Long-Travel Piezo Flexure Stage

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Long-Travel Piezo Flexure Stage

 

The product You were Looking for was moved Click Here for new Address P-290 Long-Travel Piezo Flexure Stage Vertical Travel to 1000 µm Integrated Double-Flexure Motion Amplifier Non-Magnetic Stainless Steel Design The P-290 is a unique, piezoelectrically driven elevator stage providing a 1000 µm stroke. It is designed for high-resolution static and low-frequency dynamic positioning applications. Working Principle The P-290 is a vertical positioning platform driven by a piezoelectric drive system. The drive system consists of two stacked PZT flexure tilt positioners (similar to P-287) machined from one solid piece of stainless steel. Each of the two tilt positioners is equipped with a high-voltage piezoelectric stack actuator (0 to -1000 V) integrated into a zero stiction, zero-friction, wire-EDM-cut flexure motion amplifier system. The positioning platform is guided by linear ball bearings to eliminate tilt. Wafer inspection Nanopositioning Medical analysis Biology Optics P-290 Flexure NanoPositioner P-290 dimensions (in mm)

Technical Data

Models	P-290.00	Units	Notes see link
Active axes	Z
Open-loop travel @ 0 to -1000 V	1000	µm ±20%	A4
** Open-loop resolution £	20	nm	C0
Stiffness	0.07	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	(50/10)	N	D3
Max. (+/-) normal load	5	kg	D4
Electrical capacitance	500	nF ±20%	F1
* Dynamic operating current coefficient (DOCC)	0.63	µA/(Hz X µm)	F2
Unloaded resonant frequency	100	Hz ±20%	G2
Operating temperature range	-20 to 80	°C	H2
Weight (with cables)	280	g ±5%
Body material	N-S, S		L
Recommended Amplifier/Controller (codes explained see link)	B, I
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 300 µm at 5 Hz requires approximately 1 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-507 amplifier.

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P-290.00
Vertical Piezo Flexure Stage, 1000 µm

Options:

P-703.20
High-Vacuum Modification, see page
see link in the "PZT Actuators" section

Custom Designs
for Volume Buyers