Multi-Axis, Single-Module Piezo Flexure NanoPositioners and Scanners

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P-517
P-527
Multi-Axis, Single-Module Piezo Flexure NanoPositioners and Scanners
  • Precision Trajectory Control
  • Single-Module, Parallel-Kinematics Design Features Enhanced Responsiveness and Automatic Runout Compensation
  • 1- to 6-Axis Versions
  • Travel Ranges to 200 µm
  • Clear Aperture to 66 x 66 mm
  • Integrated Capacitive Displacement Sensors
  • Optional Active Error Compensation for Enhanced Trajectory Control




P-500 series NanoPositioners are low-profile, high-resolution, piezoelectrically driven, multi-axis flexure stages providing motion with up to 6 degrees of freedom. Linear travel ranges to 200 x 200 x 20 µm and rotation ranges to ±2 mrad are available. The 66 x 66 mm clear aperture is ideal for transmitted-light applications.

Parallel Kinematics, Versatility
The low cost and versatility of the P-500 stages are made possible by their unique single-module multi-axis design. Another advantage of the single-module parallel-kinematics design is that there are no moving cables and no cable management issues to be resolved when integrating the unit. This design increases reliability enhances responsiveness and also increases repeatability and accuracy at the nanometer level, because the friction and force exerted by a moving cable are eliminated (see the "Tutorial" section, see link ff. for further details).

State-of-the-art trajectory control is achieved in a special 6D version of the P-500. This stage incorporates 6-axis active error compensation to force sub-nm and sub-µrad straightness and flatness (ask for separate information).

For longer travel ranges see the P-587 six-axis NanoPositioning system on see link.

Working Principle
Low-voltage PZTs (0 to 100 V) and flexures are employed as the drive and guiding system. The flexures provide zero stiction/friction, ultra-high resolution and exceptional guiding precision. Integrated capacitive position feedback sensors provide sub-nanometer resolution and stability in closed-loop operation (with PI electronics).
  • Metrology
  • Lithography
  • Nanopositioning
  • Scanning microscopy
  • Disk-drive testing
  • Optics
  • Laser technology
  • Micromanufacturing
 P-527.2CL Single-module Flexure NanoPositioner

P-527.2CL Single-module Flexure NanoPositioner


P-517, P-527 dimensions (in mm)

P-517, P-527 dimensions (in mm)

Technical Data P-500-Series (XYZ and X,Y,
ModelsP-517.2CLP-527.2CLP-517.3CLP-527.3CLP-517.3CDP-527.3CDP-517.RCDP-527.RCDUnitsNotes see link
Active axesX,YX,YX,Y,ZX,Y,ZX,Y,ZX,Y,ZX,Y, θZX,Y, θZ
Open-loop travel @ 0 to 100 V100 X 100 200 X 200 100 X 100 X 20200 X 200 X 20100 X 100 X 20200 X 200 X 20100 ± 1 mrad 200 ±2 mradµm ±20%A2
Closed-loop travel ³100 X 100200 X 200100 X 100 X 20200 X 200 X 20100 X 100 X 20200 X 200 X 20100 ±1 mrad200 ±2 mradµmA5
Integrated feedback sensor2 x capacitive2 x capacitive3 x capacitive3 x capacitive3 x capacitive3 x capacitive3 x capacitive3 x capacitiveB
Closed- / open-loop*** resolution £12X,Y: 1; Z: 0.1X,Y: 2; Z: 0.1X,Y: 1; Z: 0.1X,Y: 2; Z: 0.1X,Y: 1; qZ: 0,3 µradX,Y: 2; qZ: 0,3 µradnm C1
Closed-loop linearity (typ.)0.030.030.030.030.030.030.030.03%
Full-range repeatability (typ.)±5±10X,Y: ±5; Z: ±1X,Y:±10; Z: ±1X,Y: ±5; Z: ±1X,Y:±10; Z: ±1X,Y: ±5; µradX,Y: ±10; µradnm C3
Stiffness 21X,Y: 2; Z: 15X,Y: 1; Z: 15X,Y: 2; Z: 15X,Y: 1; Z: 1521N/µm ±20%D1
Push/pull force capacity (in operating direction)200 / 30200 / 30200 / 30; Z: 50 / 30200 / 30; Z: 50 / 30200 / 30; Z: 50 / 30200 / 30; Z: 50 / 30200 / 30200 / 30ND3
Max. (±) normal load55555555kgD4
* Electrical capacitance 11 / axis 11 / axisX,Y: 11; Z: 7.2X,Y: 11; Z: 7.2X,Y: 11; Z: 7.2X,Y: 11; Z: 7.2X,Y: 11X,Y: 11µF ±20%F1
* Dynamic operating current coefficient (DOCC)13.7 / axis 6.9 / axisX,Y: 13.7; :Z: 75 X,Y: 6.9; :Z: 75 X,Y: 13.7; :Z: 75 X,Y: 6.9; :Z: 75X,Y: 13.7X,Y: 6.9µA/(Hz x µm)F2
Unloaded resonant frequency 450350450; Z: 1100350; Z: 1100450; Z: 1100350; Z: 1100X,Y: 450; θZ: 400X,Y: 350; θZ: 300Hz ±20%G2
Resonant frequency @ 500 g load250190X, Y: 250X, Y: 190X, Y: 250X, Y: 190X,Y 250X, Y: 190Hz ±20%G3
Resonant frequency @ 2500 g load140110X, Y: 140X, Y: 110X, Y: 140X, Y: 110 X,Y 140X, Y: 110Hz ±20%G3
Operating temperature range- 20 to 80- 20 to 80- 20 to 80- 20 to 80- 20 to 80- 20 to 80- 20 to 80- 20 to 80°CH2
** Voltage connection 2 x VL 2 x VL 3 x VL 3 x VL DDD D J1
** Sensor connection 4 x C 4 x C6 x C6 x CDDDDJ2
Weight (with cables) 14001400145014501460146014001400g ±5%
Body materialAlAlAlAlAlAlAlAlL
Recommended Amplifier/Controller (codes explained see link)H, F, L, K H, F, L, KH, F, LH, F, LKKKK
* Capacitance and DOCC of rotational axes cannot be stated because θZ is based on differential X and Y motion rather than on motion of a dedicated rotational drive.
Dynamic Operating Current Coefficient of linear axes is in µA per hertz and µm.
Example P-527.2xx: Sinusoidal scan of 30 µm at 10 Hz requires approximately 2.1 mA drive current.
** Cable length: 1.5 m. Versions P-5xx.xxD with one Sub-D special connector for sensor and operating voltage.
Versions P-5xx.xxL with LEMO connectors.
*** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710, E-503.

(cont.)
To request a quote click here and copy and paste the ordering information in the proper fields at the bottom of the quote-request form.

P-517.2CL
XY Piezo Flexure Stage,
100 X 100 µm, Capacitive Sensor,
LEMO Connectors

P-527.2CL
XY Piezo Flexure Stage,
200 X 200 µm, Capacitive Sensor,
LEMO Connectors

P-517.3CL
XYZ Piezo Flexure Stage,
100 X 100 X 20 µm, Capacitive
Sensor, LEMO Connectors

P-527.3CL
XYZ Piezo Flexure Stage,
200 X 200 X 20 µm, Capacitive
Sensor, LEMO Connectors

P-517.3CD
XYZ Piezo Flexure Stage,
100 X 100 X 20 µm, Capacitive
Sensor, Sub-D Connector

P-527.3CD
XYZ Piezo Flexure Stage,
200 X 200 X 20 µm, Capacitive
Sensor, Sub-D Connector

P-517.RCD
X,Y, θZ Piezo Flexure Stage,
100 X 100 µm, ±1 mrad, Capacitive Sensor,
Sub-D Connector

P-527.RCD
X,Y, θZ Piezo Flexure Stage,
200 X 200 µm, ±2 mrad, Capacitive Sensor,
Sub-D Connector

Custom Designs
for Volume Buyers

Piezo Nano-Actuators · Low Inertia Hexapod Piezo · Piezoelectric Material · Capacitance Sensors · Ultra-Precision Motion Control, Flexure Nano-Positioning Stage · Precision Nanopositioner · Parallel Kinematic · · Micropositioners · PI Ceramic Piezoceramic Material Nanoautomation · PI-USA · Nanopositioning-Systems PDF Catalog · Hexapod · Micropositioning · Hexapod PIFOC® Piezo Microscopy Focus Scanner · Ultrasonic Piezo Motors, Piezomotor · Multilayer Piezo Lifetime · Piezo Systems, Piezo Actuator