Family of Piezo Flexure NanoPositioners and Scanners

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Family of Piezo Flexure NanoPositioners and Scanners

 

The product You were Looking for was moved Click Here for new Address P-762 Family of Piezo Flexure NanoPositioners and Scanners 1-, 2-, 3- and 5-Axis Versions Compact Design 20 x 20 mm Clear Aperture Travel 100 µm, Tilt to 3.4 mrad P-762 series piezo flexure stages are compact sensor-equipped multi-axis flexure positioners and scanners. The following versions are available: X, Z, XY, XYZ, ZθXθY and XYZθXθY. All versions not containing a Z module have a 20 x 20 mm clear aperture. The XY version consists of an X module and a slightly modified Y module. The Z module is equipped with 3 PZT stacks located at the corners of a triangle. The stacks are individually matched for equal displacement and electrically connected in parallel. A displacement sensor, mounted in the center of the triangle, provides optimum stability at the expense of an aperture. The ZθXθY module allows individual control of the three Z-direction PZTs. The displacements are measured by three sensors. (See separate equation for tip and tilt calculation). The XYZ version consists of an XY module stacked together with a Z module. The XYZθXθY version consists of the XY module stacked together with a ZθXθY module. Working Principle P-762 positioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction, zero friction, ultra-high resolution and exceptional guiding precision. Integrated LVDT (linear variable differential transformer) position feedback sensors provide nanometer-scale resolution and stability in closed-loop operation (with PI electronics). Photonics packaging & alignment Integrated optics Fiber alignment Semiconductor test equipment Scanning interferometry Disk drive testing Surface structure analysis Confocal microscopy Biotechnology Micromanipulation P-762.1L, Flexure NanoPositioner P-762.2L, XY Flexure NanoPositioner P-762.1L dimensions (in mm; inner frame moves). P-762.3L dimensions (in mm) P-762.2L dimensions (in mm; outer frame moves). P-762.5L, XYZθXθY Flexure NanoPositioner Sensor Positions in P-762.TL, P-762.5L PZT Positions in P-762.TL, P-762.5L, P-762.ZL, P-762.3L. P-762.ZL and P-762.3L w/o 20 X 20 aperture (special version with aperture available on request), one common voltage cable.

Technical Data

Models	P-762.1L	P-762.2L	P-762.3L	P-762.ZL	P-762.TL	P-762.5L	Units	Notes see link
Active axes	X	X,Y	X,Y,Z	Z	Z,θX,θY	X,Y,Z,θX,θY
Open-loop travel @ 0 to 100 V	100	100 x 100	100 x 100 x 100	100	100, (±2.6, ±1.7)	100 x 100 x100, (±2.6, ±1.7)	µm (mrad), ±20%	A2
Closed-loop travel ³	100	100 x 100	100 x 100 x 100	100	100, (±2.6, ±1.7)	100 x 100 x 100, (±2.6, ±1.7)	µm (mrad)	A5
Integrated feedback sensor	1 x LVDT	2 x LVDT	3 x LVDT	1 x LVDT	3 x LVDT	5 x LVDT		B
Closed-loop / open-loop ** resolution £	10 / 1	10 / 1	10 / 1	10 / 1	10 / 1 (0.5 / 0.1)	10 / 1 (0.5 / 0.1)	nm (µrad)	C1
Closed-loop linearity (typ.)	0.1	0.1	0.1	0.1	0.1	0.1	%
Full-range repeatability (typ.)	±20	±20	±20	±20	±20 (±1 µrad)	±20 (±1 µrad)	nm	C3
Max. (±) normal load	5	5	2	2	2	2	kg	D4
Tilt (θY, θZ) (typ.)	10	10	10				µrad	E1
Lateral runout (Y) £	10						nm	E2
Electrical capacitance	11	11 / axis	11 / axis	11	2.8 (ch1), 5.5 (ch2), 2.8 (ch3), see dwg.	2 x 11 (X,Y), 2.8, 5.5, 2.8 (Z), see dwg.	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	14	14 / axis	14 / axis	14	3.5 (ch1,3), 7 (ch2), see dwg.	14 (X,Y), 3.5 (ch1,3), 7 (ch2) , see dwg.	µA/(Hz x µm)	F2
Unloaded resonant frequency	700	350	X,Y: 200 Z: 450	450	Z: 450	X,Y: 200 Z: 450	Hz ±20%	G2
Operating temperature range	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	- 20 to 80	°C	H2
Voltage connection	VL	2 x VL	3 x VL	VL	3 x VL	5 x VL		J1
Sensor connection	L	2 x L	3 x L	L	3 x L	5 x L		J2
Weight (with cables)	230	460	850	370	390	870	g ±5%
Body material	Al	Al	Al	Al	Al	Al		L
Recommended Amplifier/Controller (codes explained see link)	H, E	H, E	H, E	H, E	H, E	H, E
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example (P-762.1L): Sinusoidal scan of 30 µm at 10 Hz requires approximately 4.2 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier.

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P-762.1L
PZT Flexure Stage, 100 µm,
LVDT Sensor

P-762.2L
XY PZT Flexure Stage,100 X 100 µm,
LVDT Sensor

P-762.3L
XYZ PZT Flexure Stage,
100 X 100 X 100 µm,
LVDT Sensor

P-762.ZL
Vertical PZT Flexure Stage, 100 µm,
LVDT Sensor

P-762.TL
ZθXθY PZT Flexure Stage, 100 µm,
±1.7 mrad, ±2.6 mrad, LVDT Sensor

P-762.5L
XYZθXθY PZT Flexure Stage,
100 X 100 X 100 µm, ±1.7 mrad,
±2.6 mrad, LVDT Sensor

Custom Designs
for Volume Buyers