Long-Travel, 6-Axis, Single-Module Piezo Flexure NanoPositioner and Scanner

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Long-Travel, 6-Axis, Single-Module Piezo Flexure NanoPositioner and Scanner

 

The product You were Looking for was moved Click Here for new Address P-587 Long-Travel, 6-Axis, Single-Module Piezo Flexure NanoPositioner and Scanner For X Y Z qXqYqZ Scanning and Positioning 800 × 800 × 200 µm Linear Range Up to 10 mrad Rotational Range Precision Trajectory Control Single-Module, Parallel-Kinematics Design features Enhanced Responsiveness and Automatic Runout Compensation Capacitive Sensors for Ultra-High Resolution ID Chip for AutoCalibration Function P-587.6CD is a unique, highly accurate 6-axis scanning and positioning system, providing a linear travel range of 800 × 800 × 200 µm and rotation ranges of 10 mrad. AutoCalibration For optimized operation and interchangeability of the nanomechanics and controller, the P-587.6CD is equipped with an ID chip which holds all calibration data and sends it to the digital controller when powered up. Parallel Kinematics A major advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details). Working Principle Low-voltage PZTs (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide ultra-high resolution and stability in closed-loop operation (with PI electronics). Metrology Nanopositioning Semiconductor test equipment Precision mask and wafer alignment Scanning interferometry Surface structure analysis P-587 Flexure NanoPositioner with 6-axis digital controller P-587 dimensions (in mm)

Technical Data

Models	P-587.6CD	Units	Notes see link
Active axes	X Y Z qXqYqZ
Closed-loop travel in XYZ ³	800 × 800 × 200	µm	A5
Closed-loop travel in qXqYqZ ³	10	mrad
Integrated feedback sensors	capacitive		B
Closed-loop resolution	10-5 x range
Closed-loop linearity (typ.)	XY : 0.004% (30 nm) Z : 0.01% (20 nm) rotations: 0.2% (2 µrad)
Max. (±) normal load	5	kg	D4
Electrical capacitance (XY)	2 x 51 /axis µF ±20%		F1
Electrical capacitance (Z)	4 x 5.4 µF	µF ±20%
*Resonant frequency XY	103	Hz ±20%	G2
*Resonant frequency Z	220	Hz ±20%	G2
*Resonant frequency qXqY	308	Hz ±20%	G2
*Resonant frequency qZ	140	Hz ±20%	G2
Cross Talk, all axes at full range	1	µrad
Operating temperature range	- 20 to 80	°C	H2
Voltage /sensor connection	ID		J1/J2
Weight (without cables)	7.2	kg ±5%
Body material	Al/Invar		L
Recommended Amplifier/Controller	E-710.6CD
* at 600 g load

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P-587.6CD
6-Axis, Long-Travel Piezo Flexure Stage, 800 × 800 × 200 µm × 3 × 3 × 10 mrad

Custom Designs for Volume Buyers