NanoCube™ XYZ NanoPositioning Systems

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The product You were Looking for was moved Click Here for new Address P-611.3S P-611.3O NanoCube™ XYZ NanoPositioning Systems 100 x 100 x 100 µm Travel Range Ultra-Compact: 44 x 44 x 44 mm (Closed-Loop Version!) 1nm Resolution Ideal for Fiber-Alignment and Photonics Packaging Applications Optional E-760 Controller Card Features Built-In Optical Metrology Closed- and Open-Loop Versions Precision Trajectory Control Fast Scanning and Settling Large Variety of Controllers The P-611 NanoCube™ is PI's smallest, closed-loop, multi-axis Piezo-NanoPositioning system. Its 100 x 100 x 100 µm, XYZ positioning and scanning range comes in an extremely compact package of only 44x 44 x 44 mm. Equipped with a zero-stiction, zero-friction guiding system, the NanoCube™ provides motion with ultra-high resolution and settling times of only a few milliseconds. Open- and closed-loop versions are offered to suit your application. Versatility NanoCubes™ can be easily combined with a variety of automated or manual PI micropositioning systems, from single-axis stages to 6-degree-of-freedom micromanipulators. Photonics Alignment A special version is available for fiber alignment and photonics packaging (see link) Working Principle P-611 NanoPositioners are equipped with low-voltage piezoelectric drives (0 to 100 V) integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a multi-flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled (finite element analysis) for zero stiction and zero friction, ultra-high resolution and exceptional guiding precision. Integrated strain gauge position feedback sensors provide nanometer-scale resolution in closed-loop operation (with PI control electronics). Photonics packaging Micromachining Micromanipulation (life sciences) Semiconductor test systems For fiber optics applications, see P-611.3SF, see link NanoCube™, XYZ Compact NanoPositioning System, 100 x 100 x 100 µm travel range, 1nm resolution. P-611.3O, P-611.3S dimensions (in mm) F-131, Combination of NanoCube™ XYZ NanoPositioning System, 100 x 100 x 100 µm and M-111 XYZ MicroPositioner 15 x 15 x 15 mm. (see the "Photonics Alignment" section for details).

Technical Data

Models	P-611.3S	P-611.3O	Units	Notes see link
Active axes	X,Y,Z	X,Y,Z
Open-loop travel @ 0 to 100 V	100 / axis	100 / axis	µm ±20%	A2
Closed-loop travel ³	100 / axis	-	µm	A5
Integrated feedback sensor	SGS	-		B
Closed / open-loop ** resolution £	2 / 1	- / 1	nm	C1
Repeatability	25	25	nm
Stiffness	0.3	0.3	N/µm ±20%	D1
Max. normal load	+1.5/-0.5	+1.5/-0.5	kg	D4
Electrical capacitance	1.8 / Axis	1.8 / Axis	µF ±20%	F1
* Dynamic operating current coefficient (DOCC)	2 / axis	2 / axis	µA/(Hz X µm)	F2
Unloaded resonant frequency (X/Y/Z)	350/220/250	350/220/250	Hz ±20%	G2
Operating temperature range	- 20 to 80	- 20 to 80	°C	H2
Voltage connection ***	D	D		J1
Sensor connection ***	D			J2
Weight (w/o cables)	250	250	g ±5%
Body material	S/Al	S/Al		L
Recommended Amplifier/Controller (codes explained see link)	N, D, H	G, H
* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 50 µm at 10 Hz requires approximately 1 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier. *** Adapter cable with LEMO connectors for sensor and operating voltage included.

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P-611.3S
NanoCube™ XYZ Piezo NanoPositioning Stage,
100 X 100 X 100 µm, Closed-Loop

P-611.3O
NanoCube™ XYZ Piezo NanoPositioning Stage, 100 X 100 X 100 µm, Open-Loop

A special version is available for fiber alignment and photonics packaging (see link)

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