Vertical/Tilt Piezo Flexure Stage

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Vertical/Tilt Piezo Flexure Stage

 

The product You were Looking for was moved Click Here for new Address P-287 Vertical/Tilt Piezo Flexure Stage Vertical Travel to 700 µm Tilt to 0.7 degrees Non-Magnetic Stainless Steel Design The P-287 is a high-resolution, piezoelectrically driven flexure stage providing tilt up to 12 mrad and vertical travel up to 700 µm at the tip. A ball seat is machined into the tip to decouple any rotation if the P-287 is used as a linear drive. In that case an external guiding system is recommended (e.g. frictionless diaphragm spring). Working Principle P-287 positioners are equipped with high-voltage piezoelectric drives (0 to -1000 V) integrated into a zero stiction/friction, ultra-high-resolution, wire-EDM-cut flexure motion amplifier system. The linear motion of the piezo translator produces an arc motion of the tip. Wafer inspection Nanopositioning Medical analysis Biology Optics P-287.70 Flexure NanoPositioner P-287.70 dimensions (in mm)

Technical Data

Models	P-287.70	Units	Notes see link
Active axes	θX, (Z)
Open-loop travel @ 0 to -1000 V	12 (700)	mrad, (µm at tip) ±20%	A4
** Open-loop resolution £	0.2 (7)	µrad (nm at tip)	C0
Stiffness (in operating direction)	0.13 (at tip)	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	80/10	N	D3
Electrical capacitance	290	nF ±20%	F1
* Dynamic operating current coefficient (DOCC)	30 [0.5 /Hz µm at tip]	µA/(Hz X mrad)	F2
Unloaded resonant frequency	380	Hz ±20%	G2
Operating temperature range	- 40 to 80	°C	H2
Voltage connection	VH		J1
Weight (with cables)	195	g ±5%
Body material	N-S		L
Recommended Amplifier/Controller (codes explained see link)	B, I
* Dynamic Operating Current Coefficient in µA per hertz and mrad (µm). Example: Sinusoidal scan of 10 mrad at 10 Hz requires approximately 3 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-507 amplifier

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P-287.70
Vertical / Tilt Piezo Flexure Stage,
12 mrad, 700 µm

Options:

P-703.20
High-Vacuum Modification,
see link, "PZT Actuators"
section

Custom Designs
for Volume Buyers