Vertical Piezo Flexure NanoPositioner

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The product You were Looking for was moved Click Here for new Address P-783 Vertical Piezo Flexure NanoPositioner Z-Travel to 300 µm Internal Motion Amplifier Resolution < 10 nm The P-783 Piezo Flexure Stage is a compact, long-travel actuator providing a positioning and scanning range of up to 300 µm. It is designed for applications with loads ranging typically from a few grams to a few hundred grams. Long Travel Range The integrated motion amplifier provides a large travel range in a very compact package. An LVDT (linear variable differential transformer) feedback sensor is integrated in the unit for closed-loop operation with excellent repeatability. Working Principle The P-783 is equipped with a low-voltage piezoelectric drive (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA-modeled for zerostiction/friction, ultra-high resolution and exceptional guiding precision. An integrated LVDT position feedback sensor provides nanometer-scale resolution and stability in closed-loop operation (with PI electronics as recommended). Metrology Wafer inspection PCB inspection Nanopositioning Switching Biotechnology Micromanipulation P-783 Flexure NanoPositioner, microprocessor shown for size comparison P-783 dimensions (in mm)

Technical Data

Models	P-783.ZL	Units	Notes see link
Active axes	Z
Open-loop travel @ 0 to 100 V	300	µm ±20%	A2
Closed-loop travel ³	300	µm	A5
Integrated feedback sensor	LVDT		B
Closed-loop / open-loop ** resolution £	10 / 1	nm	C1
Closed-loop linearity (typ.)	0.1	%
Full-range repeatability (typ.)	±15	nm	C3
Stiffness	0.15	N/µm ±20%	D1
Push/pull force capacity (in operating direction)	20/10	N	D3
Max. normal load	+2/-0.5	kg	D4
Lateral force limit	0.5	N	D5
Lateral runout (tip/tilt) (typ.)	10 / 25	µrad	E1
Electrical capacitance	5.4	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	2	µA/(Hz X µm)	F2
Unloaded resonant frequency	300	Hz ±20%	G2
Resonant frequency @ 24 g load	240	Hz ±20%	G3
Resonant frequency @ 100 g load	160	Hz ±20%	G3
Operating temperature range	- 20 to 80	°C	H2
Voltage connection	VL		J1
Sensor connection	L		J2
Weight (with cables)	160	g ±5%
Body material	Al, (platform: steel)		L
Recommended Amplifier/Controller (codes explained see link)	H, E
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 0.6 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-783.ZL
Vertical PZT Flexure Stage,
300 µm, LVDT Sensor

Custom Designs
for Volume Buyers