with AutoCalibration function
For extension cables and adapters, see “Accessories” on p. see page ff., in the “PZT Control Electronics” section.
J2 Sensor connection
Standard sensor connectors are LEMO-type connectors.
C: LEMO FFA.00.250, female. Cable: coaxial, Teflon coated, 1m.
L: LEMO FFA.0S.304, Cable: PUR coated, 1m.
D: Sub-D special connector
ID: Sub-D special connector for digital controllers with AutoCalibration function
For extension cables and adapters, see “Accessories” on p. see page ff., in the “PZT Control Electronics” section.
L Body material
Flexure stages are usually made of anodized aluminum or stainless steel. Small amounts of other materials may occur internally (for spring preload, piezo coupling, mounting, thermal compensation, etc.)
Al: Aluminum.
N-S: Non-magnetic stainless steel
S: Ferromagnetic stainless steel
I: Invar
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